Figure 4 Connections To Be Made Via Rear Panel Connector X110 - ferrotec Genius II Quick Start Manual

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1.3 Making Cable Connections
1.3.3 Making Connections to a PLC-Based System Controller
Making Connections to Rear Panel Connector X110
When making connections between rear panel connector and a deposition controller, perform the
procedure described below.

Figure 4 Connections To Be Made via Rear Panel Connector X110

Genius II Quick Start Guide
Before performing this procedure, complete the basic cabling procedure
described in section 1.3.2.
Step
Action
1
Using the BNC cable provided with the deposition controller, connect
Genius II rear-panel connector X111 to the BNC connector on the
deposition controller rear panel which outputs the emission current
request. If you are connecting the Genius II to either an Inficon
XTC/3S or an XTC/3M, connect the BNC connector to the XTC's
SOURCE 1 connector. If a BNC cable was not supplied with your
deposition controller, use a standard 50-ohm coaxial cable.
2
Make connections between the PLC-based higher-level controller and
Genius II rear panel connector X110 rear-panel, as shown in 4. Table
1 provides functional definitions of the I/Os shown in that illustration.
1.3.3 Making Connections to a PLC-Based System Controller
NOTE
6
0101-9031-0, Rev. B

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