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MKS Manuals
Control Unit
253B-1-40-1
Instruction manual
MKS 253B-1-40-1 Instruction Manual
253b series throttling valve
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Contents
Table of Contents
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Table of Contents
English
Table of Contents
Valve Safety Information
Symbols Used in this Instruction Manual
Symbols Found on the Unit
Table 1: Definition of Symbols Found on the Unit
Safety Procedures and Precautions
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
Tableau 3: Définition des Symboles Apparaissant Sur L'unité
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
Chapter One: General Information
Introduction
How this Manual Is Organized
Customer Support
Chapter Two: Installation
How to Unpack the Type 253 Unit
Unpacking Checklist
Interface Cables
System Interface Cables
Table 5: System Interface Cables
Generic Shielded Cables
Setup
Flanges
Dimensions
Figure 1: Type 253 Valve with an ASA Flange
Figure 2: Type 253 Valve with a KF Style ISO Flange
Figure 3: Type 253 Valve with a NW Style ISO Flange
Figure 4: Type 253 Valve with a CF Flange
Figure 5: Type 253 Valve with a JIS Flange
O-Ring Material
Mounting Instructions
Connectors
Labels
Pump Label
Serial Number Label
Figure 6: Pump Label
Figure 7: Serial Number Label
Chapter Three: Operation and Theory of Operation
Operation
Theory of Operation
Chapter Four: Maintenance
General Information
Maintenance
How to Clean the Unit
Appendix A: Product Specifications
Valve Specifications
ASA Flange Specifications
KF Style ISO Flange Specifications
NW Style ISO Flange Specifications
CF Flange Specifications
JIS Flange Specifications
Appendix B: Model Code Explanation
Model Code
Index
German
Sicherheitshinweise für das Ventil
In dieser Betriebsanleitung Vorkommende Symbole
Erklärung der am Gerät Angebrachten Symbole
Sicherheitsvorschriften und Vorsichtsmaßnahmen
French
Informations Relatives À la Sécurité Pour la Valve
Symboles Utilisés Dans Ce Manuel D'utilisation
Symboles Apparaissant Sur L'unité
Mesures de Sécurité Et Précautions
Spanish
Medidas de Seguridad de la Válvula
Símbolos Usados en Este Manual de Instrucciones
Símbolos Hallados en la Unidad
Procedimientos y Precauciones de Seguridad
15-Pin Type "D" Connector
Table 6: 15-Pin Type "D" Connector Pinout
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Interface Cables
Download this manual
118843-P1
Rev C, 2/99
Instruction Manual
MKS Type 253B
Throttling Valve
Six Shattuck Road
Fax: (978) 975-0093
Andover, MA 01810-2449
E-mail: mks@mksinst.com
(800) 227-8766 or (978) 975-2350
Web site: http://www.mksinst.com
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