HELIX 9600 Installation, Operation And Maintenance Instructions page 45

SUPPLY
WATER POWER
©2007 Helix Technology Corporation
2, or 3 connectors on the Cryo-Torr Interface and the respective
Cryo-Torr Cryopumps as shown in
3. Connect the User Remote cable to the Cryo-Torr Interface as shown
in Figure 3-8 or
4. Connect the Remote cable between the Cryo-Torr Interface and the
Compressor as shown in
NOTE: Your installation may vary based upon the Cryo-Torr Cryopump
models used. Refer to
consult your local CTI-CRYOGENICS Customer Support Center for
information on specific compressor/cryopump applications.
NOTE: The Cryo-Torr Interface can be installed at the process tool
containing the cryopumps as shown in
as shown in Figure
Torr Interface be installed at the process tool to reduce cable requirements.
RETURN
Cryopump Electrical Input
Figure 3-8: Multiple Cryo-Torr Cryopump Installation
Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068
Figure 3-8
Figure 3-9.
Figure 3-8 or
"Appendix A - Customer Support Information"
Figure 3-8
3-9. CTI-CRYOGENICS recommends that the Cryo-
Cryo-Torr
Interface
Remote
or Figure 3-9.
Figure 3-9.
or near the Compressor
User Remote
(from vacuum system)
to
3-15