Related Manuals for MKS 253B-20-40-1
Summarization of Contents
Warranty
Type 253B Equipment Warranty Details
Details warranty information for the MKS Type 253B equipment, including coverage periods and exclusions.
Valve Safety Information
Symbols in Instruction Manual
Defines WARNING, CAUTION, and NOTE messages used throughout the manual for safety communication.
Symbols Found on the Unit
Describes symbols present on the unit, referencing IEC standards for clear identification of hazards and functions.
Safety Procedures and Precautions
Safety Warnings and Personnel Requirements
Covers warnings about moving parts, unauthorized modifications, service by qualified personnel, and handling hazardous materials.
Operational and Environmental Safety
Details rules for operating in hazardous environments, correct fittings, pressure limits, and preventing contamination and explosions.
Chapter One: General Information
Introduction to the 253B Valve
Introduces the MKS Type 253B Exhaust Throttle Valve, its purpose, function, and controller compatibility.
Manual Organization and Support
Describes the manual's structure and outlines customer support services for maintenance, repair, and technical assistance.
Chapter Two: Installation
Unpacking the Type 253 Unit
Provides instructions and a checklist for safely unpacking the Type 253 unit and checking for shipping damage.
Interface Cables and EMC Compliance
Discusses interface cable requirements and EMC Directive compliance for proper system connectivity and safety.
Guidelines for Generic Shielded Cables
Provides guidelines for manufacturing or selecting generic shielded cables, focusing on proper shielding and grounding for effectiveness.
Setup and Flange Types
Covers general setup procedures and lists the various available flange types for the 253 valve, aiding selection.
Dimensions (ASA Flange)
Provides detailed dimensional information and diagrams for the Type 253 Valve when equipped with an ASA Flange.
Dimensions (KF & NW ISO Flanges)
Provides dimensional information and diagrams for the Type 253 Valve when equipped with KF and NW Style ISO Flanges.
Dimensions (CF & JIS Flanges)
Provides dimensional information and diagrams for the Type 253 Valve when equipped with CF and JIS Flanges.
O-Ring Material and Mounting Instructions
Explains O-ring material compatibility with gases and provides mounting instructions with essential safety warnings.
Connectors and Pinout
Details the 15-pin Type 'D' connector used for valve control and outlines its pin assignments for proper connection.
Valve Labels Explained
Describes the Pump Label and Serial Number Label on the 253 valve, explaining their significance and location.
Chapter Three: Operation and Theory of Operation
Safe Operation of the 253 Valve
Provides essential instructions and precautions for operating the 253 valve safely, particularly when used with high vacuum diffusion pumps.
Chapter Four: Maintenance
Initial Checks and Maintenance Procedures
Covers initial checks for shipping damage, periodic maintenance for wear and damage, and cleaning procedures for the unit.
Appendix A: Product Specifications
General Valve Specifications
Lists CE Mark Compliance, Machinery Directive, and general valve specifications like materials, operating temperatures, and power input.
ASA Flange Specifications
Details physical dimensions, conductance, and performance data for various ASA flange types of the 253 valve.
ASA Flange Specifications (Continued)
Continues detailed specifications for larger ASA flange sizes, including dimensions, bolt hole patterns, and flange groove IDs.
KF Style ISO Flange Specifications
Provides specifications for KF Style ISO flanges, including dimensions, conductance, and leakage rates for different sizes.
NW Style ISO Flange Specifications
Details specifications for NW Style ISO flanges, covering various sizes, dimensions, bolt hole patterns, and parameters.
CF Flange Specifications
Lists specifications for CF flanges, including dimensions, leakage rates, and bolt hole details for various models.
CF Flange Specifications (Continued)
Continues specifications for CF flanges, detailing larger sizes, overall height, and their performance parameters.
JIS Flange Specifications
Presents specifications for JIS flanges, including dimensions, conductance values, and O-ring groove IDs.
Appendix B: Model Code Explanation
Model Code Overview
Explains how the various options for the valve are identified in the model code when ordering the unit.
ASA Flange Model Codes
Lists model numbers, nominal inside diameters, ASA flange sizes, and indicates the presence of a flapper O-ring.
KF & NW ISO Flange Model Codes
Details model numbers, diameters, ISO flange sizes, and O-ring presence for KF and NW ISO flanged valves.
CF Flange Model Codes
Lists model numbers, diameters, CF flange sizes, and O-ring presence for CF flanged valve models.
JIS Flange Model Codes
Presents model numbers, diameters, JIS flange sizes, and O-ring presence for JIS flanged valve models.
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