Section 3-Operation; Introduction - Keithley 595 Instruction Manual

SECTION 3
OPERATION
3.1 INTRODUCTION
Packaged capacitors should also be measured in a shielded
metal box and are connected as ikstmted in Figure 3-1B.
Detailed front panel operation of the Model 595 is desaibed
in this section, including test connections and complete
front and rear panel descriptions in the f&t half (Part l),
and how to make Cv, IV and Q/t-V plots is described in
the second half (Part 2). Many of these operations can also
Fo,p'qugrammed mer the IEEE&B bus, as desaibed in Sec-
A. MEASUREMENT SETUP FOR DEVICE ON A
SENICDNDUCTDR WAFER.
CONNECTORS
PART 1
Front and Rear Panel Descriptions
3.2 TEST CONNECTIONS
The following paragraphs will describe how to set up
typical capacitance and current measurements with the
Model 595. Connections can be made with the supplied
Model 4801 cables; in addition, other low noise, coaxial
BNC cables may be used with the Model 595. In any con-
nection to this inshurnent, it is advisable to use the shortest
cables practical for the particular test setup. In situations
where vibration may be present (such as a vacuum pump),
tape the cables to a stable object to avoid excessive vibra-
tion and electrical noise. Note: see warnings in paragraph
2.5
before operating instrument.
SEMICONDUCTOR'
L CHUCK t OR PEDESTAL )
WAFER
8. MEASUREMENT SETUP FOR CAPACITOR
IN TEST BOX.
VOLTAGE
%E
ENC CONNECTORS
METAL TEST BOX
( TEFLON. KEL-F)
3.2.1 Capacitance Connections
C. MEASUREMENT SETUP FOR CAPACITOR AND
Many applications of the Model 595 will involve using the
EXTERNAL VOLTAGE SOURCE
instrument to determine capacitance of devices on semicon-
ductor wafers. A variety of probe station setups are
available; the preciseconfiguration of such a station is up
to the user, depending on his needs and equipment
available to him. However, most of these setups wiU use
connections similar to those illustrated in Figure 34.A with
the test fixture completely enclosed in a light-tight metal
L-----t
box for electrical shielding. The metal box should be~<qp-
L
netted to GUARD. Note that the Model 595 VOLTAGE
SOURCE OUllWT is connected to the substrate (to
Figure 3-l. Capacitance Measurement Connections
minimize the effects of stray capacitance and noise); and
the INPUT is attached to the probe.
3-l