Connecting Flexible Hoses - Ulvac CRYO-U Series Instruction Manual

CRYO-U Cryopump Instruction Manual
®
１２．Confirm that the pressure gauge on the front panel of compressor unit indicates the
specified pressure (indicated on the front panel). If not, charge helium gas through the
charging valve of the compressor unit again, or adjust the pressure by discharging the
helium gas.
１３．Restart the cryopump (refrigerator unit).
Cryopump Coldhead Cable
Connect Here
Flexible Hose
ＳＵＰＰＬＹ
ＲＥＴＵＲＮ
Figure 8-6 Connecting Flexible Hoses
ULVAC CRYOGENICS INCORPORATED
ＩＮＰＵＴ ＰＯＷＥＲ
ＣＯＬＤ ＨＥＡＤ ＰＯＷＥＲ
ＲＥＭＯＴＥ
ＮＯ．１ ＮＯ．２ ＮＯ．３ ＲＥＳＰＯＮＳＥ
Power Cable
ＲＥＴＵＲＮ ＧＡＳ ＲＥＴＵＲＮ ＧＡＳ ＳＵＰＰＬＹ ＧＡＳ
ＷＡＴＥＲ ＩＮ
ＷＡＴＥＲ ＯＵＴ
ＯＵＴ
ＩＮ
Cooling Water Line
8-13