MKS HPQ2-IP Manual
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MKS HPQ2-IP Manual

MKS HPQ2-IP Manual

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HPQ2-IP
Manual
SP101009.103
10 October 2012

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Summary of Contents for MKS HPQ2-IP

  • Page 1 HPQ2-IP Manual SP101009.103 10 October 2012...
  • Page 2 United Kingdom Tel: +44 (0) 1270 250150 Email: Maual_info@mksinst.com MKS Products provided subject to the US Export Regulations. Diversion or transfer contrary to U.S. law is prohibited. Windows and Windows95 are trademarks of the Microsoft Corporation and as such are fully recognised.
  • Page 3 This apparatus shall not be used in the residential, commercial, and light industrial environment unless further mitigation measures are taken. For advice please contact Spectra SensorTech Ltd. SIGNED: J.M.Higgins GENERAL MANAGER DATE: 19 February 2007 HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 4: Safety

    There are no operator replaceable parts within the 24VDC power supply unit or the HPQ2 unit. Connectors The connectors for external circuits are for use only with MKS Spectra equipment, or equipment which has no accessible hazardous live parts. The external circuits must comply with the requirements of EN61010-1 section 6.6.1.

  • Page 5: Ventilation

    On the rear panel refers to: a. Read all instructions carefully before use. b. The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS Spectra supplied cables. There are no accessible hazardous voltages or currents on these ports.
  • Page 6 5. Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres. If greater length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible EMC and safety issues.
  • Page 7 WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT 1. Maintenance functions must only be carried out by competent persons. 2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products Ltd., unless special arrangements are made. 3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and safety critical and must not be substituted.

  • Page 8: Table Of Contents

    7.12 Cleaning the Source ..............33 7.13 Re-fitting the Ion Source .............. 34 8. Exploded Views .................. 35 8.1 Analyser Flange pin-outs ..............35 8.2 Exploded View of the Analyser ............36 HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 9: Hpq2-Ip Sp101009.102 – 10 October 2012

    9. Ion Source Parameters ..............38 10. Communications Troubleshooting ........... 39 11. Returning Your Unit for Service ............46 HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 10: Specification

    Ion Source Sensitivity 5 x 10-5 A/Torr Electron Energy 40 and 70 eV nominal (adjustable from PC) Emission Current 0.1 and 0.7mA nominal (adjustable from PC) Filaments 2, independent, tungsten HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 11 127mm x 127mm x 210mm Overall length 2245mm Maximum Ambient C non-condensing Operating Pressure PC Software Process Eye Professional or Easyview Power 24V DC 3A External supply included Communication Ethernet Distance 100Metres HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 12: Introducing Hpq2-Ip

    A separate low voltage power supply connects to the HPQ2-IP control unit. The HPQ2-IP is designed to be operated from an IBM compatible PC running either Process Eye Professional or Easyview software. Communication between the PC and the HPQ2-IP is via an Ethernet link.

  • Page 13: Control Unit Overview

    3. Control Unit Overview The HPQ2-IP control unit is a single unit incorporating all the necessary power supply and data acquisition electronics for the residual gas analyser. Power is derived from a dedicated low voltage power supply which is supplied as part of the standard package.

  • Page 14: The Rear Panel

    9, 10, 11 (joined together) 0 volts (24 volt return)  The power input is 24 volts DC 10%, 3 Amps max. The current drawn depends on the mass range and whether a filament is on or off. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 15: Indicators

    The indicator is lit when power is supplied to the HPQ2 unit. Comms This indicator will flash to show a comms event to the HPQ2-IP unit. If there are no active communications with the HPQ2-IP, this indicator will pulse at approximately 2Hz, depending on the RGA software version used.

  • Page 16: Audio Output

    The Analog Input / Output connector is a 15 way D-Type socket mounted on the rear panel of the HPQ2-IP unit and labelled ANALOG I/O. It consists of; one analog output 0 to +10V and four quasi-differential analog inputs 0 to ±...

  • Page 17: Digital I/O Connector

    Not Connected Not Connected Not Connected Note that the total power consumption on each rail (+5V and 15V) for ± both the Analog and Digital I/O ports must not exceed 100mA. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 18: Reset Switch

    It allows an independent total pressure gauge or a signal from a vacuum control system to be connected to the HPQ2-IP. It is the most effective of the trips available and we would always recommend its use. The external trip input can be driven in three ways.

  • Page 19: Analyser Installation

    4.1 Unpacking When you receive the HPQ2-IP carefully check each item before removing the foam packaging and plastic wrapping, to ensure that no physical damage has occurred during shipment. Also, make sure all items have been received correctly by checking each item against the enclosed packing slip.

  • Page 20: Installing The Analyser

    HPQ2-IP control unit. It is permissible to expose the analyser to high pressure, even above atmosphere, but the filament must be switched off.
  • Page 21 The HPQ2-IP will be more susceptible to drift in the location and height of peaks if it is mounted in a different orientation to that described above and it may not meet its published specification.

  • Page 22: Control Unit Installation

    Rotate the clamping ring on the RF/analyser connector so that the slot (which will be directly below the threads of the M5 socket set screw) lines up with the keyway on the connector tube. Hold the HPQ2-IP control unit so that the keyway lines up with the locating key on the analyser flange.

  • Page 23: Electrical Connections

    Attach the line cord to the power supply. The power supply will automatically set itself to operate with the local line voltage. When power is applied, the LED on the rear of the HPQ2-IP will illuminate. In the case of an Ethernet connection, connect a cat5 patch lead to the socket marked “ETHERNET”.

  • Page 24: Baking

    6. Baking The HPQ2-IP control unit should not be exposed to temperatures above 40 C so it should be removed from the analyser during baking. The analyser may be baked up to 250 C but care should be taken to avoid exposing the ceramic feedthrough to sudden changes in temperature.

  • Page 25: Analyser Maintenance

    The serial number is engraved on the analyser flange and will begin with the letters “LM”. The HPQ2-IP analyser can be broken down into four separate areas by virtue of their function.

  • Page 26: Maintenance Of Your Analyser

    These, being insulators, have a far more noticeable effect upon the performance of the source and therefore a more frequent cleaning program should be undertaken. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 27: Failed Filaments

    In the remainder of this section we describe how to replace filaments, replace the ion source and clean the ion source as an assembly. The HPQ2-IP analyser has been designed to allow these jobs to be carried out with minimal training and specialised equipment.

  • Page 28: Ohmmeter Analyser Checks

    Now attach the first meter lead to pin 3 and check to pins 4 to 12. Proceed around the feedthrough until all possible connections have been checked. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 29: Checking Filaments

    If the meter reading suggests that the filament is good but the control unit shows a filament fail the most likely cause would be a break down in electrical continuity. Examine the RF/analyser connector on the front of the HPQ2-IP control unit, check that none of the gold sockets are pushed out of place.
  • Page 30 A pen and paper on which to make notes and sketches As the HPQ2-IP is very small it is not really necessary to hold it in a vice as long as you are reasonable careful. *** Always wear cotton gloves when working on the analyser *** 7.8 Removing the Filaments...

  • Page 31: Fitting New Filaments

    4. Repeat step 3 for the other filament connection. 5. Check with your Ohmmeter for shorts. 6. Replace the analyser into your vacuum housing and again check for shorts or grounding to the outer vacuum housing. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 32: Ion Source, Replacing And Cleaning

    7.10 Ion source, replacing and cleaning The HPQ2-IP analyser design permits the removal of the ion source as one complete assembly which can be replaced or cleaned as an assembly. The ion source automatically aligns on the main analyser assembly allowing it to be easily replaced without the need for any special jigs.

  • Page 33: Cleaning The Source

    6. Re-fit the ion source by following the instructions on Page 35. If after two washes there are still deposits on the ion source it should be returned to an MKS service facility to be cleaned. HPQ2-IP SP101009.102 – 10 October 2012...

  • Page 34: Re-Fitting The Ion Source

    2. When the ion source is in place tighten the two socket set (Allen) screws in the source-mounting collar. 3. Tighten the screws in the three barrel connectors. 4. Re-fit the filament assembly by following the instructions on Page 32. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 35: Exploded Views

    8.1 Analyser Flange pin-outs Pin Descriptions Connection Earth Source plate Electron Multiplier Filament 1 Extraction plate Suppressor plate RF.1 Repeller plate / filament common No connection Filament 2 RF.2 Collector HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 36: Exploded View Of The Analyser

    8.2 Exploded View of the Analyser HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 37 Ceramic Tube 2.7 x 1.7 x 4.0mm long Tube 0.076”dia x 0.056” id x .375” long Aly53 Alsint Tube 2mm x 1.2mm x 300mm long Nickel Wire 1mm dia. Stainless Steel Wire 22swg. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 38: Ion Source Parameters

    9. Ion Source Parameters The following table gives the default ion source settings for HPQ2-IP in its three operating modes. ION SOURCE PARAMETER Instrument Emission Electron Ion Energy Extractor & Mode Energy HPQ2-IP RGA 0.7mA or 70eV 7.0eV -110V Mode 0.39mA...

  • Page 39: Communications Troubleshooting

    Access and addresses in the Device run Process same range Manager? Page 63/64 Carry out reset to default IP address STILL NG Use the Troubleshoot Page feature in Device Manager HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 40 PROPERTIES. Check the options shown above. Your network connection status is now displayed in the task-bar, near the clock. Mouse-over the icon to check the status of the connection. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 41 The following displays a computer configured for automatic IP addressing (DHCP). If you are not part of a DNCP network or intend to directly connect to the instrument, you will need to assign a static IP address. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 42 As you can see below, this host’s IP address ends in 10, but could have been any number up to 255 excluding 250. Use the Subnet shown. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 43 Note: If the host PC is part of your network, then changing its IP address is not recommended without seeking advice from your IT staff. Likewise, assigning a new IP address to the instrument must be done under advice or network conflicts could occur. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 44 Device Manager will recommend you change the instruments IP address to another, not ending in .250. This is to avoid potential problems when installing more than one instrument. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...
  • Page 45 Press the RESET button and immediately press and hold the PRESET button for 20 seconds. Important: If the instrument has been configured for DHCP, keep the PRESET button pressed for 90 seconds, or a reset will not occur. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

  • Page 46: Returning Your Unit For Service

    If you wish to return the instrument for service, please follow these simple guidelines. Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation (RMA) number. We will require some instrument details, such as the serial numbers, date of purchase and a detailed fault description.
  • Page 47 Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility. Fax numbers and addresses can be found on the inside front page of this manual. Please ensure that we have this information before we receive the equipment.
  • Page 48 1. The equipment has been securely packaged and labelled. 2. The carrier has been informed of the hazardous nature of the consignment. Signed: Title: Date: Phone No. HPQ2-IP SP101009.102 – 10 October 2012 MKS Instruments, Spectra Products...

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