Table of Contents
Advertisement
Service - Maintenance
The product may be damaged if an unauthorized operating fluid is used
The pumps are tested at the factory using Pfeiffer Vacuum oil. Using any other oil may adversely af-
fect the pump and its performance.
► It is essential that the oil recommended by the manufacturer is used.
Prerequisites
1. Remove the front cover (see chapter "Front cover disassembly/reassembly").
2. Remove the rear cover (see chapter "Rear cover disassembly/reassembly").
3. Access the operating fluid reservoir (see chapter "Access to the turbomolecular pump operating
Operating fluid reservoir disassembly
1
1
2
5
30/50
Safety data sheets
You can obtain the safety data sheets for operating fluids from Pfeiffer Vacuum on request,
or from the
Pfeiffer Vacuum Download
fluid reservoir").
1
2
The pins of the spanner fit into the notches in the housing cover.
Spanner for housing cover
Housing cover
NOTICE
Center.
1
3
O-ring
1
5
2
3
4
6
1+2
3
1
Advertisement
Table of Contents
