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- Page 1 Installation and Operation Manual X -TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 ® Brooks 48xx Series 4850 Mass Flow Controller 4860 Mass Flow Meter Model 4850/4860 with Model 4850/4860 with Compression Fittings Local Operator Interface...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X -TMF-4800-MFC-eng Part Number:541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Contents Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG Brooks ® 48xx Series October, 2017 Paragraph Page Number Number Section 1 Introduction How to Use This Manual ......................1-1 Description ..........................1-1 Specifications ..........................1-1 Specifications for Local Operator Interface (LOI) ............... 1-6 Section 2 Installation General ............................ - Page 6 Page Number Number Dimensions for Model 4850/4860 with Standard Process Connections ........1-4 Dimensions for Model 4850/4860 with Downport Connections ..........1-4 Dimensions for the 48xx Series Local Operator Interface (LOI) ..........1-6 Gas Flow Across the MEMS Sensor ..................3-1 Bench Troubleshooting Circuit ....................
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Page 7: Section 1 Introduction
This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks Model 4850 mass flow controller(MFC) and 4860 mass flow meter (MFM). 1-3 Specifications for Meter/Controller WARNING Do not operate on gases other than those listed in this specification. - Page 8 Enclosure: ABS plastic with CU-Ni plating RoHS RoHS RoHS RoHS RoHS Fully RoHS compliant per EU Directive 2011/65/EU. Outline Dimensions Outline Dimensions Outline Dimensions Outline Dimensions Outline Dimensions Refer to Figure 1-3 Refer to Brooks document X-SE-4800-LOI-eng for complete instructions.
- Page 9 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 These certifications cover the 48xx Series thermal mass flow devices as well as the Local Operator Interface (LOI). Applicable Mark Agency Certification/ Marking/ Directive...
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Page 10: Dimensions For Model 4850/4860 With Standard Process Connections
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 Figure 1-1 Dimensions for Model 4850/4860 with Standard Process Connections Figure 1-2 Dimensions for Model 4850/4860 with Downport Connections... -
Page 11: Dimensions For The 48Xx Series Local Operator Interface (Loi)
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 Figure 1-3 Dimensions for the 48xx Series Local Operator Interface (LOI) Table 1-2 15-Pin D-Sub Connector Pin-out PIN # 4800 Series 5850TR S – SERIES (58xxS) - Page 12 Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 13: Section 2 Installation
If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters... -
Page 14: Return Shipment
Number (RMA #) and complete a Decontamination Statement to accompany it: BrooksInstrument.com/Service. All instruments returned to Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument. -
Page 15: Mechanical Connections
40 microns be installed upstream from the device. Recommended installation procedures: a. The Brooks MFC or MFM should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Install in such a manner that permits easy removal if the instrument requires servicing. -
Page 16: Electrical Connections
(LOI). When the LOI is used the setpoint signal is provided by the LOI. The Brooks electrical interface is designed to facilitate low-loss, quiet signal connections. Separate returns (commons) are supplied for the analog setpoint, analog flow signal, and the power supply. These commons... -
Page 17: Operation Check Procedure
Refer to Table 1-1 for pin connections Local Operator Interface (LOI) Versions For description and specifications for the local operator interface refer to Section 1-4 in this manual and the Brooks document X-SE-4800-LOI-eng 2-9 Operation Check Procedure a. Mount the MFC/MFM in its final orientation. - Page 18 Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 h. Check the analog output signal. The output signal should match the setpoint signal in accordance with the accuracy specifications provided in Section 1 of this document.
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Page 19: Section 3 Operation
Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 3-1 Operating Procedure After the MFC/MFM has been properly installed in the process, it is ready for operation. When initiating flow, slowly open the valve to avoid a flow surge. -
Page 20: Features
Not all features are available on all instruments. The Brooks 48xx Series device is a full-featured digital MFC. The device performs much like a traditional analog MFC, but with improved step response and valve control. - Page 21 +5 Vdc (>4.8 V), the valve will be forced to its open state. The valve override function can also be accessed via RS232. An optional software tool for ease of RS232 connection is available on the Brooks Instrument website. See Section 3, PC-based Support Tools for instructions on how to access this software.
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Page 22: Pc-Based Support Tools
3-5 PC-Based Support Tools A basic PC-based service tool for re-zeroing, gas selection, valve override and monitoring of the 48xx Series instruments is available on the Brooks Instrument website. To access this software, type in the following link into a web browser: www.brooksinstrument.com/products/accessories-software/... -
Page 23: Section 4 Maintenance And Troubleshooting
Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 4-1 Overview No routine maintenance is required on the 48xx Series devices. However, if an in-line filter is used, the filtering elements should be periodically replaced. - Page 24 Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 CAUTION This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during the removal, installation, or other handling of internal circuit boards or devices.
- Page 25 CO under 10 bar (150 psig). Most other Brooks mass flow controllers are capable of operating at much higher pressures. This is why Brooks typically specifies Buna for CO Q: Does the 48xx device have a low flow setpoint cut off? A: Yes.
- Page 26 Bench Troubleshooting 1. Establish a proper connection between the Brooks 48xx Series Mass Flow Meter or Controller (using Figure 4-1 as a reference). Switch on the power and allow the instrument to warm-up for 15 minutes. In case of a Controller model, adjust the Setpoint to zero.
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Page 27: Calibration Procedure
October, 2017 Figure 4-1 Bench Troubleshooting Circuit 4-2-4 Calibration Procedure The calibration of Brooks 48xx Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment. To re-calibrate a device contact the Brooks factory. - Page 28 Section 4 Maintenance and Troubleshooting Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 29: Section A Essential Instructions
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG October, 2017 ® Brooks 48xx Series Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). - Page 30 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 31 Om kvalitet af signalkabler, kabeltilslutninger og koblinger: Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj.
- Page 32 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 33 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 34 PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. Käyttöoppaassa kuvatut tuotteet ovat 2014/34/EU EU-direktiivin mukaisia. Kaikki Brooks Instrumentin virtausmittarit kuuluvat ryhmään 1. Laitteet, jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien mukaisia.
- Page 35 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 36 Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP). Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden.
- Page 37 Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG October, 2017 ® Brooks 48xx Series Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED.
- Page 38 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 39 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 40 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 41 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 42 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 43 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 44 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei.
- Page 45 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 46 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 47 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 48 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 49 Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG ® Brooks 48xx Series October, 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 50 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.