Brooks SLA5850 Installation And Operation Manual
Mass flow controllers models mass flow meters
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Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
June, 2009
®
Brooks
SLA5850, SLA5851, SLA5853
Mass Flow Controllers Models
and Models SLA5860, SLA5861, SLA5863
Mass Flow Meters
Model SLA5853S
Analog I/O MFC
with RS-485
Model SLA5850D
Digital I/O
TM
DeviceNet
MFC
with Coplanar Valve
Brooks
Model SLA5850S
Analog I/O MFC
with RS-485
Elastomer Downport
®
Digital MFC's & MFM's
Model SLA5850F
Digital I/O
F
Fieldbus MFC
OUNDATION
with Coplanar Valve
Model SLA5850S
Analog I/O MFC
with RS-485
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Summary of Contents for Brooks SLA5850
- Page 1 Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's June, 2009 ® Brooks SLA5850, SLA5851, SLA5853 Mass Flow Controllers Models and Models SLA5860, SLA5861, SLA5863 Mass Flow Meters Model SLA5850D Model SLA5850F Digital I/O Digital I/O DeviceNet...
- Page 2 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
- Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's June, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Contents Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's June, 2009 Paragraph Page Number Number Section 1 Introduction Scope ............................1-1 Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-2 Section 2 Installation General ............................2-1 Receipt of Equipment ......................... -
Page 6: Table Of Contents
Number Open Collector Alarm Output..................... 1-6 General Wiring ........................... 1-6 Response Performance of Brooks Digital MFC ................. 1-7 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5% Per Second Setpoint Change .................... 1-7 Model SLA5850D Digital I/O DeviceNet MFC ................1-11 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Connections .... -
Page 7: Scope
The SLA5800 Series covers an extremely broad range of flowrates. Model SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 50:1, accurate gas flow can be measured or controlled down to 0.06 ccm! Model SLA5853 can meter or control gas flow up to 2500 lpm. -
Page 8: Specifications
1-4 Specifications PERFORMANCE CHARACTERISTICS: Flow Ranges Models SLA5850/SLA5860 - Any FS range from 0-3 ccm to 0-30 lpm (N eq.) Up to 0-50 lpm (N eq.) with the Coplanar Valve option Models SLA5851/SLA5861 - Any FS range from 20-100 lpm (N eq.) -
Page 9: Section 1 Introduction
(3) 70 bar / 1000 psi for UL Certification. (4) 50 lpm with Coplanar valve option Pressure Differential Range (Controllers) Minimum: model SLA5850 5 psi (0.35 bar) up to 30 lpm (N eq.) Model SLA5851 10 psi (0.69 bar) from 30 lpm to 100 lpm (N eq.) - Page 10 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's June, 2009 Materials of Construction ® Wetted parts - stainless steel with Viton fluoroelastomers Optional: Buna-N, Kalrez ® , Teflon ® /Kalrez and EPDM...
- Page 11 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's June, 2009 Current Setpoint Input Specifications Nominal Range: 4 - 20 mA or 0 - 20 mA Full Range: 0 - 22 mA Absolute Max.:...
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Page 12: General Wiring
Brooks devices also feature adaptive (optimized) PID control, including fast response. and linear ramp-up and/or ramp-down control characteristics. Calibration Curve Selection (Analog I/O versions only) Select one of ten gases and select PID tuning settings in analog mode. -
Page 13: Response Performance Of Brooks Digital Mfc
Traditional soft start or linear ramp-up and/or ramp-down (See Figure 1-4) can be factory selected or are available via the Brooks Service Suite Linear ramp-up is adjustable at 200% per second down to 0.5% per second setpoint change. -
Page 14: Calibration Select Signal
Refer to Table 1-3 (Analog I/O pin connections), that enables the device to communicate via a personal computer for process control. Baud rate selections for the Brooks Digital Series related to RS-485 are: 1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via the Brooks service Suite The RS-485 is essentially a multidrop connection. -
Page 15: Flow Totalizer
Digital MFC's & MFM's June, 2009 DeviceNet Communications The Brooks SLAMf Digital Series is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a... -
Page 16: Pc-Based Support Tools
See Table 1-1 for further pressure information PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. SmartDDE may be used with any unit supporting RS-485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. -
Page 17: Model Sla5850D Digital I/O Devicenet Mfc
Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's June, 2009 Figure 1-5 Model SLA5850D Digital I/O DeviceNet MFC Figure 1-6 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Connections 1-11... - Page 18 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's June, 2009 Figure 1-7 Model SLA5850F Digital I/O F Fieldbus MFC with Coplanar Valve OUNDATION Figure 1-8 Model SLA5851D Digital I/O DeviceNet MFC...
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Page 19: Model Sla5853 Analog I/O Mfc With Flanged Connections
Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's June, 2009 Figure 1-9 Model SLA5853F Digital I/O F Fieldbus MFC OUNDATION Figure 1-10 Model SLA5853S Analog I/O MFC with Flanged Connections 1-13... -
Page 20: Model Sla5860S Analog I/O Mfm With Rs-485
Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG ® Brooks Digital MFC's & MFM's June, 2009 Figure 1-11 Model SLA5860S Analog I/O MFM with RS-485 Figure 1-12 Model SLA5861F Digital I/O F Fieldbus MFM OUNDATION 1-14... - Page 21 Section 1 Introduction Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG Brooks ® Digital MFC's & MFM's June, 2009 Figure 1-13 Model SLA5863D Digital I/O Devicenet MFM 1-15...
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