MKS 253B-2-2-2 Instruction Manual
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MKS 253B-2-2-2 Instruction Manual

MKS 253B-2-2-2 Instruction Manual

253b series throttling valve
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118843-P1
Rev C, 2/99
Instruction Manual
MKS Type 253B
Throttling Valve
Six Shattuck Road
Fax: (978) 975-0093
Andover, MA 01810-2449
E-mail: mks@mksinst.com
(800) 227-8766 or (978) 975-2350
Web site: http://www.mksinst.com

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Summary of Contents for MKS 253B-2-2-2

  • Page 1 118843-P1 Rev C, 2/99 Instruction Manual MKS Type 253B Throttling Valve Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
  • Page 2 MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.
  • Page 3 118843-P1 Rev C, 2/99 MKS Type 253B Exhaust Throttle Valve...
  • Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 5: Table Of Contents

    Table of Contents Table of Contents Valve Safety Information ....................... 1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Sicherheitshinweise für das Ventil..................5 In dieser Betriebsanleitung vorkommende Symbole ........... 5 Erklärung der am Gerät angebrachten Symbole ............
  • Page 6 Table of Contents Dimensions....................23 O-Ring Material.....................26 Mounting Instructions..................26 Connectors .........................27 15-Pin Type “D” Connector ................27 Labels ........................28 Pump Label ....................28 Serial Number Label ..................28 Chapter Three: Operation and Theory of Operation..............29 Operation ........................29 Theory of Operation ....................29 Chapter Four: Maintenance ....................31 General Information ....................31 Maintenance.......................31 How To Clean the Unit ..................31...
  • Page 7 List of Figures and Tables List of Figures and Tables Figures Figure 1: Type 253 Valve with an ASA Flange ..............23 Figure 2: Type 253 Valve with a KF Style ISO Flange ............24 Figure 3: Type 253 Valve with a NW Style ISO Flange............24 Figure 4: Type 253 Valve with a CF Flange ................
  • Page 8 List of Figures and Tables...

  • Page 9: Valve Safety Information

    Valve Safety Information Symbols Used in This Instruction Manual Valve Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 10: Symbols Found On The Unit

    Symbols Found on the Unit Valve Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017 IEC 417, No.5008...

  • Page 11: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 12 Safety Procedures and Precautions Valve Safety Information DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All valve fittings must be consistent with valve specifications, and compatible with the intended use of the valve.

  • Page 13: Sicherheitshinweise Für Das Ventil

    Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin.

  • Page 14: Erklärung Der Am Gerät Angebrachten Symbole

    Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für das Ventil Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß...

  • Page 15: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
  • Page 16 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für das Ventil Spülen des Ventils mit Gas! Nach dem Installieren oder vor dem Ausbau aus einem System muß das Ventil unter Einsatz eines reinen Trockengases vollständig gespült werden, um alle Rückstände des Vorgängermediums zu entfernen. Anweisungen zum Spülen des Ventils! Das Ventil darf nur unter einer Ablufthaube gespült werden.

  • Page 17: Informations Relatives À La Sécurité Pour La Valve

    Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel.

  • Page 18: Symboles Apparaissant Sur L'unité

    Symboles apparaissant sur l'unité Informations relatives à la sécurité pour la valve Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.5007...

  • Page 19: Mesures De Sécurité Et Précautions

    Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la valve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
  • Page 20 Mesures de sécurité et précautions Informations relatives à la sécurité pour la valve UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE Cette valve doit être purgée sous une hotte de ventilation, et il faut porter des gants de protection. PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation spécifique pour une telle exploitation.

  • Page 21: Medidas De Seguridad De La Válvula

    Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.

  • Page 22: Símbolos Hallados En La Unidad

    Símbolos hallados en la unidad Medidas de seguridad de la válvula Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra...

  • Page 23: Procedimientos Y Precauciones De Seguridad

    No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de servicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas de mantenimiento.
  • Page 24 Procedimientos y precauciones de seguridad Medidas de seguridad de la válvula USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA La válvula debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores. NO HAGA FUNCIONAR LA VÁLVULA EN UN AMBIENTE CON RIESGO DE EXPLOSIONES Para evitar que se produzcan explosiones, no haga funcionar este producto en un ambiente con riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal...

  • Page 25: Chapter One: General Information

    Chapter One: General Information Introduction The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate (and in the case of a sealing valve, to shutoff) the removal of gas from a vacuum chamber when used with a MKS controller.

  • Page 26: How This Manual Is Organized

    Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.

  • Page 27: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the Type 253 Unit MKS has carefully packed the Type 253 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.

  • Page 28: Interface Cables

    January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE Mark.

  • Page 29: Generic Shielded Cables

    Interface Cables Generic Shielded Cables MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...

  • Page 30: Setup

    Setup Chapter Two: Installation Setup Flanges The 253 valve is available with the following flange types: • • NW Style ISO • KF Style ISO • • Examples of each flange type are shown in Dimensions, page 23. Refer to Appendix A: Product Specifications, page 33, for detailed information on each flange type.

  • Page 31: Dimensions

    Chapter Two: Installation Setup Dimensions Note 1. All dimensions are listed in inches with millimeters referenced in parentheses. 2. The actual dimensions for the Inner Diameter (A), Outside Diameter (B), Thickness (C), and Bolt Hole Diameter (D, where applicable), are listed in Appendix A: Product Specifications, page 33. 3.75 Square (95.25) TYP 5.00...

  • Page 32: Figure 2: Type 253 Valve With A Kf Style Iso Flange

    Setup Chapter Two: Installation 15-Pin Type "D" Driver/Gear Connector Assembly 1.44 (36.5) Type 253B-2-50-2 Shown Figure 2: Type 253 Valve with a KF Style ISO Flange 15-Pin Type "D" Driver/Gear Connector Assembly 0.39 (9.9) DIA Hole Through Type 253B-3-80-2 Shown Figure 3: Type 253 Valve with a NW Style ISO Flange...

  • Page 33: Figure 4: Type 253 Valve With A Cf Flange

    Chapter Two: Installation Setup 15-Pin Type "D" Driver/Gear Connector Assembly DIA Hole Through Type 253B-2-3CF-2 Shown Figure 4: Type 253 Valve with a CF Flange 15-Pin Type "D" Driver/Gear Connector Assembly 1.44 (36.5) DIA Hole Through O-Ring Supplied by Customer Type 253B-2-50J-2 Shown Figure 5: Type 253 Valve with a JIS Flange...

  • Page 34: O-Ring Material

    Setup Chapter Two: Installation O-Ring Material Valves that have an O-ring sealed flapper are called sealing butterfly valves. This design ensures closed leak rates less than 1.3 x 10 scc/sec when new. Ensure that the O-ring material is compatible with the gases it will be exposed to in the system. Mounting Instructions The moving parts in the valve create a risk of personal injury Warning...

  • Page 35: Connectors

    Chapter Two: Installation Connectors Connectors Note Overall metal braided shielded cables, properly grounded at both ends, are required to meet CE specifications. 15-Pin Type “D” Connector The 15-pin Type “D” connector, located at the end of the 6” pigtail cable, is used to connect the 253 valve to a controller.

  • Page 36: Labels

    CE mark signifying compliance with the European CE regulations. Serial #: 123456789 Model #: 253B-2-2-1 MKS Instruments, Inc. Made in the USA Figure 7: Serial Number Label Refer to Appendix B: Model Code Explanation, page 41, for more information.

  • Page 37: Chapter Three: Operation And Theory Of Operation

    Operation Chapter Three: Operation and Theory of Operation Operation MKS products are designed and tested to provide the highest degree of safety attainable. To use your 253 valve safely, you must always conform to the following instructions: Caution When operating this valve with high vacuum diffusion pumps, it is important to make certain the pressure above the oil vapor jet does not exceed 0.5 milliTorr, as this leads to unstable pump performance.
  • Page 38 Theory of Operation Chapter Three: Operation and Theory of Operation This page intentionally left blank.

  • Page 39: Chapter Four: Maintenance

    Any damage should be reported to the carrier and MKS Instruments immediately. If it is necessary to return the unit to MKS, obtain an ERA number (Equipment Return Authorization Number) from a MKS Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers.
  • Page 40 Maintenance Chapter Four: Maintenance This page intentionally left blank.

  • Page 41: Appendix A: Product Specifications

    Appendix A: Product Specifications Valve Specifications Appendix A: Product Specifications Valve Specifications CE Mark Compliance EMC Directive 89/336/EEC Electromagnetic Compatibility Machinery Directive 89/392/EEC Machinery Differential Pressure Across Valve 1 atm. (15 psig) max. Driver/Gear Assembly Width 3.75” square (95 mm) External Leakage at Shaft Seal 1 x 10 scc/sec He...

  • Page 42: Asa Flange Specifications

    ASA Flange Specifications Appendix A: Product Specifications ASA Flange Specifications Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B- 253B- 2-2-1 2-2-2 60-2-1 60-2-2 3-2-2 3-3-2 4-3-2 Inside Diameter (A)* Inches 1.88 1.950 2.362 2.362 3.025 3.025 3.965 (mm) (47.8) (49.5) (60.0) (60.0)
  • Page 43 Appendix A: Product Specifications ASA Flange Specifications ASA Flange Specifications (Continued) Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B- 4-4-2 6-4-2 6-6-2 8-6-2 8-8-2 10-10-2 Inside Diameter (A)* Inches 3.965 5.781 5.781 7.501 7.501 10.000 (mm) (100.7) (146.8) (146.8) (190.5) (190.5) (254.0)

  • Page 44: Kf Style Iso Flange Specifications

    KF Style ISO Flange Specifications Appendix A: Product Specifications KF Style ISO Flange Specifications Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B- 20-40-1 20-40-2 1-40-1 1-40-2 2-50-1 2-50-2 Inside Diameter (A)* Inches 0.779 0.779 1.270 1.270 1.888 2.000 (mm) (19.8) (19.8) (32.3)

  • Page 45: Nw Style Iso Flange Specifications

    Appendix A: Product Specifications NW Style ISO Flange Specifications NW Style ISO Flange Specifications Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B- 253B- 60-63-1 60-63-2 3-80-2 4-100-2 6-160-2 8-200-2 10-250-2 Inside Diameter (A)* Inches 2.362 2.362 3.000 3.875 5.750 7.650 9.700 (mm)

  • Page 46: Cf Flange Specifications

    CF Flange Specifications Appendix A: Product Specifications CF Flange Specifications Valve Type Number 253B- 253B- 253B- 253B- 253B- 20-2CF-1 20-2CF-2 1-2CF-1 1-2CF-2 2-3CF-1 Inside Diameter (A)* Inches 0.779 0.779 1.270 1.270 1.888 (mm) (19.79) (19.79) (32.3) (32.3) (48.0) Mounting Flange 2¾”...
  • Page 47 Appendix A: Product Specifications CF Flange Specifications CF Flange Specifications ( Continued ) Valve Type Number 253B 253B 253B 253B 253B 2-3CF-2 2-4CF-1 2-4CF-2 3-6CF-2 4-6CF-2 Inside Diameter (A)* Inches 2.000 1.888 2.000 3.000 3.875 (mm) (50.8) (48.0) (50.8) (76.2) (98.4) Mounting Flange 2¾”...

  • Page 48: Jis Flange Specifications

    JIS Flange Specifications Appendix A: Product Specifications JIS Flange Specifications Valve Type Number 253B- 253B 253B 2-50J-1 2-50J-2 4-100J-2 Inside Diameter (A)* Inches 1.888 2.000 3.875 (mm) (48.0) (50.8) (98.4) Mounting Flange 2¾” CF JIS 50 mm JIS 100 mm Outside Diameter (B)* Inches 4.47...

  • Page 49: Appendix B: Model Code Explanation

    Type 253 with ASA Flanges Type Nominal Inside ASA Flange Flapper Number Diameter Size O-Ring inches (mm) 253B-2-2-1 1.888 (48) 2” 253B-2-2-2 1.950 (50) 2” 253B-60-2-1 2.362 (60) 2” 253B-60-2-2 2.362 (60) 2” 253B-3-2-2 3.025 (77) 2” 253B-3-3-2 3.025 (77) 3”...
  • Page 50 Model Code Appendix B: Model Code Explanation Type 253 with KF or NW ISO Flanges Type Nominal Inside ISO Flange Flapper Number Diameter Size O-Ring inches (mm) 253B-20-40-1* 0.779 (20) KF-40 253B-20-40-2* 0.779 (20) KF-40 253B-1-40-1* 1.270 (32) KF-40 253B-1-40-2* 1.270 (32) KF-40 253B-2-50-1*...
  • Page 51 Appendix B: Model Code Explanation Model Code Type 253 with CF Flanges Type Nominal Inside CF Flange Size Flapper Number Diameter O-Ring inches (mm) 253B-20-2CF-1 0.779 (20) 2¾” 253B-20-2CF-2 0.779 (20) 2¾” 253B-1-2CF-1 1.270 (32) 2¾” 253B-1-2CF-2 1.270 (32) 2¾” 253B-2-3CF-1 1.888 (48) ”...
  • Page 52 Model Code Appendix B: Model Code Explanation This page intentionally left blank.

  • Page 53: Index

    Index Index ASA flanges KF ISO flanges dimensions, 23 dimensions, 24 model codes, 41 model codes, 42 specifications, 34–35 specifications, 36 Cables Maintenance, 31 generic shielded, 21 Manual organization, 18 part numbers, 20 Model codes, 41–43 CF flanges Mounting instructions, 26 dimensions, 25 model codes, 43 NW ISO flanges...
  • Page 54 Index Serial number label, 28 Specifications flanges, 34–40 standard valve, 33 Valve operation, 29 theory of operation, 29...

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