MKS 275 Series Instruction Manual
  1. Manuals
  2. Brands
  3. MKS Manuals
  4. Control Unit
  5. Granville-Phillips Series 275
  6. Instruction manual

MKS 275 Series Instruction Manual

Mini-convectron module with rs-485 and dual process relays
Hide thumbs Also See for 275 Series:
Table of Contents

Advertisement

Quick Links

Download this manual
Series 275
Mini-Convectron
Dual Process Relays
Instruction Manual
Instruction manual part number 275547
Revision C – December 2021
®
Module with RS-485 and

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 275 Series and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for MKS 275 Series

Summary of Contents for MKS 275 Series

  • Page 1 Series 275 ® Mini-Convectron Module with RS-485 and Dual Process Relays Instruction Manual Instruction manual part number 275547 Revision C – December 2021...
  • Page 3 Instruction Manual © 2021 MKS Instruments, Inc. All rights reserved. Granville-Phillips and Convectron are registered trademarks, and mksinst is a ® ® trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.
  • Page 4 Series 275 Mini-Convectron ® Module with RS- 485 and Dual Process Relays Catalog numbers for Series 275 Mini-Convectron Modules This manual is for use only with the following catalog numbers: 275410 - 2 - X X- X Sensor Type Gold-Plated Tungsten..... G Platinum .

  • Page 5: Table Of Contents

    Table of Contents Safety ..........Chapter 1 Chapter 2 Introduction .....................
  • Page 6 Table of Contents Chapter 6 Maintenance .................... 45 General Information ..................45 Damage Requiring Service ............... 45 Troubleshooting ................... 46 Precautions ...................... 46 Symptoms and Possible Causes ............. 47 Convectron Gauge Removal and Replacement ....... 48 Removing the Convectron Gauge ............48 Replacing the Convectron Gauge ............
  • Page 7 These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact MKS. This product was designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict accordance with these safety instructions.
  • Page 8 Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. MKS Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
  • Page 9 Safety 1.2 Grounding Requirements See Grounding, Section 3.7 in the Installation chapter for more detailed requirements regarding gauge and system grounding. Proper Grounding All components of a vacuum system used with this or any similar high voltage product must be maintained at Earth ground for safe operation.
  • Page 10 Chapter 1 1.4 Over-Pressure Conditions Over-Pressure Conditions Install suitable devices that will limit the pressure to the level the vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below the pressure that the system can safely withstand.
  • Page 11 Operation and Service of this equipment in strict accordance with the methods and procedures supplied by MKS is the responsibility of the Customer. MKS Instruments, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in MKS literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations.
  • Page 12 1.8 Service Guidelines Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA.

  • Page 13: Safety

    The MKS Instruments, Inc. General Terms and Conditions of Sale provides the complete and exclusive warranty for MKS products. This document may be located on the MKS web site at www.mksinst.com, or may be obtained by contacting a MKS Customer Service Representative.
  • Page 14 Chapter 1 Mini-Convectron Module with RS-485 and Dual Process Relays Instruction Manual - 275547...

  • Page 15: Introduction

    Chapter 2 Introduction 2.1 Introduction Unlike traditional thermocouple and Pirani gauges, Convectron gauges take advantage of heat loss due to convection cooling at higher pressures. This extends the range of accurate, repeatable vacuum measurements to atmosphere. The Mini-Convectron module is a self-contained measurement device incorporating Convectron gauge technology and electronics in a compact modular design.

  • Page 16: Gauge Tube Construction

    Chapter 2 2.2 Gauge Tube Construction The transducer is a convection enhanced Pirani gauge providing rapid response, six-decades of pressure transduction, stable calibration, and good accuracy. The Pirani sensing element, R1 of the schematic of Figure 2-2, is one leg of a Wheatstone Bridge. A temperature compensating network, R2, forms the second leg of the bridge.

  • Page 17: Specification

    Interstate Commerce regulations to file a valid claim with the carrier. Any damaged material including all containers and packing should be held for carrier inspection. Contact the MKS Customer Service Department if the shipment is not correct for reasons other than shipping damage.

  • Page 18: International Shipments

    2.6 Damaged Material Any damaged material, including all containers and packaging, should be held for carrier inspection. Contact the MKS Customer Service Department if the shipment is not correct for reasons other than shipping damage. Mini-Convectron Module with RS-485 and Dual Process Relays...

  • Page 19: Installation

    Chapter 3 Installation 3.1 Important Precautions for Mini-Convectron Installation The following precautions in the use and installation of the Mini-Convectron must be observed. It is recommended that the Mini-Convectron be installed with the port oriented vertically • downward to ensure that no system condensates or other liquids collect in the gauge tube. The gauge tube axis must be horizontal if it is to be used at pressures above 1 Torr.

  • Page 20: Install Pressure Relief Devices

    Before installing the module, install appropriate pressure relief devices in the vacuum system. MKS does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and pressure relief disks can be located via an on-line search. Confirm that these safety devices are properly installed before installing the Mini-Convectron Module.

  • Page 21: Installation Procedure

    Installation 3.3 Installation Procedure The module installation procedure includes the following steps: Locate and orient the module. Attach the module vacuum chamber fitting to its mate on the vacuum chamber. Assemble and connect module wiring. 3.4 Locate and Orient the Module Where you mount the gauge is critical to obtaining reliable pressure measurements.

  • Page 22: Orient The Module

    Chapter 3 Figure 3-2 Mini-Convectron Module Dimensions Table 3-1 Mini-Convectron Vacuum Connections Vacuum Connections Dim. H 1/8 NPT pipe thread, ½-inch inside diameter 1/2-inch 8 VCR type fitting, female NW16KF flange NW25KF flange 2.75-inch (NW35CF) ConFlat flange 3.4.2 Orient the Module For proper operation of the module above 1 Torr, orient the module so the axis is horizontal (see Figure 3-3).

  • Page 23: Attach The Module To The Vacuum Chamber

    Installation Figure 3-3 Module Orientation Mount the Module Axis Horizontally to Ensure Accurate Measurement Above 1 Torr Vacuum chamber Vacuum chamber Recommended Not recommended 3.5 Attach the Module to the Vacuum Chamber Attach the module vacuum chamber fitting to its mate on the vacuum chamber. Equipment Damage Twisting the module to tighten the fitting to the vacuum chamber can damage the module’s internal connections.

  • Page 24: Gauge Mounts

    The cable is user-supplied. MKS does not supply the cable. Install externally shielded cable and connect the shield at both ends. At the module end of the cable, connect the shield to the outer shell of the subminiature D connector.
  • Page 25 Installation Figure 3-4 15-pin D-type Connector Pins 15 Relay #1 Com. 14 Relay #1 N.C. 13 Relay #2 N.C. 12 Relay #2 Com. 11 Relay #2 N.O. 10 Relay #1 N.O. 9 Relay Disable 8 No Connection 7 No Connection 6 Signal Ground 5 No Connection 4 Power Ground...

  • Page 26: Grounding

    Chapter 3 3.7 Grounding High Voltage Under certain conditions, dangerously high voltage can be conducted through a gas directly to an ungrounded conductor almost as effectively as through a copper wire. The ability of an electric current to flow through a gas under certain circumstances poses a serious risk.

  • Page 27: Network Wiring

    Installation 3.8 RS-485 Network Wiring Connection between multiple controllers can easily be made by daisy chaining gauge controllers together with the signal from the host computer going into one connector then out the other to another gauge controller. The maximum total cable length is 4,000 ft. •...
  • Page 28 Mini-Convectron Module with RS-485 and Dual Process Relays Instruction Manual - 275547...

  • Page 29: Operation

    Chapter 4 Operation 4.1 Power Requirement The Mini-Convectron is in operation anytime that the +11.5 Vdc to +26.5 Vdc input voltage is applied. The sensor of the gauge tube runs at a temperature of approximately 120 °C above ambient, and gauge tube life is not affected by hours of operation. 4.2 Front Panel Features Table 4-1 Front Panel Features Front panel feature...

  • Page 30: Syntax/Address Overview

    Chapter 4 4.4 Syntax/Address Overview A command from the host must include a start character, address, data, and terminator: (start character)(address)(data)(terminator) The start character is "#" • The address is two ASCII digits representing the Hex address of the module. •...

  • Page 31: Command Set

    Operation 4.4.3 RS-485 Command Set Table 4-3 Summary of RS-485 Commands Command Description Command type Data returned Read pressure Read Pressure Set address offset Write Confirm Set span Read/Write Confirm or state Set zero Read/Write Confirm or state Set setpoint 2 Write Confirm Set setpoint 1...
  • Page 32 Chapter 4 1. Defective transducer, see Chapter 6. 2. Pressure higher than 999 Torr. 3. Gases other than nitrogen or air in system. Atmosphere pressure of helium will cause this response. Set Offset Address Example: From host:#01SA20 <CR> From Mini-Convectron: *01_PROGM_OK <CR> Notes: The address selector setting is added to this value.
  • Page 33 Operation Possible Responses: *01_HI_VAC_V <CR> Transducer output voltage is higher than it should be. Actual pressure may be higher or there may be tube contamination which may cause readout error to increase between TZ and TS settings. If ?01_OFST_LIM <CR> was received while setting TZ, this response may occur.
  • Page 34 Read Mini-Convectron Firmware Version Example: From host:#01VER <CR> From Mini-Convectron: *01_12997-00 Notes: In this example, 12997 is the MKS internal part number, 00 is the revision. Larger revision numbers indicate newer versions of firmware. Set Factory Default Example: From host:#01FAC <CR>...
  • Page 35 Operation • A/D sample frequency is set to 60 Hz • Baud rate = 19200 • Data format = 8 bits, no parity, 1 stop bit Set Baud Rate Example: From host:#01SB2400 <CR> From Mini-Convectron: *01_PROGM_OK <CR> Notes: Will continue to operate at old baud rate until power is cycled or RST command is sent. Max. baud rate is 115.2K.
  • Page 36 Chapter 4 Set Pressure Units of Measure Example: From host:#01SUT <CR> From Mini-Convectron: *01_PROGM_OK <CR> Note: The last character in the command string determines the unit of measure where M = mBar, P = pascal, and T = Torr. Read Pressure Units of Measure Example: From host:#01RU <CR>...
  • Page 37 Operation Read Process Control Relay Status Example: From Host: #01PCS <CR> From Mini-Convectron: *01PCS CR Note: The two characters ahead of the letters "PCS" indicate the state of the process control relays. The LSB character corresponds to Relay 1, and the MSB character corresponds to relay 2. A '1' character indicates that the relay is activated.

  • Page 38: Command - Response Timing

    Chapter 4 4.4.4 Command – Response Timing The speed of the response from the Mini-Convectron varies depending on the type of command being carried out. • The Mini-Convectron will shut off its driver H = 80US after sending data to host. •...

  • Page 39: Calibration

    Chapter 5 Calibration 5.1 Calibration Each Mini-Convectron gauge tube is individually calibrated for N and temperature compensated prior to leaving the factory. Each controller is individually calibrated to provide accurate readout of or air pressure; therefore, initial calibration should not be necessary. See Section 5.2 for use with gases other than N and air.

  • Page 40: Use With Gases Other Than N

    Chapter 5 5.2 Use with Gases Other Than N and Air Before using the Mini-Convectron gauge to measure the pressure of other gases make certain the TS adjustment is correctly set for air. It is important to understand that the indicated pressure on a Mini-Convectron gauge depends on the type of gas in the tube, the gas pressure in the tube, and on the orientation of the tube axis.
  • Page 41 Calibration Example 2: Indicated to True Pressure Conversion Assume you want to determine the true pressure of argon in a system when the Convectron is indicating 10 Torr. On Figure 5-2, read up from 10 Torr (N equivalent) indicated pressure to the argon curve and then horizontally to the left to a true pressure of 250 Torr.
  • Page 42 Chapter 5 Figure 5-1 Reading True Pressure Values, 10 –4 to 10 –1 Torr Mini-Convectron gauge axis must be horizontal Pressure unit equivalents: 1 µm Hg = 1 mTorr = 1 x 10 Torr –3 1000 µm Hg = 1 Torr 1 mbar = 100 pascal Indicated pressure in Torr (Nitrogen equivalent) Mini-Convectron Module with RS-485 and Dual Process Relays...
  • Page 43 Calibration Figure 5-2 Reading True Pressure Values, 10 –1 to 1000 Torr Mini-Convectron gauge axis must be horizontal Pressure unit equivalents: 1 µm Hg = 1 mTorr = 1 x 10 –3 Torr 1000 µm Hg = 1 Torr 1 mbar = 100 pascal Indicated pressure in Torr (Nitrogen equivalent) Mini-Convectron Module with RS-485 and Dual Process Relays Instruction Manual - 275547...
  • Page 44 Chapter 5 Figure 5-3 Reading True Pressure Values, 10 –1 to 1000 Torr Mini- Convectron gauge axis must be horizontal Pressure unit equivalents: 1 µm Hg = 1 mTorr = 1 x 10 –3 Torr 1000 µm Hg = 1 Torr 1 mbar = 100 pascal Indicated pressure in Torr (Nitrogen equivalent) Mini-Convectron Module with RS-485 and Dual Process Relays...
  • Page 45 Maintenance 6.1 General Information Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA.
  • Page 46 Substitution or modifying parts can result in serious product damage or personal injury due to electrical shock or fire. Install only those replacement parts that are specified by MKS. Do not install substitute parts or perform any unauthorized modification to the module.
  • Page 47 Maintenance 6.3 Symptoms and Possible Causes Table 6-1 General Symptoms/Possible Causes Symptom Possible Causes No power indication No input power. Verify that there is +11 Vdc to +16 Vdc at pin 3 of the I/O connector with respect to pin 4. Readout indicating a pressure in Gas composition on system not what user believes it to be.
  • Page 48 Chapter 6 6.4 Convectron Gauge Removal and Replacement Safety Precautions Removing or replacing the Convectron gauge in a high-voltage environment can cause an electrical discharge through a gas or plasma, resulting in serious property damage or personal injury due to electrical shock. Vent the vacuum chamber to atmospheric pressure and shut off power to the module before you remove or replace the Convectron gauge.
  • Page 49 Maintenance 6.5 Convectron Gauge Test For most troubleshooting procedures it is necessary to remove the printed circuit board and gauge tube from the enclosure. To accomplish this proceed as follows: 1. Remove the eight screws holding on the two end plates of the module. See Section 6.4.1. 2.
  • Page 50 Chapter 6 Notes: Mini-Convectron Module with RS-485 and Dual Process Relays Instruction Manual - 275547...
  • Page 51 Index Address selector I/O connector wiring Ambient operating temperature range Indicated pressure 32, 39 Installation Atmosphere adjust attaching module to vacuum chamber configuring relays for application 17, 29, 35 Baud rate grounding locating and orienting module mounting Calibration pressure relief devices Caution Notices &...
  • Page 52 P > 100 mTorr indicator Parity Parity settings Pins in "D" type connector Power Power indicator Precautions for troubleshooting Pressure 40–44 reading true values relief devices 40–44 true versus indicated Pressure response Pressure units of measure Relief devices Reset Response timing RS-485 address switch settings RS-485 commands RS-485 wiring 27...
  • Page 55 Series 275 Mini-Convectron Module with RS-485 ® and Dual Process Relays Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual Instruction manual part number 275547...

Table of Contents