Related Manuals for MKS HPS Square Body LoPro Series
Summary of Contents for MKS HPS Square Body LoPro Series
- Page 1 ® Square Body LoPro Series Bellows Sealed Poppet Valves OPERATION AND MAINTENANCE MANUAL...
- Page 3 ® Square Body LoPro Series Bellows sealed Poppet Valves May 1999 PART #100010482 ® Square Body LoPro Series...
- Page 4 303-449-9861 800-345-1967 FAX: 303-442-6880 © 1999 by Vacuum Products Group of MKS Instruments, Inc. All rights reserved. ALCONOX is a registered trademark of Alconox, Inc. IgniTorr is a trademark of HPS Division of MKS Instruments, Inc. Inconel is a registered trademark of Inco Alloys International, Inc.
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Page 5: Table Of Contents
Table of Contents Table of Contents 1. Package Contents..............1 1.1 IN THIS MANUAL................1 1.2 Symbols Used in this Manual .............. 1 2. Safety Precautions ..............2 Modification ....................2 Maintenance ..................... 2 Hazardous Materials ................. 2 Installation ....................2 Operation .................... - Page 6 7.3 Actuator Assembly - Manual Version ..........23 7.3.1 Actuator Assembly Removal and Disassembly ..........23 7.3.2 O-Ring Replacement .................... 24 7.3.3 Actuator Assembly Installation ................24 7.4 Limit Switches - Pneumatic Actuation Only ........25 7.4.1 Limit Switch Removal .................... 25 7.4.2 Limit Switch Installation ..................
- Page 7 7. SERVICE ................22 7.1 Removal from System ..............22 7.1.1 Pneumatic Version ..................22 7.1.2 Manual Version ................... 22 7.2 Actuator Assembly – Pneumatic Version .......... 23 7.2.1 Actuator Assembly Removal and Disassembly ........23 7.2.2 O-Ring Replacement ................. 23 7.2.3 Actuator Assembly Installation ..............
- Page 8 8.3.15 Inadequate air pressure – Pneumatic Actuation Only ......37 8.3.16 Inadequate air flow – Pneumatic Actuation Only ........37 8.3.17 Limit switch failure – Pneumatic Actuation Only ........37 8.3.18 Solenoid valve failure – Pneumatic Actuation Only ........ 37 8.3.19 Stem Weld Failure ..................
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Page 9: Package Contents
If it has been damaged, notify the carrier immediately. Keep all shipping materials and packaging for claim verification. Do not return the Product to HPS ® MKS Instruments, Inc. Telephone (303) 449-9861 Vacuum Products Group Toll-Free (800) 345-1967 (USA only) 5330 Sterling Dr. -
Page 10: Safety Precautions
2. Safety Precautions Modification Unauthorized modification of the product voids the warranty and ® may affect its operation. Contact HPS Applications Engineering Department for more information on customizing your valve. Maintenance ® Install only HPS replacement parts or their equivalents following the procedures detailed in section 7. -
Page 11: Description Of Lopro Valves
3. Description of LoPro Valves ® Square Body LoPro valves are pneumatically or manually operated bellows sealed poppet valves, designed for compact size, lightweight, and long life. Internal actuation in the pneumatic version of the Square Body LoPro valve is controlled by a pneumatic cylinder attached directly to the top of the valve. - Page 12 Figure 1 Summarizes the options available for the Square Body LoPro Series. Figure 1 Square Body LoPro Valve Options LPV1- A K- CN V S- Square Body Low Profile Valve Series 25 = 25mm (1.0") nominal size 40 = 40mm (1.5") nominal size 50 = 50mm (2.0") nominal size A = Angle body I = Concentric in line body...
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Page 13: Operating Principles
4. Operating Principles 4.1 Pneumatic Version Actuator Cylinder 1 14 Flat Head Screw 15 Piston Seal Piston 2 O-Ring 11 13 Stem Seals 12 Rulon Bearing Bellows 4 3 Spring Spring Bushing 5 Nosepiece 7 Seat 8 10 Body 9 O- Ring Figure 2 - Pneumatic operation 4.1.1 Pneumatic Cycling Figure 2 illustrates the components of the pneumatic valve. - Page 14 When the pneumatic pressure in the cylinder reaches a value sufficient to overcome the force of the spring (3), the piston (2) starts to rise, pulling the nosepiece (7) off of the seat (8). The stem (6) is attached to the piston with a flat head screw (14).
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Page 15: Limit Switch Actuation
4.1.2 Limit Switch Actuation When a valve is equipped with limit switches, they are mounted on top of the cylinder as shown in Figure 3. When the valve is closed, the lever of the closed position switch (18) is depressed by the cam extension (17) on the top of the stem (6). -
Page 16: Solenoid Operated Pilot Valve Operation
4.1.3 Solenoid Operated Pilot Valve Operation Optional installation of a solenoid operated pneumatic pilot valve in the 1/8" female NPT port in the side of the cylinder (1), as shown in Figure 4, enables remote electrical control of the valve when direct pneumatic control is inconvenient. -
Page 17: Manual Version
4.2 Manual Version 4.2 Manual Version 4.2.1 Manual Cycling Figure 5 illustrates the components of the manual valve. From the closed position, the valve opens by twisting the manual knob counterclockwise, raising the manual screw in the manual stem guide thus lifting the nosepiece off of the seat. - Page 18 Figure 5 LPV! - 25 Manual Actuation Angle KF Manual Knob Manual Stem Guide Manual Screw Body Flange Bellows Flange Bellows Body Stem Thrust Bearing Nosepiece O - Ring Nosepiece ® Square Body LoPro Square Body LoPro Square Body LoPro Square Body LoPro Square Body LoPro Series...
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Page 19: Specifications
5. Specifications 5.1 Environment 5.1.1 Installation Orientation Square Body LoPro Series valves function equally well installed in any orientation. 5.1.2 Applied Forces As with any vacuum piping component, improper installation in the vacuum line may result in damage to the component. The strength of the Square LoPro body is roughly equivalent to an elbow of similar size. - Page 20 heat from/to the valve’s pneumatic actuator assembly to/from the body and the nosepiece of the valve is relatively inefficient, the nosepiece o-ring may be subjected to significantly higher/lower temperatures without affecting the pneumatic seals. However, to avoid pneumatic seal damage, the cylinder temperature should be monitored in the presence of sustained extreme system or ambient temperatures.
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Page 21: Operation & Performance
5.2 Operation & Performance 5.2.1 Cycle Rate and Life 5.2.1.1 Pneumatic Actuation The opening and closing times are the limiting factors of the maximum cycle rate. If the valve is cycled faster than the sum of the opening and closing time, it will fail to open or close completely, possibly resulting in failure. -
Page 22: Pneumatic Pressure Limits - Pneumatic Actuation Only
NW25 43 psia (3.0 x 10 Nt/m abs) NW40 60 psia (4.1 x 10 Nt/m abs) NW50 38 psia (2.6 x 10 Nt/m abs) Higher pressures could cause bonnet seal extrusion, collapse of the bellows or rupture of the valve body. 5.2.3 Pneumatic Pressure Limits - Pneumatic Actuation Only The dynamic seals used in the Square Body LoPro are rated for use at... -
Page 23: Dimensions
5.3 Dimensions 5.3.1 Dimensions – Manual Actuation Figure 6 – Manual In-line valve dimensions Manual In-line Square Body LoPro Figure 6 dimensions: LPV1-25-AC- 2.02 3.34 0.60 2.27 2.00 LPV1-25-AK- 1.97 3.34 0.60 2.27 2.00 LPV1-25-AT- 1.88 3.34 0.60 2.27 2.00 LPV1-40-AC- 2.43 3.73... - Page 24 Figure 7 – Manual Angle valve dimensions Manual Angle Square Body LoPro Figure 7 dimensions: LPV1-25-IC- 4.62 4.50 0.42 LPV1-25-IK- 3.94 4.50 0.42 LPV1-25-IT- 4.35 4.50 0.42 LPV1-40-IC- 5.19 5.20 0.50 LPV1-40-IK- 5.12 5.20 0.50 LPV1-40-IT- 4.83 5.20 0.50 LPV1-50-IC- 7.59 6.20 0.85...
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Page 25: Dimensions - Pneumatic Actuation
5.3.2 Dimensions – Pneumatic Actuation Figure 8 - Pneumatic In-line Square Body LoPro Pneumatic In-line Square Body LoPro Figure 8 dimensions LPV1-25-AC- 2.02 3.62 2.24 3.13 2.00 LPV1-25-AK- 1.97 3.62 2.24 3.13 2.00 LPV1-25-AT- 1.88 3.62 2.24 3.13 2.00 LPV1-40-AC- 2.43 3.88 2.75... - Page 26 Figure 9 - Pneumatic Angle Square Body LoPro Pneumatic Angle Square Body LoPro Figure 9 dimensions: LPV1-25-IC- 4.62 4.65 LPV1-25-IK- 3.94 4.65 LPV1-25-IT- 4.35 4.65 LPV1-40-IC- 5.19 5.34 LPV1-40-IK- 5.12 5.34 LPV1-40-IT- 4.83 5.34 LPV1-50-IC- 7.59 6.80 LPV1-50-IK- 7.00 6.80 LPV1-50-IT- 7.20 6.80...
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Page 27: Weight
5.3.3 Weight Measurements of weight for Square Body LoPro valves and their options are as follows: NW25 Manual LoPro valve 1.6 lb NW40 Manual LoPro valve 2.8 lb NW50 Manual LoPro valve 4.8 lb NW25 Pneumatic LoPro valve 1.6 lb NW40 Pneumatic LoPro valve 3.0 lb NW50 Pneumatic LoPro valve... -
Page 28: Installation Information
6. Installation Information 6.1 Pneumatic Supply– Pneumatic Actuation Only Facility pneumatic supplies often contain contamination including rust, metal particles, oil, and water. A simple in-line filter in series with the supply for each valve or the supply for an entire system may remove particle ®... -
Page 29: Clean Installation
6.3 Clean Installation Valves are shipped with plastic covers over the ports. These covers should be left in place until the valve is installed. All Square Body LoPro valves are cleaned at the factory for direct installation and high vacuum service. Normal clean assembly techniques should be practiced, as the presence of airborne particles on the nosepiece seal (9 in Figure 2), the seat (8), or on the sealing surfaces of the port flanges may result in leakage. -
Page 30: Service
7. SERVICE 7.1 Removal from System Prior to removing the entire valve or a valve’s actuator assembly from a vacuum system, it is necessary to bring the system up to atmospheric pressure. Purge and vent hazardous gasses appropriately. 7.1.1 Pneumatic Version Detach the pneumatic supply. -
Page 31: Actuator Assembly - Pneumatic Version
7.2 Actuator Assembly – Pneumatic Version 7.2.1 Actuator Assembly Removal and Disassembly The following procedure does not require removal of the valve body from the system. However, several aspects of the procedure are more easily performed if the entire valve is removed. Read section 7.1.1 prior to removing the entire valve or a valve’s actuator assembly from a vacuum system. -
Page 32: Actuator Assembly - Manual Version
7.2.3 Actuator Assembly Installation Insert the actuator assembly into the valve body. As with removal, take care to avoid damaging the bellows. Be sure that the bonnet o-ring is in place. The bellows flange is appropriately tapered to aid in retaining the o-ring in the proper position during assembly. -
Page 33: O-Ring Replacement
7.3.2 O-Ring Replacement The bonnet o-rings may easily be removed without special fixture. With a little stretch, the bonnet o-ring clears the bellows and drops off of the actuator assembly. Removal of the nosepiece o-ring usually requires a thin tool to pry it out of its trapezoidal groove. -
Page 34: Limit Switches - Pneumatic Actuation Only
7.4 Limit Switches – Pneumatic Actuation Only 7.4.1 Limit Switch Removal Be sure to disconnect all power prior to working on or adjusting the limit switches. This first step applies to NW25 LoPro valves only; for larger valves, proceed to the next paragraph. Loosen and remove the two 6-32 pan head screws with star washers on the top of the limit switch housing. -
Page 35: Solenoid Pilot Valve Service - Pneumatic Actuation Only
the limit switch assembly as described in section 7.4.2, make electrical connections as discussed in section 6.2, and adjust the switches as detailed in section 7.4.4 7.4.4 Limit Switch Adjustment An ohmmeter and pneumatic supply are required for limit switch adjustment. - Page 36 The coil is the only replaceable component of the solenoid pilot valve. After removing the jam nut, the coil slips off of the housing of the valve. Install the new coil and tighten the jam nut. Orientation of the coil wires has no affect on the function of the valve.
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Page 37: Replacement Parts List
7.6 Replacement Parts List NW25 LoPro valves Manual actuation internals..100010128 Actuator with no seals..100010104 Buna-N seal kit....100002215 Kalrez seal kit....100002218 Silicone seal kit....100002221 Viton seal kit.....100002224 Chemraz seal kit……………100009145 limit switch kit ......100002227 NW40 LoPro valves Manual actuation internals...100010129 Actuator with no seals..…100010103 Buna-N seal kit....100002216 Kalrez seal kit....100002219... -
Page 38: Trouble Shooting
8. Trouble Shooting The following sections outline diagnosis of possible problems encountered when using HPS ® Square Body LoPro Series valves and detail possible causes and their remedies. 8.1 Problems and Diagnosis Pneumatic Actuation 8.1.1 Won’t close completely High magnitude leakage across the nosepiece seal when the valve is supposedly closed is evidence for failure to close completely. -
Page 39: Won't Open At All
specifications. Movement in jumps, called slip sticking, can be observed through the same hole. The vibration caused by slip stick jumps can often be felt manually and sometimes heard. First, see section 8.3.15 on inadequate air pressure. If pneumatic pressure is within recommended limits, refer to section 8.3.16 covering inadequate airflow. -
Page 40: Leaks From Atmosphere When Open
8.1.8 Leaks from atmosphere when open If leakage is detected from atmosphere when the valve is open, see section 8.3.5 on bellows failure. 8.1.9 Leaks from atmosphere at all times If leakage is detected from atmosphere at all times, see section 8.3.5 on bellows failure. -
Page 41: Problems And Diagnosis Manual Actuation
8.2 Problems and Diagnosis Manual Actuation 8.2.1 Won’t close completely High magnitude leakage across the nosepiece seal when the valve is supposedly closed is evidence for failure to close completely. In valves that have visual access to one or both of the ports, a gap between the nosepiece and the seat might be observed. -
Page 42: Leaks From Atmosphere When Open
8.2.6 Leaks from atmosphere when open If leakage is detected from atmosphere when the valve is open, see section 8.3.5 on bellows failure. 8.2.7 Leaks from atmosphere at all times If leakage is detected from atmosphere at all times, see section 8.3.5 on bellows failure. -
Page 43: Particulates, Condensation, And Corrosion
8.3.4 Particulates, condensation, and corrosion In normal use, airborne particulates, process condensation, and/or corrosion, may effect seal integrity. Particulates might be moved by simple turbulent gas flow. However, condensed or sublimated films nearly always require further cleaning. Additionally, corroded sealing surfaces may be irreparable. -
Page 44: Stem Seal Failure - Pneumatic Actuation Only
8.3.9 Stem seal failure – Pneumatic Actuation Only The seals used on pneumatic stems are normally good for much more than cycles. However, an occasional defect in the material, in the seal’s installation, or inadequate lubrication could cause a bit of the edge of this seal to break off, resulting in a pneumatic leak. -
Page 45: Inadequate Air Pressure - Pneumatic Actuation Only
piston cover and apply a film of a high quality lubricant for elastomer/metal interfaces, such as Fomblin VAC 3 , to the inside of the cylinder. Cycle the valve several times and reapply the grease. Manual Actuation Normally the Square Body LoPro’s dynamic components require very little lubrication. -
Page 46: Stem Weld Failure
Dirt or other contamination from the pneumatic supply can inhibit the movement of the plunger and cause the valve to leak. Sometimes this problem manifests itself in an oscillation of the plunger, resulting in readily audible buzz. The best remedy is to replace the entire solenoid valve. Installation of a filter in the pneumatic line upstream from the valve can prolong the life of the valve. -
Page 47: Return To Factory For Repair Or Service
9.1 Call the factory ® The HPS Customer Service Department or any MKS Service Center will prepare a Returned Material Report (RMR). Consequently, when the item is received, disposition will occur in a timely manner. The customer service person will need information on the following: >... -
Page 48: Product Warranty
III. This warranty gives PURCHASER specific legal rights, and PURCHASER may also have other rights which vary from state to state. IV. For HPS products sold outside of the U.S., contact your MKS representative for warranty ® information and service. - Page 49 10.1 WHAT IS NOT COVERED The above warranties do not apply to the following: > Damages or malfunctions due to failure to provide reasonable and ® necessary maintenance in accordance with HPS operating instructions. > Damages or malfunctions due to chemical or electrolytic influences, or use of the product in working environments outside the specifications.
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Page 50: Notes
11. Notes ® Square Body LoPro Square Body LoPro Square Body LoPro Square Body LoPro Square Body LoPro Series Series Series Series Series...
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