Ulvac CRYO-U Series Instruction Manual page 102

Revision
2013-06-14 2013JE12
2013-10-8 2013OR13
2013-11-8 2013NR14
2014-02-13 2014FY15
2015-06-17 2015JE16
2017-10-03 2017OR17
R-2
to "10kPaG or less".
P.6-3 The content of "◇Assisted war-up using a heater" and
a CAUTION section have been revised.
P.6-4/6-5 Section 6.4 Regeneration Flow Chart
The contents of " Ⅲ . Pressure buildup check" has been
revised.
P.8-2 Table 8-1 Maintenance parts and intervals
R10, R10R, and RM10 refrigerator unit have been removed.
P.8-3 Table 8-3 Consumables has been revised.
Table A-1 CRYOPUMP Fault Diagnosis has been revised.
Yokkaichi CS contact information has been changed.
Cover: Export control policy has been revised.
"SERVICE NETWORK" has been revised.
Cover: Export control policy has been revised.
"Introduction" and "SERVICE NETWORK" have been
revised.
"SERVICE NETWORK" has been revised.
P.S-7 Figure 2 The description on "Exhaust line" has been
modified.
"8. Maintenance" has been revised.
"SERVICE NETWORK" has been revised.
"1. Cryopump Description"
"1.3 Environmental Requirements" has been added.
"8. Maintenance" has been revised.
"Appendix F Dew Condensation" has been added.
"SERVICE NETWORK" has been revised.
ULVAC CRYOGENICS INCORPORATED