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Summary of Contents for MKS Granville-Phillips 203 Series
- Page 1 Series 203 ® Granville-Phillips Variable Leak Valve Instruction Manual Instruction manual part number 203026 Revision B - November 2016...
- Page 3 Andover, MA 01810 USA Tel: 978-645-5500 Fax: 978-557-5100 Email: mks@mksinst.com Instruction Manual © 2016 MKS Instruments, Inc. All rights reserved. ® Granville-Phillips is a registered trademark, and mksinst is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of...
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Page 5: Table Of Contents
Contents Safety Hazards ........Important Precautions . - Page 6 Series 203 Variable Leak Valve Installation and Operating Instructions...
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Page 7: Safety Hazards
Series 203 Variable Leak Installation and Operating Instructions Safety Hazards WARNING Use of certain corrosive gases can cause gases to leak through the sealed valve or into the atmosphere, resulting in serious personal injury. Before using a gas with the valve, check the gas for compatibility with the following materials: •... - Page 8 Important Precautions 2.4 Due to the closing torques required, use care when it is necessary to support the valve by the ports only. 2.5 High temperature bake the Leak valve body only when the Driver Assembly is removed and the Leak held open with a bake-out clamp. 2.6 Stable ambient temperature is necessary to maintain conductance at any specific setting.
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Page 9: Description
Description The Variable Leak consists of the Leak Valve, Driver Assembly and the Description Mounting Bracket. The Leak Valve has a precisely machined 304 SS nosepiece welded in the center of a thin 304 SS diaphragm. The diaphragm is welded to the 304 SS body. The nosepiece seats on a carefully proportioned pure silver gasket in the valve body. -
Page 10: Temperature
Installation The conductance of the Variable Leak is slightly temperature dependent 3.6 Temperature and will vary if the ambient temperature varies. Bakeout temperatures up to 450°C may be used, provided the driver is removed and the leak is held open by the bakeout clamp. Do not bake the leak with the driver attached to a temperature higher than 70°C. -
Page 11: Operation
Operation Leak rate is increased as the counter reading is increased. Twenty-seven Operation turns of the driver handle, or 270 counter numbers above the sealed position reference number, changes the Leak from full closed mass spectrometer leak tight to full open. Never increase the counter reading more than 270 numbers or decrease below the number at which the Leak seals. -
Page 12: Attaching The Driver
If difficulties are experienced in operating the Leak Valve, the following information will be useful. For additional assistance, contact the Granville-Phillips Technical Service Department at 1–303–652–4400 or email at mks@mksinst.com. Series 203 Variable Leak Valve Installation and Operating Instructions... - Page 13 Troubleshooting Symptoms, Causes, and Remedies Symptom Cause Remedy Leak has only on or off A liquid film on the sealing A brief vacuum bakeout at 200 to 300 ° C for a few hours. properties. Does not give surfaces produced by smooth continuous control.
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Page 14: Certification
Certification MKS/Granville-Phillips certifies that this product met its published Certification specifications at the time of shipment from the factory. This Granville-Phillips product is warranted against defects in materials and Limited Warranty workmanship for one year from the date of shipment provided the installation and preventive maintenance procedures specified in this instruction manual have been followed. - Page 16 Series 203 ® Granville-Phillips Variable Leak Valve Customer Service / Technical Support: MKS Pressure and Vacuum Measurement Solutions ® MKS Instruments, Inc., Granville-Phillips Division 6450 Dry Creek Parkway Longmont, Colorado 80503 USA Tel: 303-652-4400 Fax: 303-652-2844 Email: mks@mksinst.com MKS Corporate Headquarters MKS Instruments, Inc.
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