Ulvac G-Tran ISG1 Manuals

Manuals and User Guides for Ulvac G-Tran ISG1. We have 3 Ulvac G-Tran ISG1 manuals available for free PDF download: Instruction Manual

Ulvac G-Tran ISG1 Instruction Manual

Ulvac G-Tran ISG1 Instruction Manual (107 pages)

1CH Display Unit

Brand: Ulvac | Category: Control Unit | Size: 2 MB

Table of Contents

Prior to Operation
3
Safety Notations
3
Safety Precautions
4
Revision History
6
Table of Contents
7
1 Getting Started

13
- Overview of G-Tran Series
  13
- Terminology
  13
- Features of this Unit
  14
2 Specifications and Components

15
- Specifications
  15
- Standard Accessories
  17
- Options
  17
- Dimensional Drawings DIN Panel Size
  18
- Installation DIN Panel
  19
- Dimensional Drawings JIS Panel Size
  20
3 Names of Components and Description of Functions

21
4 Installation

28
- Preparations
  28
  - Installing the Display Unit
    28
  - Circuit in the Power Supply
    28
  - Installation
    29
5 Front Panel Operation

30
- Description of Front Panel Keys
  30
  - Program Mode
    30
  - Key Operation in Measurement
    30
6 Selection of Sensor Unit

31
- Reset the Unit to the Factory Default Settings
  32
- Factory Set Values
  32
7 Setpoint

33
- What Is Setpoint
  33
- Setpoint Setting Range
  33
- How to Set Setpoint
  33
  - How to Set Setpoint from Front Panel
    34
  - How to Set Setpoint from RS485
    35
8 Connection with External Devices

36
- Output Signal
  36
- Input Signal
  37
  - RS485 Communication
    37
9 Pirani Gauge SW1

38
- Sensor Unit Setting: "SP2
  38
- Front Panel
  38
  - Pressure Display State
    38
  - Description of Front Panel Keys
    38
- Setting Operation
  38
- Connection with Sensor Unit
  40
- Connection to External Device
  40
- Various Signals
  40
  - Output Voltage
    40
  - Filament Burnout Signal
    41
  - ADJ Adjustment
    41
  - Setpoint
    41
  - RS485 Communication
    41
- Zero Point Adjustment and Atmospheric Pressure Adjustment
  41
  - Adjusting Method
    41
10 Cold Cathode Gauge Sc1

42
- Setting the Sensor Unit
  42
- Front Panel
  42
  - Pressure Display
    42
  - Front Panel Key Description
    42
- Settings Operation
  42
- Connection to the Sensor Unit: "SENSOR" Connector
  44
- Connection with External Devices: "I/O" Connector
  44
- Signals
  44
  - Output Voltage
    44
  - HV on Signal: Pin 5
    45
  - Discharge Check Signal: Pin 4
    45
  - Setpoint: Pins 3, 7, 11
    45
  - RS485 Communication: Pins 10, 12
    45
11 Pirani Gauge BPR2, SP1

46
- Sensor Unit Setting: "SP1
  46
- Front Panel
  46
  - Pressure Display
    46
  - Description of Front Panel Keys
    46
- Setting Operation
  46
  - RS485 Communication Operation Setting "L1", "L2
    46
  - Operation Setting Method
    47
- Connecting to the Sensor Unit
  48
- Connection with External Devices
  48
- External Input/Output Signal
  48
  - Output Voltage
    48
  - Burnout Signal
    49
  - Setpoint
    49
  - RS485 Communication
    49
12 Hot Cathode Gauge BMR2

50
- Sensor Unit Setting: "Sn1
  50
- Front Panel
  50
  - Pressure Display
    50
  - Description of Front Panel Keys
    50
- Setting Operation
  50
- Connection with the Sensor Unit
  53
- Connection with External Devices
  53
- Various Signals
  53
  - Output Voltage
    53
  - Filament on Signal
    54
  - Degas on Signal
    54
  - Filament 1/2 Changeover Signal
    54
  - Pressure Protection Signal
    54
  - Emission Valid Signal
    54
  - Setpoint
    55
  - RS485 Communication
    55
13 Multi-Ionization Gauge SH2/ST2

56
- Sensor Unit Setting: "Sh2
  56
- Front Panel
  56
- Operation Setting Method
  57
- Connection with the Sensor Unit
  59
- Connection with External Devices
  59
- Various Signals
  59
  - Output Voltage
    59
  - Filament on Signal
    60
  - Degas on Signal
    60
  - Filament 1/2 Changeover Signal
    60
  - Pressure Protection Signal
    61
  - Emission Valid Signal
    61
  - Setpoint
    61
  - RS485 Communication
    61
14 Multi-Ionization Gauge SH2/ST2(SPU Combination Mode)

62
- Sensor Unit Setting: "SPU
  62
- Front Panel
  62
  - Pressure Display
    62
  - Description of Front Panel Keys
    62
- Setting Operation
  63
- Connection with the Sensor Unit
  65
- Connection with External Devices
  65
- Various Signals
  65
  - Output Voltage
    65
  - Filament off Signal
    66
  - Degas on Signal
    66
  - Filament 1/2 Changeover Signal
    67
  - Sensor Error Signal
    67
  - Emission Valid Signal
    67
  - Setpoint
    67
  - RS485 Communication
    67
15 Multi-Ionization Gauge SH2/ST2(SAU Triple Combination Mode)

68
- Sensor Unit Setting: "SAU
  68
- Front Panel
  68
  - Pressure Display
    68
  - Description of Front Panel Keys
    68
- Setting Operation
  69
- Connection with the Sensor Unit
  71
- Connection with External Devices
  71
- Various Signals
  71
  - Output Voltage
    71
  - Filament off Signal
    72
  - Degas on Signal
    72
  - Filament 1/2 Changeover Signal
    73
  - Sensor Error Signal
    73
  - Emission Valid Signal
    73
  - Setpoint
    73
  - RS485 Communication
    73
16 Multi-Ionization Gauge SH2/ST2(SWU Combination Mode)

74
- Sensor Unit Setting: "SAU
  74
- Front Panel
  74
  - Pressure Display
    74
  - Description of Front Panel Keys
    74
- Setting Operation
  75
- Connection with the Sensor Unit
  77
- Connection with External Devices
  77
- Various Signals
  77
  - Output Voltage
    77
  - Filament off Signal
    78
  - Degas on Signal
    78
  - Filament 1/2 Changeover Signal
    79
  - Sensor Error Signal
    79
  - Emission Valid Signal
    79
  - Setpoint
    79
  - RS485 Communication
    79
17 CCM Series Ceramic Capacitance Manometer

80
- Sensor Unit Setting
  80
- Front Panel Display
  80
  - Pressure Display
    80
  - Front Panel Operation
    80
- Operation Setting
  80
- Connection to Sensor Unit
  82
- Connection to External Device
  82
- Signals
  82
  - Output Voltage
    82
  - Setpoint
    83
  - RS485 Communication
    83
- ZERO Point Adjustment
  83
  - Operation Front Panel
    83
  - Operation External I/O
    83
18 Calculating Function

84
19 Interlock Function

86
- Interlock Setting
  86
20 Measurement Units Function

87
- Measurement Units Setting
  87
21 Measurement Display Range Setting

88
- Measurement Display Range Ra Setting
  88
22 Rs485

90
- Communication Specifications
  90
  - Standard Specifications
    90
  - Communication Setting
    90
- Setting
  90
  - RS485 Communication Setting "L2
    90
  - Baud Rate Setting
    90
  - Address Setting
    90
  - Setting the Checksum Collating Function
    90
  - Setting the Terminator
    91
  - Setting Method
    91
- Standard Data Format
  94
  - Command List
    94
  - When Received Normally
    94
  - When Receiving Is Faulty
    94
- Command
  95
- Checksum
  97
  - Example: When Reading the Measurement Value of Address 11 and Status
    97
- Status Setting List
  98
  - When Writing
    98
  - When Reading
    99
  - In Reading
    100
- ASCII Code Table
  101
23 Troubleshooting

102
24 Warranty

104
25 China Rohs Declaration

105
26 Ec Declaration of Conformity

106
27 Certificate of Decontamination

107

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Ulvac G-Tran ISG1 Instruction Manual

Ulvac G-Tran ISG1 Instruction Manual (107 pages)

Brand: Ulvac | Category: Measuring Instruments | Size: 1 MB

Table of Contents

Prior to Operation
2
Safety Notations
2
Safety Precautions
3
Revision History
5
Table of Contents
6
1 Getting Started

14
- Overview of G-TRAN Series
  14
- Terminology
  14
- Features of this Unit
  15
2 Specifications and Components

16
- Specifications
  16
- Standard Accessories
  18
- Options
  18
- Dimensional Drawings DIN Panel Size
  19
- Installation DIN Panel
  20
- Dimensional Drawings JIS Panel Size
  21
3 Names of Components and Description of Functions

22
4 Installation

29
- Preparations
  29
  - Installing the Display Unit
    29
  - Circuit in the Power Supply
    29
  - Installation
    30
5 Front Panel Operation

31
- Description of Front Panel Keys
  31
  - Program Mode
    31
  - Key Operation in Measurement
    31
6 Selection of Sensor Unit

32
- Reset the Unit to the Factory Default Settings
  33
- Factory Set Values
  33
7 Setpoint

34
- What Is Setpoint
  34
- Setpoint Setting Range
  34
- How to Set Setpoint
  34
  - How to Set Setpoint from Front Panel
    35
  - How to Set Setpoint from RS-485
    36
8 Connection with External Devices

37
- Output Signal
  37
- Input Signal
  38
  - Communication
    38
9 Pirani Gauge Sw1

39
- Sensor Unit Setting: "SP2
  39
- Front Panel
  39
  - Pressure Display State
    39
  - Description of Front Panel Keys
    39
- Setting Operation
  39
- Connection with Sensor Unit
  41
- Connection to External Device
  41
- Various Signals
  41
  - Output Voltage
    41
  - Filament Burnout Signal
    42
  - ADJ Adjustment
    42
  - Setpoint
    42
  - Communication
    42
- Zero Point Adjustment and Atmospheric Pressure Adjustment
  42
  - Adjusting Method
    42
10 Cold Cathode Gauge Sc1

43
- Setting the Sensor Unit
  43
- Front Panel
  43
  - Pressure Display
    43
  - Front Panel Key Description
    43
- Settings Operation
  43
- Connection to the Sensor Unit: "SENSOR" Connector
  45
- Connection with External Devices: "I/O" Connector
  45
- Signals
  45
  - Output Voltage
    45
  - HV on Signal: Pin 5
    46
  - Discharge Check Signal: Pin 4
    46
  - Setpoint: Pins 3, 7, 11
    46
  - RS485 Communication: Pins 10, 12
    46
11 Pirani Gauge Bpr2/Sp1

47
- Sensor Unit Setting: "SP1
  47
- Front Panel
  47
  - Pressure Display
    47
  - Description of Front Panel Keys
    47
- Setting Operation
  47
  - Communication Operation Setting "L1", "L2
    47
  - Operation Setting Method
    48
- Connecting to the Sensor Unit
  48
- Connection with External Devices
  49
- External Input/Output Signal
  49
  - Output Voltage
    49
    
    Burnout Signal
    50
  - Setpoint
    50
  - Communication
    50
12 Hot Cathode Gauge Bmr2

51
- Sensor Unit Setting: "Sn1
  51
- Front Panel
  51
  - Pressure Display
    51
  - Description of Front Panel Keys
    51
- Setting Operation
  51
- Connection with the Sensor Unit
  54
- Connection with External Devices
  54
- Various Signals
  55
  - Output Voltage
    55
  - Filament on Signal
    55
  - Degas on Signal
    55
  - Filament1/2 Changeover Signal
    55
  - Pressure Protection Signal
    56
  - Emission Valid Signal
    56
  - Setpoint
    56
  - RS485 Communication
    56
13 Multi Ionization Gauge Sh2/St2/Sh200/St200

57
- Sensor Unit Setting: "Sh2
  57
- Front Panel
  57
  - Pressure Display
    57
  - Description of Front Panel Keys
    57
- Setting Operation
  58
- Connection with the Sensor Unit
  60
- Connection with External Devices
  60
- Various Signals
  61
  - Output Voltage
    61
  - Filament on Signal
    61
  - Degas on Signal
    61
  - Filament1/2 Changeover Signal
    62
  - Pressure Protection Signal
    62
  - Emission Valid Signal
    62
  - Setpoint
    62
  - Communication
    62
14 Multi-Ionization Gauge Sh2/St2/Sh200/St200 (Spu Combination Mode)

63
- Sensor Unit Setting: "SPU
  63
- Front Panel
  63
  - Pressure Display
    63
  - Description of Front Panel Keys
    63
- Setting Operation
  64
- Connection with the Sensor Unit
  66
- Connection with External Devices
  66
- Various Signals
  67
  - Output Voltage
    67
  - Filament off Signal
    67
  - Degas on Signal
    68
  - Filament1/2 Changeover Signal
    68
  - Sensor Error Signal
    68
  - Emission Valid Signal
    68
  - Setpoint
    68
  - Communication
    68
15 Multi Ionization Gauge SH2/ST2/SH200/ST200 (SAU Triple Combination Mode)

69
- Sensor Unit Setting: "SAU
  69
- Front Panel
  69
  - Pressure Display
    69
  - Description of Front Panel Keys
    70
- Setting Operation
  70
- Connection with the Sensor Unit
  72
- Connection with External Devices
  72
- Various Signals
  73
  - Output Voltage
    73
  - Filament off Signal
    74
  - Degas on Signal
    74
  - Filament1/2 Changeover Signal
    74
  - Sensor Error Signal
    74
  - Emission Valid Signal
    74
  - Setpoint
    74
  - Communication
    74
16 Multi Ionization Gauge Sh2/St2/Sh200/St200 (Swu Combination Mode)

75
- Sensor Unit Setting: "SAU
  75
- Front Panel
  75
  - Pressure Display
    75
  - Description of Front Panel Keys
    75
- Setting Operation
  76
- Connection with the Sensor Unit
  78
- Connection with External Devices
  78
- Various Signals
  79
  - Output Voltage
    79
  - Filament off Signal
    80
  - Degas on Signal
    80
  - Filament 1/2 Changeover Signal
    80
  - Sensor Error Signal
    80
  - Emission Valid Signal
    80
  - Setpoint
    80
  - Communication
    80
17 CCM Series Ceramic Capasitance Manometer

81
- Sensor Unit Setting
  81
- Front Panel Display
  81
  - Pressure Display
    81
  - Front Panel Operation
    81
- Operation Setting
  81
- Connection to Sensor Unit
  83
- Connection to External Device
  83
- Signals
  83
  - Output Voltage
    83
  - Setpoint
    84
  - Communication
    84
- ZERO Point Adjustment
  84
  - Operation Front Panel
    84
  - Operation External I/O
    84
18 Calculating Function

85
19 Interlock Function

87
- Interlock Setting
  87
20 Measurement Units Function

88
- Measurement Units Setting
  88
21 Measurement Display Range Setting

89
- Measurement Display Range Ra Setting
  89
22 Rs-485

91
- Communication Specifications
  91
  - Standard Specifications
    91
  - Communication Setting
    91
- Setting
  91
  - Communication Setting "L2
    91
  - Baud Rate Setting
    91
  - Address Setting
    91
  - Setting the Checksum Collating Function
    92
  - Setting the Terminator
    92
  - Setting Method
    93
- Standard Data Format
  95
  - Command List
    95
  - When Received Normally
    95
  - When Receiving Is Faulty
    95
- Command
  96
- Checksum
  98
  - Example: When Reading the Measurement Value of Address 11 and Status
    98
- Status Setting List
  99
  - When Writing
    99
  - When Reading
    100
- ASCII Code Table
  101
23 Troubleshooting

102
24 Warranty

104
25 China Rohs Declaration

105
26 Ec Declaration of Conformity

106
27 Certificate of Decontamination

107

Ulvac G-Tran ISG1 Instruction Manual

Ulvac G-Tran ISG1 Instruction Manual (54 pages)

COLD-CATHODE ION GAUGE

Brand: Ulvac | Category: Accessories | Size: 1 MB

Table of Contents

Prior to Operation
3
Safety Denotations
3
Safety Precautions
4
Table of Contents
7
Introduction
10
Overview of G-TRAN SERIES
10
Terminology
10
FEATURES of SC1 Ion Gauge
11
Specifications and Components
12
Key Specifications
12
Standard Accessories
13
Options
13
Service Parts
13
Nomenclature and Functions of Components
14
Assembly
14
Front Panel
15
Input/Output Connector
16
Installation
17
Preparations
17
Installing the Sensor Head to the Sensor Unit
17
Installing the Sensor Unit
17
Electrical Connection
18
Cautions in Handling
19
Output Signals
20
Control Operation
20
High Voltage ON/OFF [HV ON/OFF]
20
Setpoint Actuating Signal [SET-1 ON/OFF][SET-2 ON/OFF]
20
Discharge Valid Signal [Discharge OK/NG]
20
Setting of Setpoint
21
Functions
22
Setpoint [SET-1 ON/OFF] [SET-2 ON/OFF]
22
Setpoint
22
Setting of Setpoint
22
Setpoints of Measuring Unit and Display Unit
22
Measurement Value Output
23
Measurement Value Voltage Output Form
23
Measurement Value Outputs in each Condition
24
Maintenance
25
Preparation of Tools and Others
25
Necessary Tools and Others
25
Necessary Equipment
25
Removing the Sensor Unit and Sensor Head
26
Removing Screws
26
Removing the Sensor Head
26
Disassembling the Sensor Head
27
Exploded View of Sensor Head
27
Removing the Internal Electrode
28
Cleaning the Electrode in the Sensor Head
31
Insulation Check of Anode
31
Cleaning the Anode
31
Cleaning Magnetic Poles 1 and 2
32
Cleaning the Spacer
33
Cleaning the Main Body
34
Cleaning the O-Ring and O-Ring Groove
34
Cleaning Parts
34
Reassembling the Sensor Head
35
Reassembly
35
Checking the Anode Position
35
Insulation Check
36
When a Insulation Resistance Tester Is Available at Hand
36
If a Insulation Resistance Tester Is Not Available at Hand
36
Leak Test
38
Installing the Sensor Unit and Sensor Head
39
Maintenance
39
Troubleshooting
40
Warranty
42
Certificate of Contamination
43
China Rohs Declaration
44
Appendix
45
Pressure-Measurement Value Voltage Table (Pa)
45
Pressure-Measurement Value Voltage Table (Torr)
48
Related Drawings
51
Compatible Sensor Heads
51

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