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Prerequisites
1. Make an air inlet on the vacuum circuit (see chapter "Air inlet before a maintenance operation").
2. Remove the front cover (see chapter "Front cover disassembly/reassembly").
3. Remove the fan (see chapter "Turbomolecular pump fan replacement ").
Analyzer cell disassembly
1
Analyzer cell reassembly
2
4 N·m
2
1
5
3
4
6
2
Distortion of the measurement results with non-compliant analyzer cell
When it leaves the factory, the analyzer cell is set for the product in which it is installed.
The use of an analyzer cell different from the original component requires settings. Without
these settings, the measurements made by the product are not correct. Only a Pfeiffer Vac-
uum service center can make these settings.
Tightness test after analyzer cell reassembly
► Spray a light flow of Helium 4 around the analyzer cell.
– Leak rate measured < 3 · 10
1
-10
mbar·l/s (3 · 10
-11
Pa·m
Service - Maintenance
2
3
3
3
/s).
21/50
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