Basic Specifications; Table 1-3: Als130H Series Specifications - Aerotech ALS130H Hardware Manual

ALS130H Hardware Manual

1.3. Basic Specifications

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual's release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: ALS130H Series Specifications
Model
Travel
Drive System
Bus Voltage
A
Continuous
pk
Current
A
rms
Feedback
Resolution (Minimum Incremental
Motion)
Maximum Travel Speed
Maximum Linear Acceleration
Horizontal
Maximum
(2)
Load
Side
Calibrated
Accuracy
Uncalibrated
Mean
Repeatability
Peak to Peak
Straightness Maximum
and Flatness Deviation
Pitch
Roll
Yaw
Nominal Stage Weight
Moving Mass
Construction
1. Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system
resolution.
2. Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
3. Available with Aerotech controllers.
NOTE: Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is
payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
www.aerotech.com
ALS130H-025 ALS130H-050 ALS130H-100
25 mm
Linear Brushless Servomotor (BLMUC-95-A)
(1)
(3)
±1.0 µm
±1.0 µm
5 arc sec
5 arc sec
3 arc sec
3.0 kg
0.9 kg
Chapter 1
50 mm 100 mm
Up to 80 VDC
2.94
2.08
Noncontact Linear Encoder
0.5 nm - 1.0 µm
300 mm/s
1 g (No Load)
12.0 kg
10.0 kg
±0.3 µm
±1.0 µm ±2.0 µm
75 nm
±100 nm
±1.0 µm ±1.5 µm
6 arc sec 8 arc sec
6 arc sec 8 arc sec
3 arc sec 4 arc sec
3.0 kg 3.8 kg
1.1 kg 1.3 kg
Aluminum Body/Black Anodize Finish
Overview
ALS130H-150
150 mm
±3.0 µm
±2.0 µm
10 arc sec
10 arc sec
5 arc sec
4.6 kg
1.6 kg
11