Maintenance Of The Turbomolecular Pump; 1Access To The Turbomolecular Pump Operating Fluid Reservoir; 2Turbomolecular Pump Operating Fluid Reservoir Replacement - Pfeiffer Vacuum ASM 340 D Maintenance Instruction

5.10 Maintenance of the turbomolecular pump
5.10.1 Access to the turbomolecular pump operating fluid reservoir
Prerequisites
1. Make an air inlet on the vacuum circuit (see chapter "Air inlet before a maintenance operation").
2. Remove the front cover (see chapter "Front cover disassembly/reassembly").
3. Remove the rear cover (see chapter "Rear cover disassembly/reassembly").
5.10.2 Turbomolecular pump operating fluid reservoir replacement
Risk of poisoning in case of contact with the operating fluid
There is a potential poisoning danger if the operating fluid comes into contact with the skin or the va-
por is inhaled.
► Wear protective gear such as gloves, glasses and a mask when handling the oil.
Risk of intoxication due to components or devices contaminated with toxic substances
Toxic process substances contaminate some equipment parts. During maintenance operations, any
contact with these toxic substances presents a health risk. The illegal disposal of toxic substances
harms the environment.
► Observe the appropriate safety precautions and avoid health or environmental risks from toxic
► Wear personal protective equipment.
► Decontaminate the relevant parts before performing maintenance operations.
DANGER
WARNING
process substances.
Service - Maintenance
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