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Summary of Contents for MKS T3PIA
- Page 1 MKS Type T3PIA Pendulum Valve With Analog/TTL Interface Instruction Manual Six Shattuck Road Andover, MA 01810-2449 Main: 978.975.2350 137363-P1 www.mksinst.com Analog/TTL Interface Rev C...
- Page 2 (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship. For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship without charge to the purchaser.
- Page 3 MKS Type T3PIA Pendulum Valve With Analog/TTL Interface...
- Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America US Patent 6,089,537 and other Patents Pending DeviceNet™...
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Page 5: Table Of Contents
Table of Contents Valve Safety Information ..........................1 Symbols Used in This Instruction Manual ........................1 Symbols Found on the Unit............................1 Safety Procedures and Precautions..........................1 Sicherheitshinweise für das Ventil........................3 In dieser Betriebsanleitung vorkommende Symbole ..................... 3 Erklärung der am Gerät angebrachten Symbole ......................3 Sicherheitsvorschriften und Vorsichtsmaßnahmen ....................... - Page 6 Preventive Maintenance ..............................37 Troubleshooting................................45 Appendix A: Product Specifications ......................47 Appendix B: Model Code Explanation......................49 Model Code .................................49 Appendix C: Dimensions ..........................51 Index ................................. 61 List of Figures Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable........12 Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable........
- Page 7 List of Tables Table 1: Definition of Symbols Found on the Unit.....................1 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole ................3 Tableau 3: Définition des symboles sur l’unité ....................5 Tabla 4: Definición de los símbolos hallados en la unidad.................7 Table 5: Definitions ............................9 Table 6: Maximum Torque Levels When Mounting With the Centering Ring and Spacer Ring.....15 Table 7: Maximum Torque Levels When Mounting with the O-Ring in Groove ..........15 Table 8: Admissible Forces ..........................15...
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Page 9: Valve Safety Information
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these requirements. - Page 10 DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
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Page 11: Sicherheitshinweise Für Das Ventil
Sicherheitshinweise für das Ventil Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. - Page 12 Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
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Page 13: Informations De Sécurité Relatives Au Manomètre
Informations de sécurité relatives au manomètre Informations de sécurité relatives au manomètre Symboles utilisés dans ce manuel d’utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L’indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l’attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d’accident pour le personnel, en cas d’exécution incorrecte ou de non-respect des consignes. - Page 14 Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la valve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
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Page 15: Medidas De Seguridad Del Manómetro
Medidas de seguridad del manómetro Medidas de seguridad del manómetro Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. - Page 16 No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de servicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas de mantenimiento.
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Page 17: Chapter One: General Information
Chapter One: General Information Introduction The MKS Type T3P Throttle Valve is designed for use in downstream pressure control applications. The T3P unit consists of a throttling isolation valve with an electronic housing attached to the motor plate, a microprocessor, driver circuits which eliminate the need for a separate controller box, the RS-232 serial communications interface, and analog outputs that reflect pressure or valve position. -
Page 18: How This Manual Is Organized
Number) from the MKS Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be certified free of harmful, corrosive, radioactive, or toxic materials. -
Page 19: Chapter Two: Installation
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. -
Page 20: Figure 1: Preferred Method To Connect An Overall Metal Braided Shielded Cable
Interface Cables Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;... -
Page 21: Product Location And Requirements
Analog Pressure Transducer An analog pressure transducer requires ±15 VDC ±5%, supplied by an external power source or from the valve. The transducer is connected to the T3P unit using an appropriate interface cable. Contact the MKS Engineering Department for cable information. -
Page 22: Setup
Chapter Two: Installation Setup Setup Mounting Instructions The T3P unit can be mounted in a vacuum exhaust line with the proper fittings and connectors. For best pressure control, locate the pressure transducer and the T3P as close as practical to the process chamber. This minimizes the time constants associated with these items. -
Page 23: Table 6: Maximum Torque Levels When Mounting With The Centering Ring And Spacer Ring
Setup Chapter Two: Installation Table 6: Maximum Torque Levels When Mounting With the Centering Ring and Spacer Ring Max. Tightening Torque Max. Tightening Torque Nominal Size (Nm) (lbf-ft) inch ISO-F ISO-F 17-20 13-15 17-20 17-20 13-15 13-15 13-15 13-15 9-11 9-11 13-15 9-11... -
Page 24: Table 9: Mounting Screw Length
Chapter Two: Installation Setup Mounting Screw Length Note The maximum screw penetration into the valve mounting flange is equal to the nominal screw diameter. The use of screws exceeding this depth may result in improper flange preload and/or damage to the valve. Table 9: Mounting Screw Length Nominal Size Screw Quantity X Diameter... -
Page 25: Setup Procedures
Setup Procedures Chapter Two: Installation Setup Procedures The following is a brief overview of the key steps that should be followed in order to achieve optimal initial performance of the T3P Valve. Detailed descriptions of items can be found in other sections of this manual. Configuring each of these items properly on start up is highly recommended. -
Page 26: Electrical Information
Chapter Two: Installation Electrical Information The following parameters have default values that work for most applications, however they can be adjusted. It is highly recommended that the following values only be adjusted after a Pump Speed LEARN function has been conducted. System Tau Flow Observer Tau Trajectory Tau... -
Page 27: Figure 4: Top Panel Of The T3P Unit
Electrical Information Chapter Two: Installation Figure 4: Top Panel of the T3P Unit... -
Page 28: Table 11: Auxiliary Connector Pin Out
Chapter Two: Installation Electrical Information Auxiliary Connector The 25-pin female Type “D” Auxiliary connector provides access to the alarm relay outputs for use with an analog transducer. Table 11: Auxiliary Connector Pin Out Pin Number Description Reserved Reserved Valve Open Command (DIN) Valve Close Command (DIN) Pressure/Position Mode Command (DIN) PID/ST Mode Command (DIN) -
Page 29: Table 12: Analog Sensor 1 (High) Connector Pin Out
Electrical Information Chapter Two: Installation Analog Sensor Connector The two 15-pin female Type “D” Analog Sensor connectors provide access to the power and pressure input pins for use with analog Baratron sensors. Table 12: Analog Sensor 1 (High) Connector Pin Out Pin Number Description No Connection... -
Page 30: Table 13: Analog Sensor 2 (Low) Connector Pin Out
Chapter Two: Installation Electrical Information Table 13: Analog Sensor 2 (Low) Connector Pin Out Pin Number Description No Connection Pressure Input Signal (+) No Connection No Connection Sensor Power Return -15 V Power Output +15 V Power Output No Connection No Connection No Connection No Connection... -
Page 31: Startup
After initialization, the LEDs will change to indicate the current status. This will vary depending on the previous settings. Note If the power up LED sequence does not function properly, contact MKS for assistance. Warm Up Time After installation and power up, your T3P controller requires less than 1 minute to warm up. The Heater System, if installed, requires approximately 4 hours. - Page 32 Chapter Two: Installation Startup This page intentionally left blank.
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Page 33: Chapter Three: Product Overview
Valve Safety MKS products are designed and tested to provide the highest degree of safety attainable. To use your MKS valve safely, you must always conform to the following instructions: Refer to Chapter Two for directions on installation and operation of the valve. - Page 34 If you are unsure of the actual chamber volume, turn on the volume estimator. The volume estimator will determine the volume during the system learn and use this volume for pressure control. 3. Set correct pressure transducer ranges. Refer to the MKS Type T3BIA/T3PIA Valves with RS-232 Interface Supplement, as necessary.
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Page 35: Figure 5: Typical Pressure Response In Learn Mode
The typical chamber pump speed versus valve position is shown in Figure 6. Valve pump speed curve % open Figure 6. Typical Chamber Pump Speed Curve Refer to the MKS Type T3BIA/T3PIA Valves with RS-232 Interface Supplement for more information on how to learn the system. -
Page 36: Figure 7: Phase Set Too High
Chapter Three: Product Overview Control Mode Phase and Gain The T3P unit uses a PID compensator to control pressure in a vacuum system. When a new pressure setpoint is commanded, the unit responds by changing the pressure smoothly to the desired value. If the pressure is slow to change or oscillates, the PID compensator must be re-tuned. -
Page 37: Figure 9: Gain Set Too High
Control Mode Chapter Three: Product Overview Gain The gain provides a control signal that is proportional to the error signal. The gain allows the controller to track the setpoint with minimal steady state error. The highest possible gain setting produces the best pressure control. -
Page 38: Trip Points
The trip point delay can be set from 0 to 10,000 msec; the default value is 0. Different trip point delay values can be set for the trip point(s) (refer to Trip Point Alarm Delay in the MKS Type T3BIA/T3PIA Valves with... -
Page 39: Figure 11: Trip Point Direction Set Low
The direction of the trip points can be adjusted with a digital command, as described in Trip Point Direction in the MKS Type T3BIA/T3PIA Valves with RS-232 Interface Supplement. The initial direction for all of the trip points is “low.” The trip point is energized and the trip point LED illuminates as the pressure falls below the specified trip point value. -
Page 40: Top Panel Components
Chapter Three: Product Overview Top Panel Components Top Panel Components The top panel of the T3P is shown in Figure 13. Figure 13: Top Panel of the T3P Unit Analog Sensor Connectors The two 15-pin female Type “D” Analog Sensor connectors provide access to the power and pressure input pins for use with analog Baratron sensors. -
Page 41: Table 16: Position Status Led Indicators
Top Panel Components Chapter Three: Product Overview Valve Position Indicator LEDs The OPEN indicator light, located to the left of the manual valve switch, illuminates red when the valve is fully open. The CLOSE indicator light is located to the right of the manual switch and illuminates red when the valve is in the fully closed position. -
Page 42: Labels
Serial #: 0123456789 Model #: T3PIAXXYZABCDVV MKS Instruments, Inc. Made in the USA Figure 15: Serial Number Label The options for your controller are identified in the model code when you order the unit. Refer to Appendix B, Model Code Explanation, for more information. -
Page 43: Chapter Four: Analog/Ttl Operation
General Information Chapter Four: Analog/TTL Operation Chapter Four: Analog/TTL Operation General Information Digital inputs and outputs are designed to interface with low power TTL and CMOS logic families. They also include additional components to protect against damage from ESD or transient voltages. Selecting the Digital Input Functions The specific function of each digital input is listed in Table 18. -
Page 44: Setting The Analog Set Point Inputs
Approximately 50 msec later, the TTL Valve Close signal is read again and the valve is instructed to move closed. Refer to the MKS Type T3BIA/T3PIA Valves with RS-232 Interface Supplement for the complete list and description of serial commands. -
Page 45: Chapter Five: Maintenance And Troubleshooting
MKS Instruments immediately. If it is necessary to return the unit to MKS for service, obtain an ERA Number (Equipment Return Authorization Number) from any MKS Calibration and Service center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. -
Page 46: Figure 16: Four (4) Valve Cover Screws
Chapter Five: Maintenance and Troubleshooting Preventive Maintenance 3. Loosen the valve cover screws (4) and remove the cover. Refer to Figure 16. Figure 16: Four (4) Valve Cover Screws 4. Select the Pendulum Maintenance Mode Screen on the tool computer. 5. -
Page 47: Figure 18: Handle
Preventive Maintenance Chapter Five: Maintenance and Troubleshooting 11. With one hand, depress and hold in the MAINTENANCE button. (This will move the seal ring into a position that allows it to be unlocked.) Note The software looks for the MAINTENANCE button only if the valve is in position mode AND the valve is at 100 percent. -
Page 48: Figure 20: Lubricating O-Ring Groove
Chapter Five: Maintenance and Troubleshooting Preventive Maintenance Cleaning and Seal Replacement Clean the valve parts and replace seals on the seal ring as required. Install the seal ring face o-ring without grease. Lubricate the radial groove of the seal ring. Pay attention that the following quantity of grease is distributed constant on the whole circumference. -
Page 49: Figure 21: Seal Ring In Valve Body
Preventive Maintenance Chapter Five: Maintenance and Troubleshooting Reassembly 1. Insert the seal ring into the valve body so it is approximately centered within the valve bore and the handle is located approximately as indicated on the body. Refer to Figure 21. Figure 21: Seal Ring in Valve Body 2. -
Page 50: Table 22: Valve Cover Screw Torque
The T3P comes equipped with a battery. This battery is used to close the valve in the event of power loss. The battery is trickle charged when the T3P is powered. Use the following procedure to change the battery (MKS p/n 137182-P1). -
Page 51: Figure 22: Removing Phillips Head Screws
Preventive Maintenance Chapter Five: Maintenance and Troubleshooting Figure 22: Removing Phillips Head Screws 5. Allow the cover, with the fan attached, to gently hang in place. 6. Remove the battery pack connector from the PC board. 7. Remove the battery pack from the unit. Figure 23: Removing Battery Pack from Device... -
Page 52: Figure 24: Installing The New Battery Pack
Chapter Five: Maintenance and Troubleshooting Preventive Maintenance 8. Reverse the procedure to install the new battery pack. 9. Torque the 4 Phillips head screws to 15 lbf-in. Figure 24: Installing the New Battery Pack... -
Page 53: Troubleshooting
Chapter Five: Maintenance and Troubleshooting Troubleshooting The following sections contain basic information for identifying and solving problems with your device. MKS also offers standard maintenance and repair services, including recalibration at the MKS Regional Calibration and Service Centers. General Symptom... - Page 54 Valve reports unexpected Manometer Full Scale setup not Configure valve for correct manometer pressure. correct. range (see the MKS Type T3BIA/T3PIA Valves with RS-232 Interface Supplement). Voltage range for manometer not correct. Pump Speed Learn does Manometer needs to be plugged in Plug manometer in high range.
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Page 55: Appendix A: Product Specifications
Troubleshooting Appendix A: Product Specifications Appendix A: Product Specifications Digital Communication Specifications Connector 25-pin, type ‘D’, female Data Bits, Parity, Stop Bits Switch 8 Data bits, no parity, 1 stop bit, 19,200 baud rate Maximum Cable Length 50 ft. Response Time <... - Page 56 (100 to 120 VAC devices only). 10 Amp 250 VAC for flange size 100-320 mm MKS assumes no responsibility if the supplied plug is removed. For heater operation using 200 to 240 VAC, the heater power cable is not terminated.
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Page 57: Appendix B: Model Code Explanation
Appendix B: Model Code Explanation Model Code The options for your T3P are identified in the model code when you order the unit. The model code is identified as follows. T3PIA XX Y Z A B C D VV T3PIA where: Type Number... - Page 58 Appendix B: Model Code Explanation Model Code Finish (Z) Model Number Ordering Code None Anodize Main Seal (A) Model Number Ordering Code Viton Chemraz E38 Kalrez 8085 Heater (B) Model Number Ordering Code None 95° C @ 115 VAC 95° C @ 230 VAC 105°...
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Page 59: Appendix C: Dimensions
Appendix C: Dimensions Appendix C: Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. All dimensions are for reference only. - Page 60 Appendix C: Dimensions...
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Page 69: Index
Index Index Ambient operating temperature, 13, 47 Specifications, 47–48 Analog pressure transducer, 13 Temperature Analog set point, 25 operating, 13, 47 digital inputs, 36 storage, 47 CE Mark, 47 Trip point Connectors delay, 30 Analog Sensor, 21, 22, 32 direction, 30, 31 Auxiliary, 20, 32 hysteresis, 30 Control mode, description of, 25... - Page 70 Index...
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