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20316046
User Manuals: MKS 20316046 Vacuum Gauge Controller
Manuals and User Guides for MKS 20316046 Vacuum Gauge Controller. We have
1
MKS 20316046 Vacuum Gauge Controller manual available for free PDF download: Instruction Manual
MKS 20316046 Instruction Manual (50 pages)
Vacuum Gauge Controller
Brand:
MKS
| Category:
Controller
| Size: 4 MB
Table of Contents
Table of Contents
5
Section 1 - the 316 Vacuum Gauge Controller
9
Introduction
9
Available Configurations
9
Convectron Gauge (CG) Module
9
Installation
9
Line Voltage Selection
9
Figure 1-1: Line Voltage Select Jumpers, Power Supply PC Board
10
Mounting Configurations
11
Figure 1-2: Mounting Configurations
12
Cable Connections
13
Instrument Grounding
13
Figure 1-3: 316 VGC Cable Connections
13
Summary of Controls and Indicators
14
Figure 1-4: Correct System Grounding
14
Figure 1-5: 316 VGC Control Unit Front Panel
14
Theory of Operation
15
Microcontrollers and Bus Structure
15
Gauge Theory
15
Calibration
15
Basic 316 VGC Troubleshooting
15
Guidelines
15
Figure 1-6: Power Supply Board Top View
17
Table 1-1: 316 VGC Troubleshooting
17
Service Guidelines
18
Specifications
18
Table 1-2: 316 VGC Physical Specifications
18
Table 1-3: 316 VGC Electrical Specifications
19
Section 2 - the Convectron Gauge Module
21
Safety
21
Explosive Gases
21
Limitation on Use of Compression Mounts
21
Tube Mounting Position
21
Overpressure
21
High Indicated Pressure
22
Chemical
22
Sensor Failure
22
Tube Contamination
23
Convectron Module Introduction
23
Convectron Installation
23
Convectron Gauge Tube Installation
23
Gauge Tube Orientation
24
Figure 2-1: Convectron Gauge Mounting
25
Compression Mount (Quick Connect)
26
1/8 NPT Mount
26
NW16KF Flange Mount
26
Other Mounting Options
26
Convectron Operation
27
Reading Pressure
27
Indicated Vs. True Pressure Curves
28
Example 1 - Maximum Safe Indicated Pressure
29
Example 2 - Indicated to True Pressure Conversion
29
Example 3 - True to Indicated Pressure Conversion
30
Figure 2-2: Indicated Pressure of a Convectron Gauge (1 to 100 Mtorr)
31
Figure 2-3: Indicated Pressure of a Convectron Gauge (0.1 to 1000 Torr)
32
Figure 2-4: Indicated Pressure of a Convectron Gauge (0.1 to 1000 Torr)
33
Figure 2-5: Indicated Pressure of a Convectron Gauge (10-3 to 10-1 Mbar)
34
Figure 2-6: Indicated Pressure of a Convectron Gauge (0.1 to 1000Mbar)
35
Figure 2-7: Indicated Pressure of a Convectron Gauge (0.1 to 1000 Mbar)
36
Example 4 - True to Indicated Pressure Conversion
37
Analog Output
37
Convectron Calibration and Maintenance
38
Zero Adjustment
39
Atmosphere Adjustment
39
Analog Output Full Scale Adjustment
40
Analog Output Offset
40
Cleaning the Gauge Tube
41
Theory of Operation
42
Convectron Troubleshooting
43
Transducer Test Procedure
43
Table 2-2: 275 Transducer Pin Resistance
43
Table 2-3: Convectron Troubleshooting Guide
43
Convectron Specifications
48
Table 2-4: Convectron Specifications
48
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