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252E
MKS 252E Manuals
Manuals and User Guides for MKS 252E. We have
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MKS 252E manual available for free PDF download: Instruction Manual
MKS
252E
Instruction Manual
MKS 252E Instruction Manual (61 pages)
Exhaust Valve Controller
Brand:
MKS
| Category:
Controller
| Size: 0 MB
Table of Contents
Table of Contents
6
Safety Information
12
Symbols Used in this Instruction Manual
12
Symbols Found on the Unit
13
Table 1: Definition of Symbols Found on the Unit
13
Safety Procedures and Precautions
14
Chapter One: General Information
16
Introduction
16
How this Manual Is Organized
18
Customer Support
18
Chapter Two: Installation
20
How to Unpack the Type 252 Unit
20
Unpacking Checklist
20
Interface Cables
21
System Interface Cables
21
Table 2: System Interface Cables
21
Generic Shielded Cable Description
22
Figure 1: Preferred Method to Connect a Shielded Cable
23
Figure 2: Alternate Method to Connect a Shielded Cable
23
Product Location and Requirements
24
Operating Environmental Requirements
24
Safety Conditions
24
Setup
25
System Design
25
Mounting Instructions
26
Interconnections
26
Figure 3: Standard Pressure Control Setup
27
Figure 4: 253 Valve Connected in Parallel with an Isolation Valve
27
Electrical Information
28
Fuses
28
Grounding
28
Table 3: Fuse Information
28
Valve Connector
29
Table 4: Valve Connector Pinout
29
Input Connector
30
Table 5: Input Connector Pinout
30
Interface Connector
31
Table 6: Interface Connector Pinout
31
Chapter Three: Overview
32
General Information
32
Stepping Drive Motor
33
Power Supply
33
Table 7: Stepping Drive Motor Four-Step Sequence
33
Front Panel Controls
34
Figure 5: Front Panel Controls
34
Rear Panel Controls
36
Figure 6: Rear Panel Controls
36
Labels
37
Serial Number Label
37
Figure 7: Serial Number Label
37
Chapter Four: Operation
38
How to Setup the Controller
38
How to Tune-Up the Controller
39
How to Use the Normal/Reverse Switch
40
How to Use External Control
40
Advisory
41
How to Use the Valve Position Option
42
Interconnections
42
Table 8: Valve Position Option Pinout
43
How to Use the Multiple Set Point Option
44
Settings
44
Selection
44
Interconnections
45
Table 9: Multiple Set Point Option Pinout
45
How to Use the Process Limit Option
46
Controls
46
Figure 8: Process Limit Set Point Control
46
Interconnections
47
Table 10: Process Limit Option Pinout
47
How to Use the Reverse Limit Switch Option
48
Chapter Five: Maintenance and Troubleshooting
50
General Information
50
Maintenance
50
How to Clean the Unit
50
How to Replace the Fuses
50
How to Perform the Controller Alignment Procedure
51
Table 11: Test Point Voltages
52
Troubleshooting
53
Table 12: Troubleshooting Chart
54
Appendix A: Product Specifications
56
Appendix B: Model Code Explanation
58
Index
60
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