MKS Granville-Phillips 358 series Manuals

MKS Granville-Phillips 358 series Manuals

Manuals and User Guides for MKS Granville-Phillips 358 series. We have 1 MKS Granville-Phillips 358 series manual available for free PDF download: Instruction Manual

MKS Granville-Phillips 358 series Instruction Manual

MKS Granville-Phillips 358 series Instruction Manual (122 pages)

Micro-Ion Vacuum Gauge Controller

Brand: MKS | Category: Controller | Size: 3 MB

Table of Contents

Table of Contents
6
Chapter 4 Installation

49
- Gauge Installation Tips
  49
- FCC and EU Installation Requirements
  49
- Cable Installation
  50
- Environmental Conditions
  50
- Controller Installation
  50
- Mounting Configurations
  51
- Line Voltage
  53
- Fuse Replacement
  53
- Vacuum Gauge Installation
  53
- Mounting Options
  54
- Grounding the System
  55
- Connecting Analog Outputs
  59
- Connecting a Capacitance Manometer
  60
- Connecting Process Control Relays
  63
- Connecting the RS-232 Computer Interface Handshake Lines
  65
- Connecting RS-485 Computer Interface
  66
Chapter 5 Preparing for Operation

67
- Preparing for Pressure Measurement
  67
- Alternate ON/OFF Gauge Control
  68
- Micro-Ion Gauge Remote Input/Output
  68
- Micro-Ion Analog Output Signal
  69
- Preparing for Convectron Gauge Operation
  71
- Gases Other than Nitrogen or Air
  71
- Micro-Ion Gauge Auto ON/OFF
  80
- Filament Auto on
  80
- Gauge Zero and Atmospheric Pressure Adjustment
  81
- Convectron Gauge Analog Output Signal
  82
- Preparing for Capacitance Manometer Operation
  84
- Preparing for Process Control Operation
  85
- Preparing to Use RS-232 Computer Interface
  87
- RS-232 Error Messages
  90
- Preparing to Use RS-485 Computer Interface
  90
- Error Messages
  93
- Operation
  95
- Controller Operation
  95
- Micro-Ion Gauge ON/OFF
  97
- Degas ON/OFF
  97
- Special Considerations for Use below
  98
- Torr
  98
- Gauge Electrometer Operation
  98
- Filament Selection for Electrometer Module
  100
- Theory of Operation
  101
- Micro-Ion Gauge Theory of Operation
  101
- Convectron Gauge Theory of Operation
  102
- Microcontrollers and Bus Structure
  103
- Capacitance Manometer Theory of Operation
  103
- Process Control Theory of Operation
  103
- Service
  105
- Service Guidelines
  105
- Customer Service
  105
- Damage Requiring Service
  106
- Returning a Damaged Product
  106
- Troubleshooting
  107
- Overpressure Shutdown
  109
- Troubleshooting the Convectron Gauge Module
  110
- Capacitance Manometer Troubleshooting
  112
- Process Control Troubleshooting
  112
- Troubleshooting
  113
- Troubleshooting
  114
- Field Installation of a Module
  115

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