MKS 356 Micro-Ion Plus Series Instruction Manual
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MKS 356 Micro-Ion Plus Series Instruction Manual

Vacuum gauge module
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Series 356
®
Series 356 Micro-Ion
Plus
Vacuum Gauge Module
Instruction Manual
Instruction manual part number 356007-GP
Revision D - April 2018

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Summary of Contents for MKS 356 Micro-Ion Plus Series

  • Page 1 Series 356 ® Series 356 Micro-Ion Plus Vacuum Gauge Module Instruction Manual Instruction manual part number 356007-GP Revision D - April 2018...
  • Page 3 Instruction Manual © 2018 MKS Instruments, Inc. All rights reserved. ® ® Granville-Phillips and Micro-Ion are registered trademarks, and mksinst is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.
  • Page 4 ® Series 356 Micro-Ion Plus Vacuum Gauge Module Catalog numbers for Series 356 Micro-Ion Plus Vacuum Gauge Modules Power supply and cable are not included. Module with RS-485 interface, analog output, no display: 356001 - Y # - # Module with RS-485 interface, analog output, digital display: 356002 - Y # - # Ion Gauge Filaments: Yttria-coated iridium...

  • Page 5: Table Of Contents

    Contents Chapter 1 Introduction ......... About These Instructions .
  • Page 6 Contents Chapter 4 Maintenance ......... Customer Service .

  • Page 7: Chapter 1 Introduction

    Chapter 1 Introduction These instructions explain how to install, operate, and maintain the About These Instructions ® ® Granville-Phillips Micro-Ion Plus Vacuum Gauge Module. The module ® contains a Micro-Ion ionization gauge and a Conductron heat-loss sensor, which working in combination provide pressure measurement from –9 1 x 10 to atmosphere.

  • Page 8: System Grounding

    Chapter 1 practices regarding the content and appearance of safety signs, symbols, and labels. Each caution or warning statement explains: The specific hazard that you must prevent or unsafe practice that you must avoid, The potential result of your failure to prevent the specified hazard or avoid the unsafe practice, and What you must do to prevent the specified hazardous result.

  • Page 9: Operation

    Representative will advise you if the hazardous materials document is required. When returning products to MKS, be sure to package the products to prevent shipping damage. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility.

  • Page 10: Definitions Of Terms

    MKS Corporate Headquarters MKS Instruments, Inc. 2 Tech Drive, Suite 201 Andover, MA 01810 USA Tel: 978-645-5500 Fax: 978-557-5100 Email: mks@mksinst.com • Table 1-1 lists terms describing the Micro-Ion Plus Module and its Definitions of Terms components. Table 1-1 Terms Describing the Micro-Ion Plus Module and Components...
  • Page 11 Introduction Alternating, automatic, or manual modes Filament selection • For a Micro-Ion gauge with yttria-coated iridium filaments, the default is alternating Outputs and Indicators Logarithmic, 0.50 Vdc/decade, where 1000 Torr = 7 Vdc Analog output Digital RS-485 output Interface RS-485 two-wire, half-duplex Communications format ASCII format, eight data bits, no parity, one stop bit 1200, 2400, 4800, 9600, 19200 (default), or 38400 baud...
  • Page 12 Chapter 1 practical to make repeatable measurements near the x ray limit Yttria-coated iridium Micro-Ion gauge filament material Gold-plated tungsten Conductron sensing wire material 10.8 cm , (0.67 in. ) to the port screen Internal volume Physical Characteristics 567 gm (20 oz.) with NW16KF fitting Weight +24 Vdc ±15% external power supply.

  • Page 13: Chapter 2 Installation

    Chapter 2 Installation The Micro-Ion Plus Module contains a Micro-Ion gauge (Bayard-Alpert type Module Components ionization gauge) and a Conductron heat-loss sensor. WARNING Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage or personal injury.

  • Page 14: Step 1 Install Pressure Relief Devices

    Before you install the module, install appropriate pressure relief devices in the vacuum system. MKS Instruments, Inc./Granville-Phillips does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and pressure relief disks can be located via an online search, and are listed on ThomasNet.com under “Relief Valves”...
  • Page 15 Installation • Do not locate the module near a gas inlet or other source of contamination, where inflow of gas or particulates causes atmospheric pressure to be higher than system atmosphere. • Do not locate the module where it will be exposed to corrosive gases such as mercury vapor or fluorine.

  • Page 16: Attach The Module To The Vacuum Chamber

    Chapter 2 Step 3 Attach the Module to the Vacuum Chamber Attach the module vacuum chamber fitting to its mate on the vacuum chamber. CAUTION Twisting the module to tighten the fitting to the vacuum chamber can damage the module’s internal connections. •...

  • Page 17: Step 4 Assemble And Connect The Cables

    Installation Remove the plastic or metal bead protector cap from the fitting. VCR-type fitting If a gasket is used, place the gasket into the female nut. Assemble the components and tighten them finger-tight. While holding a back-up wrench stationary, tighten the female nut 1/8 turn past finger-tight on 316 stainless steel or nickel gaskets, or 1/4 turn past finger-tight on copper or aluminum gaskets.
  • Page 18 Chapter 2 Figure 2-2 9-pin Trip Point and 15-pin User Interface Subminiature D Wiring Connectors 15-pin subminiature D user interface connector 9-pin subminiature D trip points wiring Pin 1 must be connector connected to pin 5 for the Micro-Ion gauge to turn ON Connect the module power supply to terminals 5 and 8 on the 15-pin I/O Module Power Supply wiring connector.
  • Page 19 Installation Table 2-2 Connections to 15-pin Subminiature D Connector Pin # Function Input or Output Description Pin 1 Micro-Ion gauge Input Must be continuously connected to Pin 5 (LOW) to turn gauge ON ON/OFF • Removing ground connection turns gauge OFF Pin 2 Analog output Output...
  • Page 20 Chapter 2 The module provides an internal 15 K pull-up resistor to 12 Vdc, as Control Inputs illustrated in Figure 2-4. Figure 2-4 Input Circuit Wiring Internal to μP input port Active HIGH User interface input pin (pins 1, 7, 9, and 11) Pin must be held LOW (<...
  • Page 21 Installation The module has two trip point relays. The contacts are silver alloy-gold Relay Wiring clad, rated for 1 A at 30 Vdc. The relays can handle resistive or non-inductive loads. • Figure 2-6 illustrates the 9-pin trip point connector. •...
  • Page 22 Chapter 2 The module chassis must be properly grounded via the 15-pin subminiature Grounding D connector and the chassis ground screw, as illustrated in Figure 2-7. The module generates 180 Vdc during normal operation (Micro-Ion gauge ON) and 250 Vdc during Micro-Ion gauge degas. Figure 2-7 Ground Connections Chassis ground screw...

  • Page 23: Step 5 Calibrate The Conductron Sensor

    Installation Step 5 Calibrate the Conductron Sensor To calibrate the Conductron sensor, see Calibrate the Module at Atmosphere on page 35. An atmospheric calibration is performed on the Conductron sensor at the factory before the module is shipped. The factory calibration sets the atmospheric calibration point to approximately 635 Torr (846 mbar, 84.6 kPa).
  • Page 24 ® Micro-Ion Module Instruction Manual - 356007-GP...

  • Page 25: Chapter 3 Operation

    41 – 42. All RS-485 command instructions are listed in the section titled RS-485 Operation and Commands beginning on page 40. If you need application assistance, phone a Granville-Phillips application engineer at 1-303-652-4400 or email mks@mksinst.com. ® Micro-Ion Module Instruction Manual - 356007-GP...

  • Page 26: Theory Of Operation

    Chapter 3 The Micro-Ion Plus vacuum gauge module consists of two separate pressure Theory of Operation measuring devices: a hot filament Micro-Ion gauge (Bayard-Alpert type ionization gauge), and a Conductron heat-loss sensor. When power is applied to the module, the Conductron sensor is ON. As the system is pumped down, the Conductron sensor turns ON the Micro-Ion gauge at the pressure switch point.
  • Page 27 Operation The amount of ion current for a given emission current and pressure depends on the Micro-Ion gauge design. This gives rise to the definition of ionization gauge sensitivity, frequently denoted by “S”: Ion current --------------------------------------------------------------------- - × Emission current Pressure When used with N or air, the ionization gauge has a nominal sensitivity of...
  • Page 28 Chapter 3 As the vacuum system pumps down from atmosphere, the Conductron Ion Gauge/Conductron Gauge Auto On/Off sensor (heat loss sensor) measures pressure until a sufficiently low pressure level is achieved, then automatically turns ON the Micro-Ion gauge in the low emission mode.

  • Page 29: Set The Micro-Ion Gauge Emission Current Threshold

    Operation The Micro-Ion gauge can operate at either of two emission current levels. Set the Micro-Ion Gauge Emission Current • In low-emission mode, the current level is 0.1 mA. Threshold • In high-emission mode, the current level is 4 mA. As the vacuum pump removes gas from the system, the Conductron sensor measures pressure until it has decreased to a threshold pressure at which the Micro-Ion gauge can operate.
  • Page 30 Chapter 3 Figure 3-3 Gauge LED Gauge Button Gauge LED As the vacuum system pumps down from atmosphere, the Conductron Automatic Filament –2 Selection sensor measures pressure until a pressure of 20 mTorr (2.66 x 10 mbar, 2.66 pascal) is achieved, then automatically turns ON the Micro-Ion gauge. Tungsten filaments are more likely than yttria-coated iridium filaments to burn out if they turn ON at a pressure that is too high.

  • Page 31: Turn The Micro-Ion Gauge On Or Off

    Operation When the module starts up, the Conductron sensor is ON. As pressure Turn the Micro-Ion Gauge ON or OFF decreases to a level that allows the Micro-Ion gauge to operate, the sensor turns ON the Micro-Ion gauge. If the Micro-Ion gauge is in manual filament mode and one filament is inoperable, you must switch to the other filament by sending the IG0 command, then send the IG1 command, or push the Gauge button.

  • Page 32: Read Vacuum Pressure

    Chapter 3 Table 3-3 Micro-Ion Gauge Status LED Gauge Status LED State • Micro-Ion gauge is OFF, both filaments are open Solid red • Conductron sensor failure • Micro-Ion gauge will not turn ON • Micro-Ion gauge is OFF, primary filament failure Blinking red •...

  • Page 33: Read The Analog Output

    Operation Table 3-4 Display Resolution vs. Conductron Sensor Pressure Measured Pressure Torr mbar Pascal Display Resolution Less than 50 Less than 66 Less than 6.6 x 10 Two digits 50 to 100 66 to 133 6.6 x 10 to 13.3 x 10 Increments of 10 pressure units 100 to 400 133 to 533...

  • Page 34: Degas The Micro-Ion Gauge

    Chapter 3 Figure 3-6 Analog Output Voltage vs. Pressure You can use the module degas button to initiate a Micro-Ion gauge degas Degas the Micro-Ion Gauge cycle. Press the degas button to initiate or terminate the degas cycle. The degas cycle will run for two minutes unless you terminate it earlier. The degas LED turns solid amber to indicate degas in progress.

  • Page 35: Calibrate The Module At Atmosphere

    Operation Figure 3-7 Degas Button and LED on Module Control Panel Degas LED Degas Button Table 3-5 Micro-Ion Gauge Status LED Degas Status LED State Degas in progress Amber An atmospheric pressure calibration of the Conductron sensor is performed Calibrate the Module at Atmosphere with air at the factory prior to shipment.

  • Page 36: Calibrate The Module At Vacuum

    Chapter 3 Figure 3-8 ATM (or CAL) Button on Module Control Panel CAL button The Conductron sensor turns ON the Micro-Ion gauge when pressure 3.10 Calibrate the Module at –2 –2 Vacuum decreases to 2.0 x 10 Torr (2.66 x 10 mbar, 2.66 pascal).
  • Page 37 Operation You can reverse relay polarity, so relays activate with increasing pressure and deactivate at a lower pressure than the activation pressure, as illustrated in Figure 3-10. Figure 3-9 Relay Behavior with Decreasing Pressure Time Deactivate Default 10% hysteresis Activate Relay activated Activated Deactivated...
  • Page 38 Chapter 3 Make sure the module is properly installed and power is ON. Relay Configuration using Trip Point Buttons and Use the optional display LEDs and recessed interface buttons to LEDs configure trip points. Use the trip points select button to activate the configuration mode and select the desired trip point for configuration.
  • Page 39 Operation Activate the trip point configuration mode and select the desired trip point relay. Press the Trip Points button. • The first press of the button activates the configuration mode and selects trip point one (LED 1 flashes). • Pushing the button a second time selects trip point two (LED 2 flashes).

  • Page 40: Rs-485 Operation And Commands

    Chapter 3 This following sections of the Operation chapter provide detailed 3.12 RS-485 Operation and Commands information to use the Series 356 Micro-Ion Plus Module with the RS-485 digital interface. Topics covered are: RS-485 Physical Layer (Section 3.13) RS-485 Initial Setup (Section 3.14) RS-485 Data Timing and Response (Section 3.15) RS-485 Command Structure (Section 3.16) RS-485 Command Sets (Section 3.17)

  • Page 41: Rs-485 Initial Setup

    Operation 3.14 RS-485 Initial Setup The default address for the module is 01. You may assign any address from SA – Set the Address Offset 0 to 63 (decimal equivalent). The address consists of the hexadecimal switch setting plus the hexadecimal SA (set address offset) value.

  • Page 42: Data Timing And Response

    Chapter 3 The example set baud rate (SB) command sequence sets the baud rate to SB – Set the Baud Rate 2400 baud: Example SB command from host: #01SB2400↵ Response from module: *01 PROGM OK↵ Allowable SB values are 1200, 2400, 4800, 9600, 19200 (default), or 38400 baud.
  • Page 43 Operation Figure 3-13 Data Timing and Response Delays Table 3-9 Data Timing and Response Delay Limits Timing Segment Time Limit Time T (time for host to switch from transmit to receive) 1.2 msec minimum 12.0 msec maximum Time T (data processing and response time) ...

  • Page 44: Rs-485 Command Structure

    Chapter 3 Table 3-11 Task and Data Processing Time Task Data Processing Time (T Read commands 0 sec Write commands 5 msec FAC (reset values to factory defaults) 28.0 msec RST (reset module to power-up state) No response The response time from the module depends on the baud rate and the task that the host commands the module to perform.

  • Page 45: Rs-485 Command Sets

    Operation Table 3-13 lists RS-485 commands that provide pressure values or other 3.17 RS-485 Command Sets information without affecting module operation. Table 3-14 lists RS-485 commands that may affect module operation and have default values. Table 3-13 RS-485 Command Set for Values not Affecting Module Operation Change Command After...
  • Page 46 Chapter 3 Table 3-14 RS-485 Command Set for Commands Affecting Module Operation Change Command After Can be Command Type Non-volatile Default Reset Data Returned Locked Page # Read/write OFF (0) Confirm or state Write Factory defaults Confirm Read/write 0 seconds Confirm or state Read/write ON (1)
  • Page 47 Operation The following seven RS-485 commands provide pressure values or other 3.18 RS-485 Commands - Set 1 information which do not affect the operation of the Micro-Ion Module. See Table 3-13 on page 45. The example read pressure (RD) command causes the module to return a RD - Read Vacuum –2 Pressure...
  • Page 48 Chapter 3 Table 3-15 Responses to RE Command Response Description Micro-Ion gauge is in high-emission mode (4.0 mA current) 4.0MA EM Micro-Ion gauge is in low-emission mode (0.1 mA current) 0.1MA EM Micro-Ion gauge is in low-emission mode 0.02 mA current) 0.02MA EM Degas the Micro-Ion Gauge Micro-Ion gauge degas cycle is in progress (see...
  • Page 49 Operation Table 3-16 Module Status RS-485 Strings Response Cause Solution Module is operating normally. No solution necessary. 00 ST OK Conductron sensor is inoperable. • Cycle power to the module. 01 CGBAD • If necessary, replace the gauge assembly (see page 66).

  • Page 50: Rs-485 Commands - Set 2

    Chapter 3 The following eighteen RS-485 commands may affect the operation of the 3.19 RS-485 Commands - Set 2 Micro-Ion Module, and have default values. See Table 3-14 on page 46. The RS-485 command includes the alpha characters “D” and “G” and the DG - Degas Commands numeric value 0 (terminate) or 1 (initiate).
  • Page 51 Operation Use the “S” switch to read the pressure output status. IGMS command from host: #01IGMS↵ Example response from module: *01 0 ALL↵ • The “0 ALL” character string means all pressure indications are disabled when the Micro-Ion gauge is OFF. •...
  • Page 52 Chapter 3 The Set Filament (SF) RS-485 command can be used to change the filament SF - Set Filament operation mode of the Module. The best filament operational mode for the type of Micro-Ion Gauge in the Module you are using was set at the factory. The following RS-485 command (SF) example sets the gauge filament to manual mode.
  • Page 53 Operation Make sure the module is properly installed and the power is ON. PC - Process Control Use Table 3-7 to record the activation pressure, activation direction, and hysteresis for each relay. Refer to the following example process control (PC) command sequence to program the pressure at which the relay will activate: The example PC command sequence causes relay 1 to activate when –1...
  • Page 54 Chapter 3 TS - Calibrate the Module at Atmosphere Example TS command from host: #01TS↵ Example response from module: *01 PROGM OK↵ If the module returns a “RANGE ER” message in response to the TS command, the atmospheric calibration has failed. The raw sensor voltage is outside the normal range for the Conductron sensor.
  • Page 55 Operation Table 3-18 Interface Functions Affected by TLU Command Command Interface Function Instructions: Set emission current threshold for Micro-Ion gauge Page 52 Set address offset Page 41 Set baud rate Page 42 Set parity Page 42 Set pressure unit Page 54 Lock control functions (keyboard) Page 55 Unlock control functions (keyboard)
  • Page 56 Chapter 3 You may also ground pin 11 on the 15-pin subminiature D connector to lock the CAL, Gauge, Degas, and Trip Points buttons on the module. To unlock the buttons, remove the pin 11 ground. If you’ve locked the buttons by grounding pin 11, you cannot use the KBU command via RS–485 to unlock them.

  • Page 57: Rs-485 Error Responses And Display Error Codes

    Operation • Table 3-20 lists error responses that the module returns if you enter a 3.20 RS-485 Error Responses and Display Error Codes command improperly or if a value in a command is out of range. • Table 3-21 lists error codes produced by the optional pressure display. Table 3-20 RS-485 Error Responses Response* Possible Causes...
  • Page 58 Chapter 3 ® Micro-Ion Module Instruction Manual - 356007-GP...

  • Page 59: Maintenance

    Representative will advise you if the hazardous materials document is required. When returning products to MKS, be sure to package the products to prevent shipping damage. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility.

  • Page 60: Troubleshooting

    Chapter 4 If any of the conditions described on page 59 have occurred, Troubleshooting troubleshooting is required to determine the repairs that are necessary. Because the module contains static-sensitive electronic parts, follow these Precautions precautions while troubleshooting: • Use a grounded, conductive work surface. Wear a high impedance ground strap for personal protection.
  • Page 61 Maintenance Table 4-1 lists failure symptoms, causes, and solutions indicated by Symptoms, Causes, and Solutions something other than an RS-485 error message from the module. Table 4-1 Troubleshooting Symptoms and Causes Symptom Causes Solutions Gauge indicator does not illuminate. • Power supply is disconnected, OFF, •...
  • Page 62 Chapter 4 Table 4-1 Troubleshooting Symptoms and Causes (continued) Symptom Causes Solutions Pressure reading is inaccurate. • Mechanical damage has occurred. • If mechanical damage has occurred, return the module to the factory (see Section 4.5 Returning a Micro-Ion Module for Service on page 66). •...

  • Page 63: Micro-Ion Gauge Continuity Test

    Maintenance If a problem with pressure measurement is traced to the module, the Micro-Ion Gauge Continuity Test Micro-Ion gauge can be tested with an ohmmeter. This test can detect open filaments or shorts between gauge elements, but may not detect inaccurate pressure measurement associated with vacuum leaks or other materials (contaminants) within the gauge.
  • Page 64 Chapter 4 Figure 4-2 Removing the Gauge, Step 3 Carefully unplug the module electronics from the gauge Figure 4-3 Micro-Ion Plus Replacement Gauge Micro-Ion Gauge End plate ® Micro-Ion Module Instruction Manual - 356007-GP...
  • Page 65 Measure the resistance between pin 9 and pin 10. Resistance between heat-loss sensor wires should be <14 Ω. If any of the tests result in different readings than listed above, contact MKS customer service to order a replacement gauge. Table 4-2 Test Resistance Values...

  • Page 66: Replacing The Gauge Assembly

    Material Authorization (RMA) from Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials disclosure form may be required. The MKS/Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required.

  • Page 67: Filament Operation

    Appendix A Filament Operation Table A-1 Micro-Ion Filament Operation Modes Mode Description Automatic • Filament logic operates filament 1 each time the Micro-Ion gauge turns ON • If filament 1 becomes inoperable, the Micro-Ion gauge switches to filament 2 Alternating (default for Micro-Ion gauge •...
  • Page 68 Appendix A Figure A-1 Automatic Filament Switching Flow Chart ® Micro-Ion Module Instruction Manual - 356007-GP...
  • Page 69 Filament Operation Figure A-2 Alternating Filament Switching Flow Chart ® Micro-Ion Module Instruction Manual - 356007-GP...
  • Page 70 Figure A-3 Manual Filament Switching Flow Chart ® Micro-Ion Module Instruction Manual - 356007-GP...
  • Page 71 Index VCR type 17 About these instructions 7 Analog output reading 33 Gauge assembly 66 wiring 18 Ground wiring 22 Appendixes Specifications 67 Automatic filament selection 30 Installation analog and RS-485 output wiring 18 attach module to vacuum chamber 16 Before you begin cable connections 17 about these instructions 7...
  • Page 72 Index default switch to high 10 RS-485 command set 45 default switch to low 10 RS-485 command structure 44 degas 10, 34 RS-485 physical layer 40 emission current set address offset 41 specifications 10 set baud rate 42 filament material 12 set filament mode 29 filament mode 29 set parity 42...
  • Page 73 Index TZ 36 ground 22 UNL 55, 56 module power supply 18 VER 48 RS-485 output 18 RS-485 output wiring 18 trip point relays 21 RS-485 physical layer 40 RS-485 reset to factory defaults 56 X-ray limit 11 Specifications analog output 11 Micro-Ion gauge 10 module 11 outputs and indicators 11...
  • Page 74 Index ® Micro-Ion Module Instruction Manual - 356007-GP...
  • Page 76 Series 356 ® Series 356 Micro-Ion Plus Vacuum Gauge Module Customer Service / Technical Support: MKS Pressure and Vacuum Measurement Solutions MKS Instruments, Inc. 6450 Dry Creek Parkway Longmont, Colorado 80503 USA Tel: 303-652-4400 Fax: 303-652-2844 Email: mks@mksinst.com MKS Corporate Headquarters MKS Instruments, Inc.

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