MKS T3B Series Supplement Manual
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MKS T3B Series Supplement Manual

With rs-232 interface
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MKS Type T3B and T3P Valves
With RS-232 Interface
Supplement
2 Tech Drive, Suite 201
Andover, MA 01810-2449
Main: 978.975.2350
134414-P1
www.mksinst.com
RS-232 Interface
Rev 00G

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Summary of Contents for MKS T3B Series

  • Page 1 MKS Type T3B and T3P Valves With RS-232 Interface Supplement 2 Tech Drive, Suite 201 Andover, MA 01810-2449 Main: 978.975.2350 134414-P1 www.mksinst.com RS-232 Interface Rev 00G...
  • Page 2 (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship. For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship without charge to the purchaser.
  • Page 3 MKS Type T3B and T3P Valves With RS-232 Interface Supplement...
  • Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America...

  • Page 5: Table Of Contents

    Table of Contents Valve Safety Information ..........................1 Symbols Used in This Instruction Manual ........................1 Symbols Found on the Unit............................1 Safety Procedures and Precautions..........................1 Sicherheitshinweise für das Ventil........................3 In dieser Betriebsanleitung vorkommende Symbole ..................... 3 Erklärung der am Gerät angebrachten Symbole ......................3 Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................
  • Page 6 List of Tables Table 1: Definition of Symbols Found on the Unit .................... 1 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole ................3 Tableau 3: Définition des symboles sur l’unité ....................5 Tabla 4: Definición de los símbolos hallados en la unidad ................7 Table 5: Message Syntax..........................

  • Page 7: Valve Safety Information

    Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these requirements.
  • Page 8 DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.

  • Page 9: Sicherheitshinweise Für Das Ventil

    Sicherheitshinweise für das Ventil Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
  • Page 10 Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.

  • Page 11: Informations De Sécurité Relatives Au Manomètre

    Informations de sécurité relatives au manomètre Informations de sécurité relatives au manomètre Symboles utilisés dans ce manuel d’utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L’indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l’attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d’accident pour le personnel, en cas d’exécution incorrecte ou de non-respect des consignes.
  • Page 12 Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la valve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.

  • Page 13: Medidas De Seguridad Del Manómetro

    Medidas de seguridad del manómetro Medidas de seguridad del manómetro Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.
  • Page 14 No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de servicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas de mantenimiento.

  • Page 15: Chapter One: Remote Rs-232 Operation

    Chapter One: Remote RS-232 Operation RS-232 Protocol Messages sent to the device from a remote computer are either: Commands that instruct the controller to perform a task or change an operating parameter, or Requests that prompt the controller to report information. The format of the commands sent to the device appears as: command value where:...

  • Page 16: Special Commands Supported (Version 01.04.00 And Newer)

    Table 5: Message Syntax Syntax Description Message that you must enter exactly as shown in the manual. Do not include any spaces in Bold the message string. Italics Placeholder that represents text or numeric values that you must supply. Response Format of a message sent from the device.
  • Page 17 The returned value ‘x’ is an ASCII character indicating the status of the last communication with the valve. It can have the following values: - Value Status Comment No error Command was recognized and executed. Unrecognized The command sent was not recognized and has been command discarded.

  • Page 18: Setup Messages

    Setup Messages The Setup messages configure the operating parameters for the unit. Table 6: RS-232 Setup Messages Description Command Request Response Stop Calibrating Valve Reset (power cycle) Learn the Valve Steps Select Valve Type JT value JT value: For T3B valves: For T3B valves: value: 0 = 20 mm Direct Fcup...
  • Page 19 Table 6: RS-232 Setup Messages (continued) Description Command Request Response Select Valve Type JT value (continued) JT value: (continued) For T3B valves (continued): value: 26 = 6” Direct Nonseal 27 = 6” Geared Fcup 28 = 6” Geared Nonseal 29 = 8” Direct Nonseal 30 = 8”...
  • Page 20 Table 6: RS-232 Setup Messages (continued) Description Command Request Response Backfill Limit Blvalue Blvalue BL95.0* value: pressure at which the feature turns off, in % of active setpoint Backfill Threshold MDvalue MD+value Pressure value: minimum difference value: minimum pressure between the new setpoint difference required to turn on the and the system pressure backfill feature (reported as a % of...
  • Page 21 Table 6: RS-232 Setup Messages (continued) Description Command Request Response Set Model Based ST letter-value: Parameters A = STA STA value STD value D = STD STE value E = STE STF value F = STF Sensor Signal Input G value G value Range value:...
  • Page 22 Table 6: RS-232 Setup Messages (continued) Description Command Request Response Sensor Range High EH value EH value value: 00 = 0.1 Torr 00 = 0.1 Torr value: 01 = 0.2 01 = 0.2 02 = 0.5 02 = 0.5 03 = 1 03 = 1 04 = 2 04 = 2...
  • Page 23 T3B series: 0 = 20 mm Direct Fcup 1 = 20 mm Direct Nonseal 2 = 20 mm Geared Fcup 3 = 20 mm Geared Nonseal 4 = 20 mm Geared O-ring 5 = 1” Direct Fcup 6 = 1”...
  • Page 24 0 = 20 mm Direct Fcup 1 = 20 mm Direct Nonseal 2 = 20 mm Geared Fcup 3 = 20 mm Geared Nonseal 4 = 20 mm Geared O-ring 5 = 1” Direct Fcup 6 = 1” Direct Nonseal 7 = 1”...
  • Page 25 Learn the Valve Caution The procedure for learning the valve involves cycling the valve from the open to the closed position. Be certain that the system can withstand valve cycling before proceeding. This test can be performed prior to installing the device and the valve in your system. Entering the [J] command to learn a valve calibrates the valve.
  • Page 26 The controller responds with the message [F value], where: value: 00 = Torr (initial) 01 = mTorr 02 = mBar 03 = µBar 04 = kPa 05 = Pa 06 = cm H 07 = in H If the pressure units are Torr, an example response is: F 00 To change the units to mTorr, enter: F 01...
  • Page 27 To report the value of the backfill limit, enter: The Controller responds with the message [BLvalue], where: value is a percentage of the new setpoint, from 0 to 100% Setting the Backfill Threshold Pressure Value This value is the required difference between the new setpoint and the current pressure in the system before the backfill control feature operates.
  • Page 28 Changing the Behavior of the Auto Select Channel Mode The default values for these commands have been carefully chosen to work well under most applications. LDxxx sets auto crossover delay, where xxx is in msec (default = 100). reports LD value. LHCxxx sets high channel crossover point, where xxx is percentage of Hi channel (default = 0.9).

  • Page 29: Table 7: Sensor Range Values

    Setting the Sensor Signal Input Range Note Be sure that the sensor is connected to the device before changing the sensor signal input range. The [G value] command sets the full scale voltage range for the pressure sensor input, where: value: 0 = 1 Volt 1 = 5 Volts...

  • Page 30: Chamber Pump Speed

    0.1333 0.001 Note 1. Pressure readings are reported as a percentage (%) of full scale (FS), where full scale is the sensor range shown in Table 7. 2. For example, if the actual pressure is 10 Torr for a 10 Torr FS unit, the device reports a pressure value of 100 (for 100%).
  • Page 31 Learn the System This [L] LEARN command enables the unit to identify important system characteristics for Model Based Control. Use the LEARN function whenever installing the valve in a new vacuum system or when processing conditions are changed (such as flow rate, new or refurbished pump, or piping modifications). The learning process may take several minutes to complete.
  • Page 32 To read all data points, use the [RCD x] command, where x is 1, 2, or 3. To set a data point, use the [SCD ] command. For example, the following will set curve 3, data point 27, to the value 123.456: SCD 3:27:123.456 Note The curve being edited does not have to be the active curve.

  • Page 33: Setpoint Messages

    SUE 1 SUT 0.05 SUF 0.01 Setpoint Messages The Setpoint messages define the setpoint parameters which include the setpoint values, the gains and phases, and two process limit relays (each with high and low trip point levels). All of the setpoint messages (except for the gain and phase parameters) function in the same way, regardless of your system’s configuration.
  • Page 34 Table : Setpoint Messages (continued) Description Command Request Response Gain M x value M x value R xx 1 = Gain SP A xx: 46 = Gain SP A 1 = Gain SP A 2 = Gain SP B 47 = Gain SP B 2 = Gain SP B 3 = Gain SP C 48 = Gain SP C...
  • Page 35 Process Limit PLS1x2y PLS x y Source x: 1 = Relay A 1x Relay A Source (code version 2 = Relay B 2y Relay B Source 01.04.08 or y: 1 = Pressure newer) 2 = Position 3 = Close Limit Sw 4 = Open Limit Sw Setting the Type of Setpoint Control Each setpoint can be configured so that it represents a pressure value or position value.
  • Page 36 To report the type of control for setpoint A, enter: R 26 If setpoint A is configured for pressure control, an example response is: T 1 1 Setting the Analog Setpoint Range The [A value] command sets the full scale voltage range for the analog setpoint, where: value: 0 = -5 to +5 Volts (initial) 1 = -10 to +10 Volts...
  • Page 37 where x: 0 = Analog setpoint value 1 = Setpoint A value 2 = Setpoint B value 3 = Setpoint C value 4 = Setpoint D value 10 = Setpoint E value The controller responds with the message [S x value], where: 0 = Analog setpoint value 1 = Setpoint A value 2 = Setpoint B value...
  • Page 38 where xx: 46 = Setpoint A gain 47 = Setpoint B gain 48 = Setpoint C gain 49 = Setpoint D gain 50 = Setpoint E gain 54 = Setpoint Analog gain To report the gain value for setpoint A, enter: R 46 The controller responds with the message [M x value], where: 1 = Setpoint A gain...
  • Page 39 Setting the Phase Values The command [X x value] sets the Phase values for the internal setpoints, where: 1 = Setpoint A Phase 2 = Setpoint B Phase 3 = Setpoint C Phase 4 = Setpoint D Phase 5 = Setpoint E Phase 6 = Setpoint Analog Phase value: 0 to 32767...
  • Page 40 To report the value of the phase compensation factor, enter: The controller responds with the message [PCvalue], where: value: 0 to 100% of the high range phase For example, if: Xx value = 20.0 and: PCF = 75 then: Phase used for low range = 15.0 Setting the Softstart Rates The softstart rate controls the rate at which flow moves toward the desired setpoint.
  • Page 41 The controller responds with the message [I x value], where: 1 = Setpoint A rate 2 = Setpoint B rate 3 = Setpoint C rate 4 = Setpoint D rate 5 = Setpoint E rate 6 = Analog setpoint rate 7 = Valve open rate 8 = Valve close rate value: 0.1 (slowest) to 100% (fastest) of valve full speed...

  • Page 42: (Code Version 01.04.08 Or Newer)

    Note To disable a low threshold process limit, set the P x value to negative full scale. To disable a high threshold process limit, set the P x value to full scale. Setting the Process Limit Source The [PLS xy ] command sets the process limit source, where: 1 = Relay A 2 = Relay B...

  • Page 43: Control Messages

    Control Messages The control messages directly control the actions of the valve and the system. Table 9: RS-232 Control Messages Description Command Request Response Activate Setpoint M x y z w 0 = Analog Setpoint Active Setpoint 1 = Setpoint A 0 = Analog Setpoint 2 = Setpoint B 1 = Setpoint A...
  • Page 44 Table : RS-232 Control (continued) Description Command Request Response Remove Sensor and Special None None Zeros (removes [Z1] and [Z2 value]) Calibrate A/D Span Returns the Check Sum status of the A/D converter calibration. CSvalue value: 0 = OK 1 = Error condition Calibrate A/D zero Returns the Check Sum status of the A/D converter...
  • Page 45 8 = Valve stop 9 = Valve Learning where y: Valve Status 0 = Controlling 1 = Valve open 2 = Valve close where z: Pressure 0 = Pressure ≤10% of FS 1 = Pressure >10% of FS where w: Active Sensor Range /Channel Select Status /Zero Adjust Status 0 = Low / Auto/ Disabled 1 = High / Auto / Disabled...
  • Page 46 Using the Sensor Zero The [Z 1] command corrects for any sensor zero offsets. There is no request associated with this function. This command will zero the currently selected pressure sensor range. To use the sensor zero: 1. Turn the gas flow off. 2.
  • Page 47 Note If the checksum error persists after you perform a full system calibration the error indicates a hardware failure of the EEPROM. Contact an MKS Service Center, listed on the inside back cover of this manual, for assistance. Calibrating the A/D Converter The controller’s A/D (analog-to-digital) converter converts the analog input to a digital value that the...

  • Page 48: Slow Pump Introduction

    Manually Overriding the Backfill Relay Relay 2 is used as the backfill valve control relay when it is enabled with the BE1 command (see page 20). It also can be manually overridden directly with the messages described here. Note These messages activate or deactivate relay 2 even if the backfill function is disabled. For example, if relay 2 is being used to control an alarm, deactivating the relay may disable the alarm.

  • Page 49: Slow Pump Behavior

    COMMAND Description Command Function Pressure setpoint Sxvalue Set target pressure; where value is the pressure, x is the recipe number and value is the target pressure in % FS of the high range sensor. Set slow pump rate, where value is the slow pump SRvalue Slow Pump rate rate (Torr/sec).

  • Page 50: Activation Of Slow Pump

    Activation of Slow Pump The Slow Pump will be active whenever the slow pump attribute is enabled (non-zero). Abortion of Slow Pump Abortion of slow pump occurs when the slow pump enable attribute is set to zero (disabled). When slow pump is disabled, the controller approaches the setpoint at full speed, limited only by controller tuning.

  • Page 51: Informational Messages

    Informational Messages Informational messages report data on the device. There are no commands associated with these functions. Table 10: RS-232 Informational Messages Description Request Response Pressure Reading P value (reports pressure reading as % of FS) % FS value: Valve Position Value V value (reports valve position as % of Open) % Open...
  • Page 52 Reporting the Pressure Reading To report the currently selected pressure reading as a percentage (%) of full scale (FS) of your pressure sensor, issue the request: The controller responds with the message [P value], where: value: % of sensor full scale Note Pressure readings are reported as a percentage of full scale, where full scale is the sensor range set with the [Ex value] command.
  • Page 53 The controller responds with the message: M x y z where x: Type of Operation 0 = Local 1 = Remote y: State of the LEARN Function 0 = Not learning 2 = Learning valve z: Valve Control 0 = Open 1 = Close 2 = Stop 3 = Setpoint A...
  • Page 54 If the checksum error persists after you perform a full system calibration, followed by a recalibration of the span of the A/D converter, the error indicates a hardware failure of the EEPROM. Contact any MKS Service Center, listed on the inside back cover of this manual, for assistance.

  • Page 55: Chapter Two: Rs-232 Message Summary

    Chapter Two: RS-232 Message Summary The RS-232 messages required for operation of the device are listed below alphabetically—by command. Set SoftStart Analog Setpoint % Value Analog Setpoint Range (5v) Set SoftStart Open Valve % Value Analog Setpoint Range (10v) Set Softstart Close Valve % Value Interlock Enabled (0 or 1) Backfill Delay Set Local preset softstart pressure...
  • Page 56 Chapter Two: RS-232 Message Summary Analog Out Pressure Input Get Valve Position Output Range (B1=10V) Analog Out Position Input Get Valve Action (N0=normal) Calibrate Analog Out Pressure Zero Get High Sensor Range Calibrate Analog Out Position Zero Get Pressure Units (Torr, mbar, etc.) Get Sensor Voltage Range Set Process Limit1 Low Get Sensor Type (U0=Absolute)
  • Page 57 Get Valve Slip (C0=no, C1=slip) Get Speed Up Enable Setting Get Local preset softstart pressure Get Local preset softstart position Get Speed Up Filter Setting Get Speed Up Time Setting Get Valve Air Interlock Status Get Volume Estimate Status Enable 1 is On, Get Status of Backfill Relay - Open/Close 0 is Off Get Backfill Delay...
  • Page 58 Chapter Two: RS-232 Message Summary Set Phase Setpoint B Value Setpoint A = Position Set Phase Setpoint C Value Setpoint A = Pressure Set Phase Setpoint D Value Setpoint B = Position Set Phase Setpoint E Value Setpoint B = Pressure Set Phase Analog Setpoint Value Setpoint C = Position Set Local preset pressure phase...
  • Page 59 This page intentionally left blank.

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