HELIX 9600 Installation, Operation And Maintenance Instructions page 71

A
Adsorber
replacing, 5-2
C
Components
compressor remote connector, 1-11
control circuit breaker, 1-9
cooling water IN, 1-10
cooling water OUT, 1-10
Cryopump electrical outlet, 1-10
description, 1-8
elapsed time meter, 1-9
gas charge flared fitting, 1-9
helium pressure gauge, 1-10
power inlet, 1-10
power ON indicator, 1-9
return gas coupling, 1-10
supply gas coupling, 1-11
system circuit breaker, 1-9
Compressor
description, 1-1
installing, 3-1
operation, 4-2
schematic, D-4
Compressor remote connector, 1-11
Control circuit breaker, 1-9
Cooling water IN, 1-10
Cooling water OUT, 1-10
Cryopump electrical outlet, 1-10
E
Elapsed time meter, 1-9
Electrical
connecting, 3-4
F
Flow diagram, B-1
©2007 Helix Technology Corporation
Index
G
Gas charged
flared fitting, 1-9
H
Helium
adding, 5-6
refrigeration system, 1-1
Helium circuit components
replacing, 4-3
Helium flex lines
connecting/disconnecting, 3-7
Helium pressure
increasing, 5-6
reducing, 5-5
system, adjusting, 4-1
Helium pressure gauge, 1-10
Helium pressure, system
adjusting, 5-5
M
Maintenance, 5-1–5-7
Multiple Cryo-Torr connections, 1-13
Multiple Cryo-Torr pumps
connecting, 3-14
Multiple
connections, 1-12
Multiple On-Board Cryopumps
connecting, 3-11
O
OFF condition helium system pressure
verifying, 4-1
P
Phase checks
performing, 3-6
Power inlet, 1-10
Power ON indicator, 1-9
Pub. No. 8040437, Rev. 104, 06/12/2007
H ELIX
On-Board Cryopump
ECO No. 18068 Index-1