MKS P250A Instruction Manual
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MKS P250A Instruction Manual

High flow rate mass flow controller
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Type P250A / IM250A High Flow
Rate
Mass Flow Controller
Instruction Manual
2 Tech Drive
1041806-001 Rev C
Suite 201
10/13
Andover, MA 01810
978.645.5500
978.557.5100 FAX
www.mksinst.com

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Summary of Contents for MKS P250A

  • Page 1 Type P250A / IM250A High Flow Rate Mass Flow Controller Instruction Manual 2 Tech Drive 1041806-001 Rev C Suite 201 10/13 Andover, MA 01810 978.645.5500 978.557.5100 FAX www.mksinst.com...
  • Page 2 For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
  • Page 3 1041806-001 Rev C 10/13 Type P250A / IM250A High Flow Rate Mass Flow Controller 2 Tech Drive Suite 201 Andover, MA 01810 978.645.5500 978.557.5100 FAX www.mksinst.com...
  • Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America DeviceNet™...

  • Page 5: Table Of Contents

    How the MFC Works ..............................18 Operation of the MFC with Gases other than Nitrogen ....................19 Chapter Two: Installation ..........................22 Unpacking the P250A Mass Flow Controller ......................22 Verifying Use Requirements Prior to Installation ....................... 22 Understanding Dimensional Constraints ........................23...
  • Page 6 Step 1: Install the Java™ Plug-In ..........................62 Step 2: Configure TCP/IP Settings for Communication to P250A ................63 Step 3: Connect to the P250A High Flow Rate Mass Flow Controller ............... 65 Monitor Mode ................................66 Setup Mode .................................. 71 Appendix A: Product Specifications ......................
  • Page 7 Figure 32: P250A Embedded Interface (Setup Mode / Device Page) ............... 72 Figure 33: P250A Embedded Interface (Setup Mode / Device Page) Creating A New Gas Instance ....73 Figure 34: P250A Embedded Interface (Setup Mode / Device Page) Changing Full Scale Flow Range ..73 Figure 35: P250A Embedded Interface (Setup Mode / Plot Page) ..............
  • Page 8 表 5: 本機器に使用されているマークについて ...................... 9 표 6: 장치에 표시된 기호들의 정의 ......................13 Table 7: MKS Interface Cables ........................30 Table 8: Analog I/O 9-pin DSUB Pinouts (Model Code A) ................31 Table 9: Analog I/O 15-pin DSUB Pinouts (Model Code B) ................32 Table 10: 4-20 mA I/O 15-pin DSUB Pinouts (Model Code G) ..............
  • Page 9 Mass Flow Device Safety Information List of References The documents listed below are referenced throughout this manual. [1] “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open DeviceNet Vendors Association, Inc. Release 2.0. [2] “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet Vendors Association, Inc.
  • Page 10 Mass Flow Device Safety Information This page intentionally left blank. viii...

  • Page 11: Mass Flow Device Safety Information

    Mass Flow Device Safety Information Mass Flow Device Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 12: Safety Procedures And Precautions

    Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers.

  • Page 13: Sicherheitshinweise Für Das Massenflussgerät

    Sicherheitshinweise für das Massenflussgerät Sicherheitshinweise für das Massenflussgerät In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.

  • Page 14: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.

  • Page 15: Informations De Sécurité Pour Appareils De Mesure/Contrôle De Débit Massique

    Informations de sécurité pour appareils de mesure/contrôle de débit massique Informations de sécurité pour appareils de mesure/contrôle de débit massique Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d'accident pour le personnel, en cas d'exécution incorrecte ou de non-respect des consignes.

  • Page 16: Mesures De Sécurité Et Précautions

    Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.

  • Page 17: Medidas De Seguridad Del Dispositivo De Flujo De Masa

    Medidas de seguridad del dispositivo de flujo de masa Medidas de seguridad del dispositivo de flujo de masa Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.

  • Page 18: Procedimientos Y Precauciones De Seguridad

    No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.

  • Page 19: マスフロー機器の安全に関する情報

    IEC 417, No. 5172-a IEC 617-2, No. 020206 注意 (付属書を参照) 注意 (感電の危険あり) 注意 (表面が熱くなっています) ISO 3864, No. B.3.1 ISO 3864, No. B.3.6 IEC 417, No. 5041 安全対策について 本機器を使用する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの 警告を無視すると、機器本来の用途の安全基準を侵害することになり、機器が提供する保護機能が 損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履行に対して は一切責任を負いかねます。 勝手に部品を変えたり、本体を改造しないこと 本機器に代用部品を使用したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。...
  • Page 20 マスフロー機器の安全に関する情報 修理は必ず専門の修理サービスを利用すること オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専門の修理サービスを利 用してください。 電流が通じている回路から切断すること 電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態 でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切 断し、放電してください。 危険な材料を使用する場合は慎重に機器を使用すること 危険な材料を使用する場合は、使用者は各自の責任の元で適切な安全対策を講じてください。必要に応じて 本機器を浄化してください。また、使用する材料に対するシーリング材の耐久性を確認してください。 機器を浄化すること 本機器を取り付けた後やシステムから取り外す前に、きれいな乾燥ガスで本機器を浄化し、使用した材料を完 全に取り除いてください。 浄化する場合は適切な手順で行うこと 本機器の浄化は換気フードの下で行う必要があります。また、浄化作業を行う人は必ず手袋を着用してください。 爆発の危険性のある環境で機器を使用しないこと 爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使用しないでください。ただし、そのような環境 での使用が特別に保証されている場合は除きます。 適切な金具類を使用し、手順に従って金具の締めを行うこと 金具類は本機器の仕様と一致し、機器本来の用途に適合したものである必要があります。金具類の取り付け や締めは、製造業者の指示に従ってください。 液体の漏れがないよう接続箇所を確認すること 本機器を設定する前に、すべての配管の接続を慎重に確認し、液体が漏れないようにしてください。 安全なインレット圧力で使用すること 定格の最大圧力を超える圧力の下で本機器を絶対に使用しないでください (最大許容圧力については仕様書 を参照)。 適切なバーストディスクを取り付けること 圧力のかかったガスを使用する場合は、万一システムが爆発した場合にシステムの圧力が上昇するのを防ぐため、 真空システムに適切なバーストディスクを取り付けてください。 本機器に異物やゴミが混入しないようにすること 本機器の使用前または使用中に、ほこりやゴミ、繊維、ガラスの破片、金属片などの異物やゴミが混入しないよ うにしてください。本機器が損傷する可能性があります。 温度調整された機器を十分に温めてから使用すること 温度調整された機器が適切な作動温度にならないうちに使用すると、仕様通りの動作をしないことがあります。 本機器が十分に温まるまでは目盛りをゼロに合わせたり、較正しないでください。...
  • Page 21 マスフロー機器の安全に関する情報 This page intentionally left blank.

  • Page 23: 질량 유량 장치 안전 정보

    준수하지 않거나 본 매뉴얼의 다른 부분에 있는 특정 경고를 준수하지 않을 경우, 기계 사용 목적의 안전 기준을 위반하는 것이 되며, 장비가 제공하는 보호기능을 손상시킬 수 있습니다. MKS Instruments, Inc.는 고객이 본 요건을 준수하지 않는 경우에 대해서는 어떠한 책임도 지지 않습니다.
  • Page 24 질량 유량 장치 안전 정보 교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가 필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and Service Center)로 보내주십시오. 자격이 있는 사람에게만 서비스를 받으십시오 작동하는 사람은 기계 겉면을 제거해서는 안됩니다. 부품 교체 및 내부 조정은 자격이 있는 서비스...
  • Page 25 질량 유량 장치 안전 정보 This page intentionally left blank.

  • Page 27: How This Manual Is Organized

    How This Manual is Organized How This Manual is Organized This manual is designed to provide instructions on how to set up, install, and operate a P250A / IM250A High Flow Rate Mass Flow Controllers. Before installing your P250A / IM250A High Flow Rate Mass Flow Controller in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Mass Flow Controller Safety Information section at the front of this manual.

  • Page 28: Chapter One: General Information

    MKS real-time feedback control system to provide typical flow control response times of approximately 2 seconds. The P250A MFC includes an integrated multifunctional local display and an embedded, web-based user interface. The device is available with full scale flow ranges of 100 slm to 250 slm (N2 equivalent) in standard 8 VCR process connections.

  • Page 29: Operation Of The Mfc With Gases Other Than Nitrogen

    The current MKS library of gases and functions is in excess of 80 in number and includes most gases in common use within the process industries. For gases whose parameters that are not already stored on the MFC, please consult an MKS applications engineer.
  • Page 30 (profile) are included in separate documentation. Cleanliness Features The P250A High Flow Rate Mass Flow Controller uses only metal for all external seals. The metal seals eliminate gas permeation and ensure extremely low external leakage. The P250A MFC mechanical design incorporates minimal wetted surface area and virtual leaks, assuring rapid dry-down.
  • Page 31 Operation of the MFC with Gases other than Nitrogen This page intentionally left blank.

  • Page 32: Chapter Two: Installation

    If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.

  • Page 33: Understanding Dimensional Constraints

    Allow unit to return to normal ambient temperature for 4 hours prior to applying electrical power.  Mount the P250A Mass Flow Controller securely to a rigid base. Prior to installation, check the MFC outlet for labels indicating calibration orientation. If no label is present, the MFC is configured for the standard HBD installation.

  • Page 34: Figure 1: Front View Of The P250A Mfc

    Chapter Two: Installation Front and Rear Views The front of the P250A MFC has an arrow to indicate the direction of gas flow through the unit. The back of the P250A MFC contains the connector pin-outs. Figure 1: Front View of the P250A MFC...

  • Page 35: Figure 3: End View Of The P250A Mfc

    Chapter Two: Installation Understanding Dimensional Constraints End View Figure 3: End View of the P250A MFC Top View Figure 4: Top View of the P250A MFC (DeviceNet Interface)

  • Page 36: Figure 5: Front View Of The Im250A Mfc

    Understanding Dimensional Constraints Chapter Two: Installation Front and Rear Views The front of the IM250A MFC has an arrow to indicate the direction of gas flow through the unit. The back of the IM250A MFC contains the connector pin-outs. Figure 5: Front View of the IM250A MFC Bottom View Figure 6: Bottom View of the IM250A MFC...

  • Page 37: Figure 7: End View Of The Im250A Mfc

    Chapter Two: Installation Understanding Dimensional Constraints End View Figure 7: End View of the IM250A MFC Top View Figure 8: Top View of the IM250A MFC (Analog Interface)

  • Page 38: Performing Mfc Installation

    Labels Each P250A unit has two serial number labels, a small one on top side and the standard, larger label on the inlet end side. Each label shows the serial number, the model code, the full scale flow range, and the name plate gas.
  • Page 39 Chapter Two: Installation Performing MFC Installation installation. Use only purge gases that are approved for your process. 5) Connect the process gas supply remembering to tighten the seal gaskets according to the fitting manufacturer’s/ seal gasket manufacturer’s recommendation. Use appropriate gasket material for the application.

  • Page 40: Chapter Three: Operation

    Chapter Three: Operation Analog 9-pin / 15-pin Interface Operation The P250A High Flow Rate Mass Flow Controller analog I/O interface types are available in several pin combinations, including 9-pin DSUB male connector or a 15-pin DSUB male connector for providing power and signal I/O.

  • Page 41: Table 8: Analog I/O 9-Pin Dsub Pinouts (Model Code A)

    Note Analog I/O 9-pin Pinouts The P250A analog I/O MFC is available with either a 9-pin D male connector or a 15-pin D male connector for providing power and signal I/O. Table 8: Analog I/O 9-pin DSUB Pinouts (Model Code A)

  • Page 42: Table 9: Analog I/O 15-Pin Dsub Pinouts (Model Code B)

    Analog I/O Optional Input (15-pin DSUB Only) The standard 15-pin P250A High Flow Rate Mass Flow Controller can control flow based on a 0 to 5 V signal from an external sensing device using the optional input feature (for a 0 to 10 Volt input range, contact the MKS Applications Department).
  • Page 43 Although controlling to the external optional input signal, the metered flow output signal is still provided on the standard output pin 2. The optional input feature is only available on the 15-pin DSUB connector with standard MKS Note pinout assignments.

  • Page 44: 4-20 Ma Io 15-Pin Interface Operation

    Chapter Three: Operation 4-20 mA IO 15-pin Interface Operation The P250A High Flow Rate Mass Flow Controller 4-20 mA I/O interface type is available in a 15-pin DSUB male connector for providing power and signal I/O. 4-20 mA I/O 15-pin Pinouts...
  • Page 45 Chapter Three: Operation 4-20 mA IO 15-pin Interface Operation 4-20 mA IO Valve Override (Controllers Only) The valve override feature enables the control valve to be fully opened (purged) or closed independent of the setpoint command signal. For a 4-20 mA IO interface: ...

  • Page 46: Devicenet Interface Operation

    Figure 10: DeviceNet Connector Pin Diagram DeviceNet MFC Digital Operation Overview The P250A High Flow Rate Mass Flow Controller complies with the ODVA DeviceNet Specification Volume I and Volume II [1, 2], and the SEMI Standards Common and Specific Device Models [3, 4]. Refer to those documents for a complete functional description of the MFC communications profile, object model, and physical layer requirements.

  • Page 47: Table 12: Devicenet Network Status Led Indicators

    Chapter Three: Operation DeviceNet Interface Operation The Network Status LED indicates the status of the communications link. If no problems are detected, the Network Status LED illuminates a solid green. A red, dark, or flashing green Network Status LED indicates a fault condition on the network.

  • Page 48: Figure 11: Devicenet Baud Rate Switch

    DeviceNet Interface Operation Chapter Three: Operation Baud Rate (Kb) Figure 11: Devicenet Baud Rate Switch DeviceNet MAC ID (Node Address) Switches Two 10-position rotary switches, shown below, are used to set the MAC ID (node address). The MAC ID is an integer identification value assigned to each node on the DeviceNet network.
  • Page 49 The device returns the operating mode status to attribute 100(0x64) in the S-Device Supervisor Object. Per ODVA requirements, limiting access rights is only possible on attributes in manufacturer specific objects. In P250A DeviceNet Mass Flow devices, the object of interest is the Controller Calibration Object, class code 102 (0x66).

  • Page 50: Rs485 Interface Operation

    The MFC controller (up to 15) acts as a slave device on an RS485 multi-drop bus. It continually listens for transaction requests from the host controller, processes requests addressed to it, and sends replies as needed. For a complete description of this multi-drop protocol see the MKS Document, Command Specification, P250A RS485 Interface. Please contact MKS for this document.

  • Page 51: Figure 13: Rs485 Baud Rate Switch

    A hardware problem with the EEPROM, or a memory problem with the RAM are major unrecoverable faults. This fault condition sets its exception status bit, and the LED illuminates solid red Note A major unrecoverable fault prevents operation because the device cannot communicate on the network. Contact MKS Instruments, Inc. for assistance.

  • Page 52: Profibus Interface Operation

    Chapter Three: Operation Profibus Interface Operation The P250A High Flow Rate Mass Flow Controller Profibus interface has two 9-pin DSUB connectors. The female connector is used for the communications interface with the Profibus network. The male connector is used for the power input as well as the valve override function.

  • Page 53: Figure 16: Profibus (Male Dsub) Power Connector Pin Diagram

    Chapter Three: Operation Profibus Interface Operation Table 16: Profibus Power Connector Pinout 9-pin Male Pin Descriptions Pin Number Pin Function Pin Voltage Pin 1 Valve Override Override off Pin open circuit Valve Open 5V to 24V Valve Closed Pin 2 Pin 3 Power + Pin 4...
  • Page 54 Profibus Interface Operation Chapter Three: Operation Station Address The address (station address) for your device is set using the rotary switches located on the top panel of the device. The address switches allow you to easily configure units without an operational network, or to network multiple units quickly.

  • Page 55: General Operational Functions

    Gas Calibration Tables The default (instance 32) N2 gas calibration table (250 slm) created at the MKS factory is tagged in a manner which prevents editing or deletion in the field. This ensures that vital calibration information is not lost during subsequent gas creation and range adjustment activities.

  • Page 56: Figure 18: Effects Of The Proportional Term (High Proportional Term)

    General Operational Functions Chapter Three: Operation Figure 18: Effects of the Proportional Term (High Proportional Term) Integral Term The action of the Integral (I) term creates a valve drive signal that is proportional to the magnitude and sign of the area under the error signal curve (error signal with respect to time). Therefore, as time passes, the integral term acts to position the valve to reduce the error signal to zero.
  • Page 57 (negative slope of the absolute error over time), the derivative term reduces the effects of the Proportional term. Excessively high Derivative term values can result in instability of the controller. In general, P250A mass flow controllers control well with the Derivative term equal to zero. Optimizing PID Control Settings Optimizing the P250A Mass Flow Controller response in your system involves adjusting the Proportional, Integral, and Derivative (PID) terms.
  • Page 58 General Operational Functions Chapter Three: Operation This page intentionally left blank.

  • Page 60: Chapter Four: Maintenance And Troubleshooting

    The components used in the MKS P250A High Flow Rate Mass Flow Controller have a long history of usage and are expected to comply with the specifications listed.
  • Page 61 Chapter Four: Maintenance and Troubleshooting Zeroing the MKS P250A High Flow Rate Mass Flow Controller Preparing to Execute Zero Adjustment Zeroing a flow sensor at a real flow above its stated minimum resolution creates a zero flow offset relative to the true absolute zero flow.
  • Page 62 Zeroing the MKS P250A High Flow Rate Mass Flow Chapter Four: Maintenance and Troubleshooting Controller b) Wait 20 seconds while the mass flow controller performs the zero adjustment process. c) Verify that the zero offset has changed. OPTION 2: Diagnostic Interface...
  • Page 63 Chapter Four: Maintenance and Troubleshooting Zeroing the MKS P250A High Flow Rate Mass Flow Controller b) Wait 20 seconds while the mass flow controller performs the zero adjustment process. c) Verify that the zero offset has changed. The flow sensor within the mass flow controller is now re-zeroed and the unit ready for use. Cycling power is not necessary for the new flow zero values to be in effect.
  • Page 64 Zeroing the MKS P250A High Flow Rate Mass Flow Chapter Four: Maintenance and Troubleshooting Controller Because this operation offsets all readings from the flow sensor, the user must be certain that a true  zero flow condition exists before enabling the function.

  • Page 65: Customer Support

    A returned instrument will not be examined without a signed Health and Safety form indicating that the unit is free of harmful materials. The Health and Safety form can be obtained on the last page of this manual or through the MKS website at: http://www.mksinst.com/service/servicehowtoorder.aspx.

  • Page 66: Troubleshooting

    Troubleshooting Chapter Four: Maintenance and Troubleshooting Troubleshooting Table 17: MFC Troubleshooting Chart Symptoms Possible Cause Remedy MFC information is not displayed MFC power has been turned off * Verify the device is powered with the correct in 4-segment LED indicator input voltage at power supply Incorrect cable used to connect MFC * Verify recommended cable configuration in...
  • Page 67 Chapter Four: Maintenance and Troubleshooting Troubleshooting MFC does not respond to setpoint Upstream / downstream pneumatic * Verify pneumatic air supply is not restricted and reports near zero flow valves have not received adequate and provides minimum pressure specified by actuation pressure valve manufacturer (valve current is max 260 mA)
  • Page 68 Troubleshooting Chapter Four: Maintenance and Troubleshooting MFC flow output does not match Inadequate process gas supply * Verify normal operating pressure differential flow setpoint pressure (inlet pressure too low / is within design specification listed in outlet pressure too high) Appendix A (valve current is max 260 mA) MFC has improperly grounded...
  • Page 69 Chapter Four: Maintenance and Troubleshooting Troubleshooting MFC flow output matches Actual process gas does not match * Verify actual process gas in use matches programmed setpoint but actual current gas instance for MFC programmed gas instance in CONFIG mode independently measured gas flow of diagnostic interface exceeds allowable accuracy error Low vapor pressure gas has...
  • Page 70 Troubleshooting This page intentionally left blank.

  • Page 72: Chapter Five: Diagnostic Interface Setup, Configuration, And Operation

    IM250A includes a cover plate with sealing gaskets and screws. While the use and operation of an IM250A through the Ethernet interface is the same as it is for the P250A care must be taken when removing and reinstalling the cover plate and gasket to ensure the IM250A maintains the ingress protection rating of IP66.

  • Page 73: Step 2: Configure Tcp/Ip Settings For Communication To P250A

    Step 2: Configure TCP/IP Settings for Communication to P250A A software script allows you to rapidly create a network connection to the P250A High Flow Rate Mass Flow Controller. Once connected a series of HTML-browser windows allow you to easily monitor and configure the P250A Mass Flow Controller.

  • Page 74: Figure 24: Windows Xp Shell Command Prompt

    3. Connect a CAT-5 crossover EtherNet network cable between your computer’s network interface card and the P250A High Flow Rate Mass Flow Controller. A crossover cable is required when the P250A High Flow Rate Mass Flow Controller is connected directly to a computer. When the P250A High Flow Rate Mass Flow Controller is connected to a network using an EtherNet hub / EtherNet switch interface, a standard Ethernet cable can be used.

  • Page 75: Step 3: Connect To The P250A High Flow Rate Mass Flow Controller

    Launch an HTML browser and enter “http://xxx.xxx.x.xxx” in the address field, where xx.xx.xx.xx stands for the IP address of the P250A High Flow Rate Mass Flow Controller to which you are trying to connect. Click “Go”. Internet Explorer will open and display the Device page in Monitor Mode.

  • Page 76: Monitor Mode

    “Monitor Mode” allows the user to monitor the P250A High Flow Rate Mass Flow Controller’s performance. In order to configure the P250A High Flow Rate Mass Flow Controller, (which includes zeroing the device, uploading firmware updates, changing IP addresses, and creating new process gases), the “Setup” mode should be used.
  • Page 77 Chapter Five: Diagnostic Interface Setup, Configuration, Monitor Mode and Operation Monitor Mode / Plot Page The Monitor Mode / Plot Page shows real-time performance of the device. From this page, the user is able to select the variables to plot, the rate at which to plot them, and the filename under which to save the data that has been plotted.

  • Page 78: Figure 28: P250A Embedded Interface (Monitor Mode / Plot Page)

    MFC either individually or all at once. In the “Snapshot” section, the user can acquire device setup data that will allow MKS to diagnose a device problem remotely. Both of these sections are explained in detail below.

  • Page 79: Figure 29: P250A Embedded Interface (Monitor Mode / Diagnostics Page)

    If the test passes, then the temperature circuit is good. If it fails, then there may be a problem. Please follow the instructions in the Snapshot section below. Figure 29: P250A Embedded Interface (Monitor Mode / Diagnostics Page) Monitor Mode / Configuration Page This Monitor Mode / Configuration Page displays the TCP/IP settings and the current firmware version for the MFC.

  • Page 80: Figure 30: P250A Embedded Interface (Monitor Mode / Configuration Page)

    Monitor Mode Chapter Five: Diagnostic Interface Setup, Configuration, and Operation Figure 30: P250A Embedded Interface (Monitor Mode / Configuration Page)

  • Page 81: Setup Mode

    Page. Please note that this section will only describe in detail the features that are different from those in “Monitor Mode.” For a complete understanding of each page, also read the Monitor Mode section. Figure 31: P250A Embedded Interface (Setup Mode / Configuration Page)

  • Page 82: Figure 32: P250A Embedded Interface (Setup Mode / Device Page)

    In “Setup Mode” this page gives you the ability to modify the gas settings. Figure 32: P250A Embedded Interface (Setup Mode / Device Page) Gas Settings: The Device Page enables the user to change the MFC’s gas settings. To change the gas settings review the following possible operations on the following pages.

  • Page 83: Figure 33: P250A Embedded Interface (Setup Mode / Device Page) Creating A New Gas Instance

    Device Page. At this point, if you want to change the full scale, then go ahead to the next section. Figure 33: P250A Embedded Interface (Setup Mode / Device Page) Creating A New Gas Instance Setup Mode / Device Page / Changing the Full Scale Flow Range In the “Gas Settings”...

  • Page 84: Figure 35: P250A Embedded Interface (Setup Mode / Plot Page)

    To begin sending setpoints through the analog interface again, either uncheck the Analog checkbox or close the browser. Figure 35: P250A Embedded Interface (Setup Mode / Plot Page) Before a MFC leaves the factory the performance is checked with Nitrogen in a typical application. During this test the control parameters are set so that the device’s performance is optimized.

  • Page 85: Figure 36: P250A Embedded Interface (Setup Mode / Configuration Page)

    Mode.” Here the MFC can be zeroed, the “Setup Mode” password can be changed, changes can be made to the Ethernet settings and firmware can be updated. Figure 36: P250A Embedded Interface (Setup Mode / Configuration Page) Setup Mode / Configuraton Page / Zeroing the MFC For the MFC there will be a “Zero Flow”...
  • Page 86 Setup Mode / Configuraton Page / Updating Firmware Updating firmware is the responsibility of your local MKS representative. If any updates are “necessary”, then your local representative will be in contact to set up a time to complete the upgrade. Please note that a...

  • Page 87: Figure 37: P250A Embedded Interface (Setup Mode / Optional Pc Page)

    To set the device so that it controls to its own internal sensor the optional input must be disabled. Figure 37: P250A Embedded Interface (Setup Mode / Optional PC Page) Setup Mode / Optional PC / Enabling the Optional Input To enable the Optional Input, check the “Enable Optional Input”...
  • Page 88 Setup Mode Chapter Five: Diagnostic Interface Setup, Configuration, and Operation Optional Input Kp, Optional Input Ki, Optional Input Kd: These values are the PID parameters for Optional Input control. Typically these will be set to match the standard Kp, Ki and Kd values that are factory set before shipment.

  • Page 89: Figure 38: P250A Embedded Interface (Setup Mode / Plot Page) Enabled Optional Input

    Setup Mode and Operation Figure 38: P250A Embedded Interface (Setup Mode / Plot Page) Enabled Optional Input The Optional PID parameters are always settable on the plot page, but they will have no effect unless the Optional Input is enabled. If not already set, it is recommended that these values be set to the standard Kp, Ki and Kd values initially.

  • Page 90: Appendix A: Product Specifications

    Performance Specifications Appendix A: Product Specifications Appendix A: Product Specifications Performance Specifications Full Scale Flow equivalent) 100 to 250 slm Max Inlet Pressure 150 psig 25 – 45 psid Normal Operating Pressure Differential (ATM pressure @ MFC outlet port) Proof Pressure 1000 psig Burst Pressure 1500 psig...

  • Page 91: Environmental Specifications

    Appendix A: Product Specifications Environmental Specifications Environmental Specifications 10 to 50 C (50 to 122 F) Ambient Operating Temperature Range -20 to 65 C (-4 to 149 F) Storage Temperature Range Storage Humidity Range 0 to 95% RH, non-condensing Electrical Specifications DeviceNet Input Power 11-25 V...
  • Page 92 Electrical Specifications Appendix A: Product Specifications Visual Communication Indicators LED network status (green/red) LED module status (green/red) LED displays (user settable: flow, gas , temp, full scale, scrolling) 9-pin ANALOG / 15-pin ANALOG Input Power +15 - 24 V (~ 320 mA @ 24 V nominal) Connector 9-pin DSUB / 15-pin DSUB...
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  • Page 94: Appendix B: Model Code Explanation

    Appendix B: Model Code Explanation Model Code Description The model code of the P250A High Flow Rate Mass Flow Controller defines features of the unit such as interface type, control gas, flow range, valve configuration, and firmware revision. The model code is identified as follows:...
  • Page 95 Mass Flow Full Scale Range (FFF) The P250A High Flow Rate Mass Flor Controller’s full scale range is indicated by a three digit combination where the flow rate is expressed in sccm. The first two digits of this code represent the most significant digits of the flow full scale range in exponential form separated by a decimal.
  • Page 96 No valve Firmware Version (SS) The P250A High Flow Rate Mass Flow Controller’s firmware version options are designated by a two digit number code. Example: The initial release of the P250A High Flow Rate Mass Flow Controller uses firmware version...
  • Page 97 Model Code Description This page intentionally left blank.

  • Page 98: Appendix C: Health And Safety Form

    Model Code Description Appendix C: Health and Safety Form Appendix C: Health and Safety Form...

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