Heating Jacket - Pfeiffer Vacuum HIPACE 800 Operating Instructions Manual

Turbopump
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Installation
5.7.4

Heating jacket

24
The permissible connection pressure is max. 1500 hPa absolute.
● When operating the pump with more than 50 % of the maximum gas throughput, seal-
ing gas must be used to ensure rotor cooling.
● The sealing gas flow rate amounts 12-15 sccm for the HiPace 800.
Sealing gas supply with control valve
Fig. 9:
Connecting the sealing gas valve
18
Seal ring
16
 Unscrew the locking screw with seal ring out of the sealing gas connection.
 Screw the sealing gas valve with seal ring into the sealing gas connection.
 Insert the control cable of the accessory into a free accessory connector on the TC
400 and tighten.
 Make the settings and control via the interfaces of the electronic drive unit.
 Install the sealing gas supply (e.g. inert gas) via a connection adapter or on the inlet
side (G 1/8") of the control valve.
Sealing gas supply without control valve
 Unscrew the locking screw with seal ring out of the sealing gas connection.
 Screw the sealing gas throttle with sealing ring into the sealing gas connection.
The turbopump and vacuum chamber can be heated to reach the ultimate pressure more
quickly. Use of a heating jacket is only permissible for pumps with the high vacuum flange
in stainless steel design. The heating duration depends on the degree of contamination
as well as the ultimate pressure to be reached and should be at least 4 hours.
Dangerous excess temperatures
Process-related high temperatures can result in impermissible excess temperatures
and thus damage to the turbopump.
 Water cooling must be used when employing a casing heating or during operation
with heated vacuum chambers.
 Do not introduce any additional energy into the pump (see p. 27, chap. 6.1).
Risk of burns
High temperatures arise when the turbopump or vacuum chamber are baked out. As a
result, there is a danger of burns from touching hot parts, even after the casing heating
is switched off!
 Thermally insulate heating jacket, pump housing and vacuum chamber, if possible
during installation.
 Do not touch heating jacket, pump casing and vacuum chamber during bake out.
16a
18
16
Locking screw
NOTICE
CAUTION
16a Sealing gas valve

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