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Service - Maintenance
Reassembly
1. Follow the disassembly steps in reverse.
2. Update the parameters of the calibrated leak (see chapter "Calibrated leak setting" of the operat-
3. Perform a calibration on the detector.
Tightness test after calibrated leak maintenance
► Open the calibration valve to carry out the test.
► Spray a light flow of Helium 4 around the calibrated leak.
5.8 Analyzer cell maintenance
5.8.1 Analyzer cell disassembly/reassembly
Risk of burns in case of contact with hot surfaces
For the operator's safety, the products are designed to avoid thermal risk. However, specific operat-
ing conditions may exist that require extra caution on the part of the operator due to the high temper-
atures (surfaces > 70 °C for parts inside the cover(s)).
► Wait for the product to fully cool down before working on it.
► Protective gloves must be worn in accordance with standard EN ISO 21420.
20/50
ing instructions).
– This operation can be carried out with the information featured on the calibrated leak rating
plate or the calibrated leak certificate supplied with the leak.
F-74000 ANNECY
S/N:FC15000123
P/N:119678
1,3E-7
Value..:
1,3E-8 Pa.m
Calibration date...: 15-Jan-2015
Lost per year........: 2 %
Temperature........: 23°C
Temperature coeff: 3 %
Example of calibrated leak rating plate
– leak rate measured < 1 · 10
Pollution of vacuum circuit components
During maintenance operations for vacuum circuit components, avoid any contamination
which could subsequently result in the degassing of the parts. Special caution must be ex-
ercised to ensure cleanliness. To avoid this:
● Perform the maintenance in an appropriate area (clean, dust-free and ventilated).
● Use non-woven materials.
● Dust the parts with filtered dry air (unless otherwise stated).
● Wear unpowdered vinyl gloves (clean room gloves).
WARNING
mbar.l/s ± 10 %
3
/s ± 10 %
HELIUM CALIBRATED LEAK
-8
mbar·l/s (1 · 10
-9
Pa·m
3
/s).
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