ferrotec Genius II Quick Start Manual page 11

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1.3.2 Basic Cabling Procedure
0101-9031-0, Rev. B
3
Plug the female 15-pin connector on the other end of this cable to the
Genius II rear panel connector X115 (see Figure 3).
4
Plug the female 25-pin sub-D connector on one end of cable 1-950013
into Genius II rear-panel connector X116 (see Figure 3).
5
Plug the male connector on the other end of this cable into connector
X202 on the rear panel of the filament power supply (see Figure 3).
6
Plug the circular connector on one end of the cable 1-950003 into
connector X117 on the Genius II rear panel (see Figure 3).
7
Plug the connector on the other end of this cable to the in-atmosphere
end of octal feedthrough mounted on the vacuum system's source
tray (see Figure 3).
8
Plug the male 15-pin connector on one end of cable 1-950054 into
Genius II rear panel connector X118 (see Figure 3).
9
Connect the female 15-pin sub-D connector on the other end of this
cable to the male 15-pin connector on the turret-drive unit mounted
beneath the source tray (see Figure 3).
10
Connect one end of the grounding cable (PN 1-9500001) to the
grounding stud on the Genius II rear panel (see Figure 3).
11
Connect the other end of the grounding cable to the system's central
grounding point.
12
Connect the required water, vacuum, and vacuum chamber door
interlock switches to Genius II rear-panel connector X110, as shown in
Figure 4.
To ensure equipment and personnel safety, these interlock switch connections
are required in all Genius II installations. Optionally, Pin A4 may be connected to
an additional user-defined interlock, as shown in Error! Reference source not
found..
13
Connect Pins A2 and B2 on rear panel connector X105 to the poles of
a normally-closed safety switch mounted on the product chamber
door. That switch then prevents turret rotation whenever the door is
open.
If X105 Pins A2 and B2 are not connected to a safety switch, as described
above, X105 Pin B1 must be connected to Pin B2. If X102 is not either
connected to a safety switch or jumpered as indicated, the turret cannot rotate.
3
1.3 Making Cable Connections
NOTE
NOTE
Genius II Quick Start Guide

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