INFICON
8.2.2 Replacing the air filter of the main unit
Ecotec E3000-Operating-instructions-kina22en1-28-(2211)
The air filter is inside a duct that is accessible from the bottom of the device. The slot
is closed with a cover plate. The cover plate is held in place with a 3mm Allen screw.
DANGER
Risk of death from electric shock
There are high voltages inside the device. Touching parts where electrical voltage is
present can result in death.
► Disconnect the device from the power supply prior to any installation and
maintenance work.
► Ensure that the electrical supply cannot be switched back on unintentionally.
NOTICE
Property damage from rotating parts
The turbo molecular pump requires 5 minutes to power down.
► Allow the turbo molecular pump to power down before any maintenance work is
performed or before moving the device.
Fig. 46: Loosening the air filter cover
1. Remove the sniffer line and the ECO-Check from the basic unit.
2. Place the basic unit with the front panel on a soft surface.
3. Loosen the screw of the cover plate until you can rotate the cover plate to the side.
4. Pull out the air filter and replace it with a new one.
5. Retighten the cover plate in front of the duct.
6. Put the device back on its feet and connect sniffer line and ECO-Check, if needed.
7. Confirm the work, see "Calling up and managing maintenance information [} 71]."
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