Figure 15 Config>Turret Screen After Turret Configuration Procedure Is Completed; Figure 16 Config>Sweep Screen, Beam Position Limits Unconfigured, Initial State - ferrotec Genius II Quick Start Manual

1.5 Configuring the Control Modules
Figure 15 Config>Turret Screen After Turret Configuration Procedure is Completed
The basic turret configuration procedure is now completed. If you have made all the configuration
changes you wish to make at this time, exit Configuration Mode to save the configuration (see section
1.5.5 for detailed instructions). If not, proceed to section 1.5.4.
1.5.4 Configuring the Sweep Control Module
Overview of the Config>Sweep Screen
The Config>Sweep screen enables the user to set the limits for the beam position interlocks. Figure 16
shows this screen as it appears when the Genius II is first booted up.
Figure 16 Config>Sweep Screen, Beam Position Limits Unconfigured, Initial State
Beam Position/Sweep
Pattern Display Grid
Coil Current Output Readouts
Beam Position/Sweep Pattern
Location Control Buttons
Genius II Quick Start Guide
6 If you have lowered and swung out the source tray in order to
perform this procedure:
a) Swing the source tray back into place and raise it back up to its
operational position.
b) Pump vacuum chamber down to the desired pressure.
14
1.5.4 Configuring the Sweep Control Module
0101-9031-0, Rev. B