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11. Clean Model
11.2 Installation method
11.3 Exhaust System
NOTE
NOTE
64
Chapter 3. Installation contains instructions and safety precautions for unpacking and
installing the manipulator.
(1) After unpacking the manipulator outside of the clean room, use bolts to fasten it down
so that it will not tip over.
(2) Before installing the manipulator in the clean room, make sure it has been cleaned.
It's preferable to wipe off the dust with a little alcohol or distilled water on a lint-free
cloth.
(3) Transport the manipulator to the clean room and install it.
(4) Connect the exhaust tube to the exhaust port. (Refer to the next section.)
The Clean model requires the following type of exhaust system to prevent emission of dust
particles from the manipulator.
Exhaust port size
Exhaust tube
Recommended exhaust flow rate Approximately 1000cm
The gap between the exhaust port and the exhaust tube must be sealed with vinyl tape so
that the junction is airtight.
If the exhaust flow is not sufficient, dust particle emission may exceed the specified
maximum level.
The exhaust system draws air from this Clean model manipulator's base interior and arm
cover interior. A crack or other opening in the base unit can cause loss of negative air
pressure in the outer part of the arm, which can cause increased dust emission. Therefore,
do not remove the maintenance cover on the front of the base, the acrylic cover on the back
of the base, or the sealing tape on the connector.
Part 1: Setup & Operation
Inner diameter φ 12 mm
Outer diameter φ 16 mm
Outer diameter φ 12 mm (Inner diameter φ 8 mm)
or the polyethylene tube with inner diameter φ 16 mm
or over
3
/s (Normal)
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