Pfeiffer Vacuum ASM 340 Maintenance Instructions Manual
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Pfeiffer Vacuum ASM 340 Maintenance Instructions Manual

Leak detector
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ASM 340
Leak detector
Maintenance instructions
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Summary of Contents for Pfeiffer Vacuum ASM 340

  • Page 1 ASM 340 Leak detector Maintenance instructions...

  • Page 2: Table Of Contents

    Table of contents Table of contents About this manual ..........4 1.1 Validity.
  • Page 3 Table of contents 5.6.2 Access to the fluid reservoir ......28 5.6.3 Replacing the operating fluid reservoir .

  • Page 4: About This Manual

    About this manual Validity This maintenance manual is intended for the customers of the Pfeiffer Vacuum Compa- ny. It describes the product maintenance operations which can be performed by the user on the product concerned. This documentation must be used with the operating manual of the product of the same name.

  • Page 5: Conventions

    About this manual Conventions 1.2.1 Safety instructions Operating manual safety instructions Pfeiffer Vacuum are based on the UL, CSA, ANSI Z-535, SEMI S2, ISO 3864 and DIN 4844 certification standards. This document de- scribes the following information and danger levels: DANGER Imminent danger Indicates an imminent hazardous situation that will result in death or serious injury.

  • Page 6: Pictographs

    About this manual 1.2.2 Pictographs Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan- ger, the disregarding of which may result in serious accidents Important information about the product or this document...

  • Page 7: Safety And Maintenance Information

    ● Do not switch on the product if the covers are not in place. ● To return the product to one of our Pfeiffer Vacuum service centers, read the after- sales Service procedure and complete the declaration of contamination available on our website.

  • Page 8: Protective Equipment

    Safety and maintenance information Protective equipment In some situations, personal protective equipment must be worn when handling the de- tector and its components. Customers must provide operators with the necessary equip- ment. This equipment must be checked regularly and used in accordance with the sup- plier's recommendations.

  • Page 9: Tools And Spare Parts

     Use only spare parts available by asking Pfeiffer Vacuum Service.  Ordering information is available in chapter Spare parts.  To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the product rating plate available.

  • Page 10: Maintenance Intervals And Responsibilities

    (2) Routine maintenance: accord- (3) Level : (4) Site: (with significant flow or contami- ing to usage conditions I = Operator OS = On site nation) II = Technical or trained operator WS = In Pfeiffer Vacuum service III = Service center center.

  • Page 11: Maintenance Time Monitoring

    Maintenance intervals and responsibilities Maintenance time monitoring The cycle counters of the primary pump and turbomolecular pump alert the operator that a maintenance operation must be performed (see Maintenance Menu of the Operating Instructions).

  • Page 12: Calibration

    Calibration Calibration Purpose Calibration helps ensure that the leak detector is correctly adjusted to detect the tracer gas selected and display the correct leak rate. A calibrated leak is used to calibrate the leak detector. Depending on the test method, different types of calibration can be performed. Test method Hard Vacuum Sniffing...

  • Page 13: Calibration With An External Calibrated Leak

    Calibration Calibration with an external calibrated leak 4.3.1 External calibrated leak The operator must use a calibrated leak containing the tracer gas selected ( He or ). There are several types of external calibrated leaks, with or without reservoir, with or without valve, covering several leak ranges.

  • Page 14: Calibration On Concentration (Sniffing Test Mode Only)

    Calibration – calibration with a leak of 2·10 mbar·l/s – the displayed leak rate is: 2·10 + 5·10 = 2.5·10 mbar·l/s 4.3.3 Calibration procedure with external leak in Hard Vacuum test  Allocate a function key to [Auto.Cal] (see Configuration Menu in the Operating In- structions).

  • Page 15: Calibration Of A Leak Detector Connected To A Pumping Unit

    Calibration ● type of calibrated leak = concentration (see Spectro Menu) ● calibration = operator (see Advanced Menu) ● tracer gas = He (see Spectro Menu)  Connect the sniffer probe to the detector.  Verify that the detector is in Stand-by mode. ...
  • Page 16 Calibration – Press [Return] to exit the function.  Press [Reset] to reset the correction factor to 1. The ’COR’ indicator light (see Standard screen of the Operating Instructions, ref. 9) is illuminated on the control panel as soon as the value of the correction factor is not 1. The digital display takes into account the correction factor applied.

  • Page 17: Maintenance / Replacement

    Maintenance / replacement Maintenance / replacement Cleaning the covers  Clean the covers using a lint-free cloth and a product which does not damage printed surfaces and self-adhesive labels. Dismantling the covers Tools ● 5 mm Allen key supplied in the maintenance kit 5.2.1 Dismantling the front cover ...

  • Page 18: Maintenance Of The Internal Calibrated Leak

    Maintenance / replacement 5.2.2 Dismantling the rear cover  Dismantle the front cover. Loosen and remove the 5 fixing screws (1), (2) and their washers.  Disconnect the harness (3) and the ground point (4).  Remove the rear cover. When reassembling the cover, make sure that the 5 fixing screws for the rear cover on the frame are in place and properly screwed.

  • Page 19: Analyzer Cell Maintenance

    However, to guarantee the reliability of the test, we recommend that you regularly reca- librate (3 years maximum) every leak with reservoir to check its leak rate: this applies to both internal and external calibrated leaks. Return the leak to your Pfeiffer Vacuum service center for recalibration purposes. 5.3.3 Setting ...

  • Page 20: Dismantling

    Maintenance / replacement 5.4.1 Dismantling ● Torx screwdriver supplied in the maintenance kit Tools Procedure WARNING Risk of burning associated with hot surfaces When in operation, certain mechanical parts can reach high temperatures. If the detec- tor was used recently: ...

  • Page 21: Filament Replacement

    Maintenance / replacement 5.4.3 Filament replacement ● Torx screwdriver supplied in the maintenance kit Tools ● Flat pliers ● Filament (see 9) Filament is consumables. As such, it is not covered by the warranty. Procedure The oxidation of the iridium filament is normal: do not touch the filament with your fingers.

  • Page 22: Primary Pump Maintenance (On Wet Model)

    Maintenance / replacement  Take a fastening clip (5) with the flat pliers: this clip will ensure electrical contact be- tween the filament and the cell (A Fig. 10).  Fit the clip on the connector (6) and on the strip of the filament (8) (B Fig. 10). ...

  • Page 23: Oil Quality Inspection

    Maintenance / replacement Fig. 12: Oil level check 5.5.3 Oil quality inspection For the pump to function in optimal conditions, oil quality must be checked regularly. Thickening and darkening of the oil, combined with a burning smell, are signs of lubricant deterioration.

  • Page 24: Flushing The Pump

    Maintenance / replacement  Connect the drain connector (5). Fig. 13: Fitting of the drain connector  Recover waste oil.  When all the oil has been drained, remove the drain connector.  Fill with fresh oil (see 5.5.6). 5.5.5 Flushing the pump NOTICE Only use approved operating fluids...

  • Page 25: Filling The Pump

    Maintenance / replacement 5.5.6 Filling the pump NOTICE Only use approved operating fluids The pumps are factory tested using adixen oil.  The same oil must be used during operation. The oil safety data sheet is available on the website. DANGER Health risk in case of oil contact The pumps are delivered empty of oil: the oil is delivered in separate containers.

  • Page 26: Replacement Of The Internal Oil Mist Eliminator

    Maintenance / replacement Fig. 16: Dismantling the primary pump  Loosen the screw (+ washer) of the mist eliminator's mounting bracket (3), then re- move the mist eliminator.  Loosen the 4 fixing screws (+ washers) of the pump underneath the detector frame. When dismantling the primary pump to send it to the service center, keep the tightening clamp, power cable and entire mist eliminator unit (mist eliminator + bracket + screws).

  • Page 27: Installation Of An External Mist Eliminator

    Maintenance / replacement 5.5.9 Installation of an external mist eliminator The operator can use an external oil mist eliminator to replace the internal oil mist elim- inator installed on the detector: this modification requires connecting an accessory: an exhaust connector for the pump. ●...

  • Page 28: Maintenance Of The Turbomolecular Pump

    Maintenance / replacement Maintenance of the turbomolecular pump WARNING Risk of burning associated with hot surfaces When in operation, certain mechanical parts can reach high temperatures. If the detec- tor was used recently:  Let it cool down for at least 10 minutes before working on the turbomolecular pump. ...

  • Page 29: Replacing The Operating Fluid Reservoir

    Maintenance / replacement 5.6.3 Replacing the operating fluid reservoir WARNING Risk of intoxication in case of contact with substances hazardous to health. Always take appropriate precautions when handling the operating fluid reservoir:  Dispose of operating fluid reservoirs in accordance with the applicable legislation. Safety data sheet available upon request or at www.pfeiffer-vacuum.com ...

  • Page 30: Pirani Gauge Maintenance

    Maintenance / replacement  Using tweezers, pull out Porex rods (8 pieces).  Remove impurities from the turbopump and the end cover with a clean, lint-free cloth. Do not use any cleaning fluids!  Using tweezers, insert new Porex rods (8 pieces). ...

  • Page 31: Fan Maintenance

    Maintenance / replacement Fan maintenance 5.8.1 Location Fig. 23: Fan location Air inlet fan Turbomolecular pump fan Air Exhaust fan ● Philips screwdriver Tools/ Spare parts ● Fan + grill (see 9) 5.8.2 Replacement of the air inlet fan  Remove the front and rear cover of the detector (see 5.2). ...

  • Page 32: Replacement Of The Turbomolecular Pump Fan

    Maintenance / replacement Fig. 25: Placing of fan and harness 5.8.3 Replacement of the turbomolecular pump fan  Remove the front cover of the detector (see 5.2.1).  Disconnect the fan harness (1) of fan (V2) from the 24V distribution board (2). ...

  • Page 33: Air Filters Maintenance

    Maintenance / replacement Fig. 27: Maintenance of the exhaust fan Air filters maintenance 5.9.1 Air filters location Fig. 28: Air filters location Air filter no. 1 Air filter no. 2 Air filter of the vacuum block ● 13 mm and 17 mm spanners (for the air filter of the vacuum block) Tools/Spare parts ●...

  • Page 34: Replacement Of The Vacuum Block Air Filter

    Maintenance / replacement 5.9.3 Replacement of the vacuum block air filter 2 + 3 = 4 Fig. 30: Maintenance of the vacuum block air filter  Remove the front cover (see 5.2.1).  Loosen the filter connector (2) with the 13 mm spanner to free the tube (1). ...

  • Page 35: Shutdown

    The manufacturer's obligation to recover this equipment applies only to complete items of equipment which have not been modified or retrofitted, using only spare parts from adixen Vacuum Products, sold by Pfeiffer Vacuum and including all their assemblies and sub-assemblies.

  • Page 36: Malfunction

    Malfunction Malfunction What happens in case of a fault The leak detector can display warnings or faults on screen at any time. Fig. 31: Standard screen with warning [i Next] 7.1.1 Warning / fault display Press the key to display the fault. Level 1: Warning Press the [i Next] key to display the maintenance information Level 2: Major fault: erroneous measurement...

  • Page 37: Troubleshooting Guide

    Malfunction 7.1.3 List of warnings / faults Level RS Order RS 232 Code Information calib. test mode lost Dynamic Calib. Fail w145 maintenance required w150 primary pump maint w160 high. vac pump maint w180 new fil#2 required w181 new fil#1 required w211 manual calibration w220...

  • Page 38: Installation Of The Application

    Malfunction 7.2.1 Installation of the application  Insert the Operating Manual CDRom into the CD/DVD player of the computer.  Launch the "ASM340" application.  Select the language.  Select the interactive application ’Troubleshooting’.  Install the application on your computer. Fig.
  • Page 39 Malfunction...

  • Page 40: Service

     Fill out the "Service Request/Product Return" form and send it to your local Pfeiffer Vacuum Service contact.  Include the confirmation on the service request from Pfeiffer Vacuum with your ship- ment.  Fill out the declaration of contamination and include it in the shipment (mandatory!).

  • Page 41: Spare Parts

    See following pages Tool F100 Monitoring and Display F200 Power and electrical supply F300 Automatic control system and electronic circuits F400 Measurement F500 Pumping F600 Vacuum block F700 Pipes - Connections - Seals F800 Cover F900 ASM 340 specific accessories F1000...
  • Page 42 F 100 Tools ASM 340 Description Qty Remarks A006 DN16KF Calibrated Leak Adaptator Kit 110715 A007 DN25KF Calibrated Leak Adaptator Kit 110716 A013 Tee, Reducing - DN25/25/16KF 068269 A016 Calib. Leak With Valve 1-3.10-6 DN25KF FV4610 A020 Clamp DN20/25KF 083264...
  • Page 43 F 200 Monitoring and display ASM 340 Description Qty Remarks B036 Control Panel (Black) - 340 121557S Spare parts DB 2013/06...
  • Page 44 F 300 Power and electrical supply ASM 340 Description Qty Remarks C002 Cable, Main Power; 2 m - Italy 104758 C003 Cable, Main Power; 2 m - Switzerland 103718 C004 Cable, Main Power; 2 m - UK 104411 C005 Cable, Main Power; 2 m - USA...
  • Page 45 F 400 Automatic control system and electronic circuits ASM 340 Description Qty Remarks D026 Loudspeaker; 90 DB/D 10 cm 060097 D073 P0482E1 Bluetooth Board P0482E1 Spare parts DB 2013/06...
  • Page 46 F 500 Measurement ASM 340 Description Qty Remarks E025 Gauge, PI1 (Aluminium) 795706 E026 Filament for PI1 Gauge 057972 E047 Filament for 3G Analyzer Cell 114864S E068 3G.2 Cell ExtrACTion Electrode - Service 119641 E084 Calibrated Leak, Internal - 340...
  • Page 47 F 600 Pumping ASM 340 Description Qty Remarks F014 Oil, A200 (1L) 068694 F015 Funnel 067592 F126 Oil mist Eliminator 21 m3/h D30 mm - 340 121494 F132 Oil reservoir for Splitflow 50 - 340 PM 143 740 –T F133...
  • Page 48 F 700 Vacuum block ASM 340 Description Qty Remarks G071 Inlet port filter - 340 103395 G074 Vacuum block filter - 340 122237 Spare parts DB 2013/06...
  • Page 49 F 800 Pipes - Connections - Seals ASM 340 Description Qty Remarks H165 O'Ring 3.6 x 29.3 FPM 082025 H166 Vacuum block filter - 340 122237 H170 Draining connector - 340 Wet 107646 Spare parts DB 2013/06...
  • Page 50 F 900 Cover ASM 340 Description Qty Remarks I114 Protection cover - 340 A006733 I115 Lifting handle - 340 A333918 I116 DN25KF Inlet Pipe Frame - 340 A334286 Spare parts DB 2013/06...
  • Page 51 F 1000 Options and accessories ASM 340 Description Qty Remarks J077 20 µm Poral Filter D 114 mm 105847 J078 5 µm Poral Filter D 114 mm 105848 J174 O'ring Ø 5 mm - D 114 mm 082152 J175 20 µm Poral Filter DN25/25 KF...
  • Page 52 F 1000 Options and accessories ASM 340 Description Qty Remarks J185 RC 500 WL remote control -340 PT 445 432 -T J186 Cable transmitter/ASM340 - RC500WL A466613 J187 Cable remote/ASM340 - RC500WL A465975 J188 Bypass Kit Europe - 340 PT 445 411 -T...
  • Page 53 Vacuum solutions Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, from a single source competent advice and reliable service. Complete range From a single component to complex systems: of products We are the only supplier of vacuum technology that provides a complete product portfolio.

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