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1.3.3 Making Connections to a PLC-Based System Controller
Table 1
Pin No.
Functional Description
A1
Input 1: Status of water interlock (1 = OK); connect to water interlock switch.
A2
Input 2: Status of vacuum interlock (1 = OK); connect to vacuum interlock switch.
A3
Input 3: Status of vacuum chamber door interlock (1 = OK); connect to vacuum chamber door interlock switch.
A4
Input 4: Status of auxiliary interlock (1 = OK); connect to optional user-defined interlock switch.
A5
Input 5: BEAM ON input (Positive slope). Within the Genius II, this input, when true, switches on the HV and the
gun. Connect Pin A5 to a user-determined output from the higher-level controller. For example, if you are using
the Genius II in a system equipped with an XTC/3M deposition controller, you can create a circuit similar to that
shown in Figure 5, which illustrates the use of the XTC/3M's IN LAYER output to provide both the BEAM ON
and BEAM OFF inputs.
A6
Input 6: BEAM OFF input (HV OFF = 1). When, this input switches off the HV and the gun. Connect Pin A6 to a
user-determined output from the higher-level controller. Figure 5 shows how this input could be supplied by an
XTC/3M deposition controller, using its IN LAYER output.
A7
Output K1: Relay contact with Pin B7; default function = HV ON status (HV ON = 1).
A8
Output K2: Relay contact with Pin B7; default function = Genius II ERROR indicator (ERROR = 1).
B1
Ground reference for Pin A1; jumper to Pin B5.
B2
Ground reference for Pin A2; jumper to Pin B5.
B3
Ground reference for Pin A3; jumper to Pin B5.
B4
Ground reference for Pin A4; jumper to Pin B5.
B5
0 V reference for Pins A1-A5
B6
24 V, 80 mA output; can be used as control voltage for Inputs 1-4.
B7
Relay contact with Pin A7; jumper to Pin B6.
B8
Relay contact with Pin A8; jumper to Pin B6.
Figure 5 Sample Circuit Supplying BEAM ON and BEAM OFF Inputs via X110 Pins 5 and 6
Making Connections to Rear Panel Connector X119
When making connections from rear panel connector X119 and a higher-level controller (i.e., either a
deposition controller or a PLC-based system controller), perform the procedure described below.
Before performing this procedure, complete the basic cabling procedure described in section 1.3.2.
0101-9031-0, Rev. B
Functional Descriptions of Pins on Rear Panel Connector X110
In Layer signal from
deposition controller
Step
Action
1
If you have not already done so, make the connections between the
higher-level controller and connector X110 shown in Figure 4.
Relay
.
.
.
.
.
.
NOTE
7
1.3 Making Cable Connections
Genius II Quick Start Guide
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