HELIX 9600 Installation, Operation And Maintenance Instructions page 39

High voltage compressor
Table of Contents

Advertisement

WATER
Make sure the Compressor power is OFF before making any
connections to the rear panel.
©2007 Helix Technology Corporation
cold head cable connector.
SUPPLY
RETURN
REMOTE
POWER
Figure 3-4: Single On-Board Cryopump Connections
CAUTION
1. Connect the Supply and Return lines to the 9600 Compressor as
described in
"Connecting/Disconnecting Helium Flex Lines"
this section.
2. Connect one end of the Cryopump cold head cable to the
CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor as shown in
the cold head cable to the cryopump cold head cable connector as
shown in
Figure
Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068
On-Board Cryopump
Power Cable
Figure
3-5. Connect the opposite end of
3-5.
in
3-9

Advertisement

Table of Contents
loading

Table of Contents