Pirani Gauge Replacement - Pfeiffer Vacuum ASM 340 D Maintenance Instruction

Leak detector
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Service - Maintenance
5.13 Pirani gauge replacement
Prerequisites
1. Put the detector on 'Stand-by' mode.
2. Make an air inlet by pressing on the [VENT] function key or on the corresponding pictograph on
3. Remove the blanking plate from the inlet port.
4. Remove the front cover (see chapter "Front cover disassembly/reassembly").
Pirani gauge disassembly
1
CHc screw (CHc screw in the maintenance kit supplied with the detector)
Pirani gauge reassembly
1. Follow the disassembly steps in reverse.
2. Make adjustments to the gauge (see chapter "Calibration of the internal Pirani gauge" of the oper-
Tightness test after Pirani gauge maintenance
1. Put the detector into cycle.
2. Spray a light flow of Helium 4 around the gauge.
38/50
the main screen.
– When inserting the new gauge, do not bring the gauge filaments into contact with the vacuum
block.
ating Instructions).
– leak rate measured < 3 · 10
1
-10
mbar·l/s (3 · 10
-11
Pa·m
3
/s).

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