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4 Maintenance frequency and responsibilities
Maintenance level 1 and 2 operations are described in this manual.
Level 3 maintenance operations require a technician from the Pfeiffer Vacuum Service network.
Operation
Backing pump RVP 1015 (Wet Model)
Oil level and appearance checking
Oil change replacement
Oil mist separator replacement
Pump replacement
Backing pump MVP 020-3DC (Dry Model)
Diaphragms and valves replacement
Pump replacement
Backing pump (Integrable model)
Adhere to the maintenance intervals for the back-
ing pump connected to the detector.
turbomolecular pump SplitFlow 50
Operating fluid reservoir replacement
Bearings replacement
TC 110 electronic unit replacement
Pump replacement
Analyzer cell
Seal replacement
Filament replacement
Overhaul of analyzer cell
Valves
All valves replacement
Filters
Cleaning or replacement of the air filter
Cleaning or replacement of the inlet vent filter
Pirani gauge
Setting
Gauge replacement
Fans
Fan replacement
Fan air filter cleaning or replacement
Calibrated leak
Recalibration
Leak detector
Overhaul of the detector
1) Maintenance level
● 1: Operator
● 2: Technician with Pfeiffer Vacuum training
● 3: Pfeiffer Vacuum maintenance technician
Maintenance frequency and responsibilities
Number of hours in use
According to conditions of use
8,600 hours
4,300 hours in case of harsh usage (with signifi-
cant flow or contamination)
8,600 hours
4,300 hours in case of harsh usage (with signifi-
cant flow or contamination)
As needed
17,200 hours
As needed
-
4 years or 17,200 hours
4 years or 17,200 hours
As needed
As needed
As needed
As needed
As needed
500,000 tests or 4 years
According to conditions of use
According to conditions of use
According to conditions of use
Every 4,300 hours (recommended)
As needed
As needed
According to conditions of use
Every 2 years (recommended)
According to conditions of use
Every 4 years (recommended)
2) Maintenance site
● OS: on customer site
● WS: Pfeiffer Vacuum service center
Level
1)
Site
2)
2
OS
2
OS
2
OS
3
OS
3
OS
3
OS
-
-
2
OS
3
OS
3
OS
3
OS
2
OS
2
OS
3
OS
3
OS
1
OS
2
OS
1
OS
2
OS
2
OS
1
OS
2
WS
3
OS/WS
13/50
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