Renishaw ATOM Installation Manual page 61

Speed
20 µm system
0020 0040 0080
(1 µm) (0.5 µm) (0.25 µm)
6.5 6.5 6.5
6.5 6.5 4
- - -
6.5 4 2
- - -
4 2 1
- - -
40 µm system
0020 0040 0080
(2 µm) (1 µm) (0.5 µm)
13 13 13
13 13 8
- - -
13 8 4
- - -
8 4 2
- - -
Maximum speed (m/s)
0100 0200 0400
(0.2 µm) (0.1 µm) (50 nm)
5.8 3 -
3.2 1.6 -
- - 0.35
1.6 0.8 -
- - 0.18
0.8 0.4 -
- - 0.12
Maximum speed (m/s)
0100 0200 0400
(0.4 µm) (0.2 µm) (0.1 µm)
11.6 6 -
6.4 3.2 -
- - 0.7
3.2 1.6 -
- - 0.36
1.6 0.8 -
- - 0.24
Lowest recommended
counter input frequency
1000 2000
(MHz)
(20 nm) (10 nm)
- - 40
- - 20
0.13 0.065 12
- - 10
0.06 0.03 6
- - 5
4
0.04 0.02
Lowest recommended
counter input frequency
1000 2000
(MHz)
(40 nm) (20 nm)
- - 40
- - 20
0.26 0.13 12
- - 10
0.12 0.06 6
5
- -
4
0.08 0.04
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