HELIX 9600 Installation, Operation And Maintenance Instructions page 11

Tables
Table 1-1:Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-2:Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-3:Cooling Water Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Table 1-4:General Compressor Operating Specifications . . . . . . . . . . . . . 1-7
Table 1-5:Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . 1-11
Table 1-6:Compressor Remote Connector Pin Assignments . . . . . . . . . . 1-11
Table 4-1:9600 Compressor Helium ("OFF" Condition) Charge. . . . . . . . 4-1
Table 5-1:Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . 5-1
Table C-1:Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . C-2
Table D-1:Basic Control Assembly Legend . . . . . . . . . . . . . . . . . . . . . . . . D-1
Table D-2:On-Board/Cryo Electrical Module P/N 8135127G002 Legend D-2
Table D-3:On-Board Output Module P/N 8135148G001 Legend . . . . . . . D-3
©2007 Helix Technology Corporation Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068 xi