Pfeiffer Vacuum ATH 2300 MT Operating Instructions Manual
  1. Manuals
  2. Brands
  3. Pfeiffer Vacuum Manuals
  4. Water Pump
  5. ATH 2300 MT
  6. Operating instructions manual

Pfeiffer Vacuum ATH 2300 MT Operating Instructions Manual

Turbomolecular pumps
Hide thumbs Also See for ATH 2300 MT:
Table of Contents

Advertisement

Quick Links

Download this manual
OPERATING INSTRUCTIONS
OPERATING INSTRUCTIONS
ATH 2300 M/MT
ATH 2300 M/MT
Turbomolecular pumps
Turbomolecular pumps
Translation of the original instructions
Translation of the original instructions
EN
EN

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the ATH 2300 MT and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for Pfeiffer Vacuum ATH 2300 MT

Summary of Contents for Pfeiffer Vacuum ATH 2300 MT

  • Page 1 OPERATING INSTRUCTIONS OPERATING INSTRUCTIONS Translation of the original instructions Translation of the original instructions ATH 2300 M/MT ATH 2300 M/MT Turbomolecular pumps Turbomolecular pumps...
  • Page 2 This operating instruction manual includes only the instructions to connect the pump to the equipment. Refer to the controller operating instructions to power and use the pump (chapter B, C and D). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 3 All rights reserved, including copying this document in whole or any part without prior written authorization from Pfeiffer Vaccum SAS. Specifications and information are subject to change without notice by the manufacturer. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 4: General Contents

    Indicates a potentially hazardous situation which, if not avoided, could result in death or severe injury. Indicates an imminently hazardous situation that, if not avoided, will result in death or severe injury (extreme situations). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 5 Electrical connector locking Purge Purge port Exhaust of the pump Pump exhaust Water Water cooling circuit connection Water max Pr.7 bar/101 psi Max. cooling water pressure Direction of rotation of the pump Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 6 Technical characteristics of the pump A 510 The accessories of the pump A 515 Pump accessory dimensions - Purge valve (50 sccm) dimensions - Water valve dimensions - Air inlet valve dimensions Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 7 Temperature regulated by the controller. The MT version is supplied with a water valve. Controllers The ATH 2300 M/MT pumps work with the OBC controller or with the MAGPOWER controller. (refer to the operating instructions corresponding). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 8 Electronics Bearing Position Stator sensor Position of Reference Power Correction Rotor amplifiers Electro- magnet Position return Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 9 It ensures the lowest possible levels of noise and vibration. Stator geometric axis Rotor geometric axis Rotor inertia axis Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 10 Molecular drag Motor Magnetic EXHAUST levitated bearings Gas purge* Cooling * The gas purge provides an excellent protection of the pump bearings for corrosive applications and ensures the rotor cooling. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 11 This device is controlled by the controller. The MT version must be equipped with its water valve (the water valve is supplied with the MT model). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 12 A distinction is made between the following speeds: - reduced speed (STANDBY speed) which can be set between the low speed value and the nominal speed. - nominal speed preselected at factory. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 13 With a low exhaust pressure, depends on external conditions (water temperature, water flow, ambient temperature). (not applicable for air cooling version). With ratio inlet pressure/exhaust pressure >100, max. throughput reduced. ISO/F flange, better with CFF flange. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 14 Not all leakage current is necessary evacuated through the earth wire; it depends on the pump earth connect regarding the equipment to which the pump is connected. Maximum relative humidity 80 % for temperatures up to 31 °C, decreasing linearly to 50 % relative humidity at 40 °C. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 15 15.43 14.55 15.85 12.05 10.24 0.43 0.47 8.03 inch 15° 12,00 276,50 366,60 392,00 369,50 402,50 306,00 213,00 DN 200 CF-F inch 0.47 10.89 14.43 15.43 14.55 15.85 12.05 8.39 Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 16 15.43 14.55 15.85 12.05 10.24 0.43 0.47 8.03 inch 15° 12,00 276,50 366,60 392,00 369,50 402,50 306,00 213,00 DN 200 CF-F inch 0.47 10.89 14.43 15.43 14.55 15.85 12.05 8.39 Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 17 14.62 18.62 13.50 10.88 9.09 0.78 0.27 5,625 369,50 371,50 276,50 DN 250 CF-F inch 0.22 1.26 0.34 11.18 12.04 1.02 20.66 14.55 14.62 18.62 13.50 10.88 9.09 0.78 0.27 Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 18 ATP 2300 M 118690 32 Studs M8x35 110676S* 12 CHC M10x35 ATH 2800 M ATH 3200 M 113189* 12 CHC M12x45 * With the presence of centering ring at inlet port Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 19 Water valve P/N. Water valve 108668 Air inlet valve cables Dimensions and purge valve cables A462403-010 (for pumps controlled by 3,5 m A462403-035 Magpower) A462403-050 10 m A462403-100 20 m A462403-200 Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 20: Accessory Dimensions

    (inch) 83.3 (3.26) 30 (1.18) Pump connection Water valve (0.59) Cable water valve dimensions mm (inch) Inlet and outlet (0,59) 1/8 NPT female Scale 13/20 38,7 (1.52) 47,7 (1.88) Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 21 (inch) Pump connection Connector for coil (possible to rotate) 1/8 NPT female connector (air inlet) DN 40 ISO-KF 82 (3.23) 65.5 (2.58) 18.5 (0.73) 1/8 NPT female connector Dust filter Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 22 Water cooling connection - Water characteristics - Water line connection - For ATH 2300 M model - For ATH 2300 MT model - Procedure to connection B 401 Typical electrical wiring diagram Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 23: Safety Instructions For Installation

    In all cases, we recommend keeping the packaging (reusable materials) for further transport of the equipment or for prolonged storage. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 24 Make sure all parts and chambers connected to the inlet, exhaust and purge of the maglev pump can withstand a negative pressure of 100 kPa below atmospheric pressure and that they are impervious to damage from vacuum (seals, etc.). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 25 OSHA requirement 29 CFR.1910.147. If access to the IEC connector is restricted an additional isolation device  should be provided, which will be easily accessible by an operator. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 26 Specific operating conditions may exist that require extra caution from  users due to the high temperatures generated (outer surfaces > 70 °C): wear protective gloves and leave the pump to cool before working on the product. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 27 Controller can be deteriorated when any objects are introduced or any liquids penetrate into the unit. Make sure no objects enter through the ventilation holes. Keep the unit away from the liquids. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 28: Other Labels

    CHEMICALS LOCATED WHITHIN THE ENCLOSURE Explosure may result in severe injury preventive maintenance operation can only be performed by or death. Preventive maintenance must be done by trained personnel only. trained personnel. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 29: Pump Handling

    Risk of tilting: although the product meets EEC safety regulations , it is advisable to guard against the risk of tilting during handling, installation, and use ( chapter A for the location of the center of gravity). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 30: Pump Storage

    ASA 6”, ISO or CF-F blanking flange (depends on the models). Exhaust Blanked with a DN 40 ISO-KF blanking plates. Connection for air inlet Blanked with a DN 16 ISO-KF blanking plate. valve and nitrogen device Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 31: Pump Connections To An Installation

    - connect the pump to the customer’s handling device using the threaded holes located at the rear of the pump ( A 400 of the operating manual). The pump can operate in any position Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 32  Strictly comply with the installation instructions described in this manual. Pfeiffer Vacuum will be released from any warranty and responsibility for non-compliance with installation instructions.  Only use approved original connecting accessories from Pfeiffer Vacuum for the installation (see Accessories).
  • Page 33 Loads transmitted to the system (1) Rotor Loads : Pump fixed to system : valve Bending moment (b) Pendulum plate Front view Axial load (a) Pump Torque (c) Top view Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 34 Number of bolts dictated Bolt metric grade 12-9 12-9 Installation torque per bolt (N·m) Total clamping force (N) 161500 355000 * The type, number, grade and clamping torques are imposed and mandatory. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 35 Frame fixation (3) If the frame is not designed to withstand the maximum loads in case of rotor blocking, contact Pfeiffer Vacuum who will help you to design your installation. We strongly recommend the use of ISO-F or CF-F flanges. ISO-K type flanges are not recommended to fasten turbomolecular because: •...

  • Page 36: Vacuum Connections

    Use only dry and clean pipe lines, and wear gloves to make the pump connections. After connecting the product to the pumping line, check for leaks along the entire to ensure proper connections (pump, pipes, valves,.…). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 37 It is highly recommended to install an isolation valve (closed when power is off) between the turbo pump and the roughing circuit. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 38: Nitrogen Characteristics

    It is advised to maintain the purge flow as long as the rotor is running to protect pump internal parts. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 39 - Tighten the connection, applying a maximum tightening torque of 10 N·m. - Adjust the inert gas purge pressure to obtain the desired flow (see graph below). Flow rate (SCCM) Absolute pressure at inlet (kPa) Dust filter Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 40: Air Inlet Valve

    Dust filter Operating instructions of the controller). Filtered air or N purge A nitrogen purge can be connected instead of the dust filter (1/8 NPT female). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 41: Water Cooling Connection

    The presence of micro-organisms like aquatic weeds and micro-biological substances like bacteria can lead to cooling problems in the pump.  An appropriate water treatment system must be used to prevent the growth of such microorganisms. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 42: Water Line Connection

    Connect the water valve, check the efficiency of the cooling system and the absence of leaks. If stopping the cooling circuit creates a significant risk, install a «water sensor» security on the circuit. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 43  Rotate the connection in position nickel  Rotate the nut finger-tight plated-steel, etc.)  While holding the connector body steady, tighten the nut of 1/2 turn using a flat open-ended spanner Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 44 The impedance between the pump-body and the earth connection point must be < 0.1 Ohm at 25A. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 45: Operation

    Operation Operating instructions ATH 2300 M/MT Detailed contents C 100 Safety instructions for product use Refer to the Controller Operating instructions to have instructions about pump operation. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 46 Never unplug the pump by disconnecting the main cable. Only the authorized and trained technicians can perform intervention on the product. Located on the controller, this label indicates that the controller must not be disconnected when the pump is running. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 47 Refer to the controller Operating manual to control and monitor the pump chapter C). Refer to the controller Operating manual if a fault appears D 200). Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 48: Maintenance

    Maintenance Operating instructions ATH 2300 M/MT Detailed contents D 100 Safety instructions for product maintenance D 150 Maintenance frequency Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 49 Before removing the pump from the installation:  Continue nitrogen flow from the process tool for 30 min. Nitrogen pressure and flow rate should be identical to the programmed values during process. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 50 Pfeiffer Vacuum SAS original spare parts, delivered byPfeiffer Vacuum, containing e.g. all its components and subassemblies. This obligation will not cover the shipping cost to a Pfeiffer Vacuum reclamation facility. Before returning the product, please consult the Service procedure. Fill in the declaration of contamination form available on our website.

  • Page 51: Maintenance Frequency

    The full overhaul must be performed by manufacturer’s trained personnel. Only controller replacement, inlet screen or pump valve replacement are authorized at the customer’s site. Contact nearest service center or the service support at the following e-mail address: support.service@pfeiffer-vacuum.fr Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 52: Maintenance Instructions

    Detailed contents Replacement of the water valve coil E 050 - Coil dismantling - Coil reassembling E 100 Shipping procedure for contaminated pumps - Connecting ports - Rough decontamination procedure Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 53 Stick the first threads of M5 fitting with Loctite 542* glue. Screw the M5 fitting and tighten it slightly with a 14 mm open end wrench. * Registered trade mark Loctite. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 54: Shipping Procedure For Contaminated Pumps

    1/4 VCR Centering ring 068193 Seal 076705 with DN 16 seal DN 16 clamping Fitting 1/4 VCR 083333 108500 ring female *** Standard connection accessories available in the product catalog. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 55 Flush with nitrogen by injecting a 10’ relative pressure of 110 to 150 hPa for 10 minutes. Stop the nitrogen flow. * Characteristics of dry nitrogen: B 330. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 56: Labelling Of The Pump

    Explosure may result in severe injury dealt with or death. Preventive maintenance must be done by trained personnel only. unsafe products. Fill in the contamination declaration and attach it to the product G 200. Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 57: Maintenance Components

    Operating instructions ATH 2300 M/MT Detailed contents F 000 Spare parts - Instructions of use - Replacement of parts and use of non genuine parts F 100 First level maintenance parts Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...

  • Page 58: Replacement Of Parts

    The manufacturer urges the user not to use «imitation parts», or the misappropriation and pirating of intellectual property performed by some dishonest operators. The manufacturer supplies maintenance components, spare parts or kits to perform the maintenance of its products Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 59 Replace regularly the dust filter when used in dusty air. Dust filter 106229 A complete range of connecting accessories is available in the manufacturer’s catalogue (flanges, fittings...). Water valve coil Coil 24 VDC 108667 Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 60 Appendix Operating instructions ATH 2300 M/MT Detailed contents G 200 Service Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT...
  • Page 61 Fill out the «Service Request/Product return» form and send it to your Service Center local Pfeiffer Vacuum Service contact. Include the confirmation on the service request from Pfeiffer Vacuum with your shipment. Fill out the declaration of contamination and include it in the shipment (mandatory!).
  • Page 62 VACUUM SOLUTIONS FROM A SINGLE SOURCE VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. technological perfection, competent advice and reliable service.

This manual is also suitable for:

Ath 2300 m

Table of Contents