Ulvac CRYO-U Series Instruction Manual page 98
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- Instruction manual (106 pages) ,
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- Instruction manual (102 pages)
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Dew Condensation
2.
Dew-Point Temperature
The intersection of temperature and relative humidity indicates the dew point.
condensation occurs when the surface of the cryopump case is below the dew point.
20%
10
-12.0
11
-11.1
12
-10.3
13
-9.5
14
-8.6
15
-7.8
16
-7.0
17
-6.1
18
-5.3
19
-4.5
20
-3.6
21
-2.8
22
-2.0
23
-1.0
24
-0.3
25
0.5
26
1.3
27
2.1
28
3.0
29
3.8
30
4.6
* The calculation is based on Sonntag's equation.
* When the ambient relative humidity is above 85%, dew condensation will form on the
cryopump case.
F-2
30%
40%
50%
-6.0
-2.6
0.1
-5.9
-2.1
1.0
-5.0
-1.2
1.9
-4.2
-0.3
2.8
-3.3
0.6
3.7
-2.4
1.5
4.7
-1.6
2.4
5.6
-0.7
3.3
6.5
0.2
4.2
7.4
1.0
5.1
8.4
1.9
6.0
9.3
2.8
6.9
10.2
3.6
7.8
11.1
4.5
8.7
12.0
5.4
9.6
12.9
6.2
10.5
13.9
7.1
11.4
14.8
8.0
12.3
15.7
8.8
13.2
16.6
9.7
14.0
17.5
10.5
14.9
18.4
ULVAC CRYOGENICS INCORPORATED
Relative Humidity (%)
60%
70%
80%
2.6
4.8
6.7
3.5
5.7
7.7
4.5
6.7
8.7
5.4
7.7
9.6
6.4
8.6
10.6
7.3
9.6
11.6
8.2
10.5
12.6
9.2
11.5
13.5
10.1
12.4
14.5
11.1
13.4
15.5
12.0
14.4
16.4
12.9
15.3
17.4
13.9
16.3
18.4
14.8
17.2
19.4
15.8
18.2
20.3
16.7
19.1
21.3
17.6
20.1
22.3
18.6
21.1
23.2
19.5
22.0
24.2
20.4
23.0
25.2
21.4
23.9
26.2
Dew
85%
90%
7.4
8.4
8.4
9.4
9.4
10.4
10.4
11.4
11.3
12.4
12.4
13.4
13.3
14.4
14.3
15.3
15.2
16.3
16.3
17.3
17.2
18.3
18.2
19.3
19.2
20.3
20.1
21.3
21.4
22.3
22.1
23.2
23.1
24.2
24.1
25.2
24.9
26.2
26.0
27.2
27.0
28.2
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