Turbomolecular pumps for up-side down installation (31 pages)
Summary of Contents for Pfeiffer Vacuum TMH 071 Y P
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Betriebsanleitung • Operating Instructions Translation of the Original Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Units TC 100 TMH 071 Y P TMU 071 Y P...
5.2. Turbopump Temperature Management ..19 What To Do In Case Of Understanding The Pumps Breakdowns ?........ 20 TMH 071 Y P/TMU 071 Y P .... 4 2.1. Main Features........... 4 Maintenance / Replacement..21 Proper Use............5 7.1. Replacing The Electronic Drive Unit TC 100 ... 21 Improper Use............
1. Safety Instructions ☞ Read and follow all instructions in this manual. 1.1. For Your Orientation ☞ Inform yourself regarding: – Hazards which can be caused by the pump; Instruction in the text ➡ Working instruction: – Hazards which can be caused by your system. here, you have to do something.
Ambient conditions The turbomolecular pump needs to be installed in compliance Turbopumps TMH 071 Y P/TMU 071 Y P with the TC 100 form a with the following ambient conditions: complete unit. Voltage is supplied by the power unit (see ”Accessories”).
Proper Use 2.2. Differences Between The Pump Types – The Turbomolecular Pumps TMH 071 Y P/TMU 071 Y P may Feature TMH 071 Y P TMU 071 Y P only be used for the purpose of generating vacuum. – The turbopumps may only be used to pump those media...
Use a Pfeiffer Vacuum splinter shield or protective screen – The option to connect two of accessory components is The use of a Pfeiffer Vacuum splinter shield or protective provided on the Connection Box TCS 010 (please see screen in the high vacuum flange protects the turbopump Section 11.
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Connecting via a Pfeiffer Vacuum vibration compensator ISO-K flange with ISO-F flange The high vacuum side can be flanged onto the vacuum cham- ber either directly or via a Pfeiffer Vacuum vibration compen- If the pumps are secured with an ISO-K flange WARNING sator (see Section 11.
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CF-F flange Hexagon screw and clearance hole ➡ If used: Insert the splinter shield and protective screen in Applications for installing an CF-F to an CF-F flange are “Stud screw with blind hole” and “Hexagon screw and clearance the high vacuum flange with the clamping lugs downward hole”.
Directly flanging the pump 3.3. Connecting The Fore Vacuum Side The high vacuum flange of the turbopumps in “Y” version can Vacuum pressure ≤ 10 mbar; with Backing pump: be fitted in all positions. enhanced convection cooling < 0,1 mbar. Recommendation: Oil-Free Diaphragm Pump or Rotary With horizontal pump installation and oil-sealed backing...
3.4. Connecting The Cooling Unit 3.6. Connecting The Casing Heating Unit Turbopumps TMH 071 Y P/TMU 071 Y P can optionally be In order to accelerate attainment of final pressures, provided with enhanced convection cooling, air cooling or turbopumps and vacuum chambers can be heated.
3.7. Connecting The Sealing Gas Valve It is necessary to operate the turbopump using sealing gas which affords protection for the turbopump, particularly where corrosive and dusty processes are involved. Even in non-corrosive processes, from 50% of the maximum gas load sealing gas should be used to ensure rotor cooling. Connection is made via a sealing gas valve 66 (please see Section 11.
3.8. Connecting The Electronic Drive Unit 3.9. Installing The Power Unit TC 100 Voltage may only be supplied with the Pfeiffer CAUTION Vacuum power units (please see Sectin 11. The turbopump and the Electronic Drive Unit PLEASE NOTE Accessories). TC 100 are connected and together form a The use of other power units requires the prior single unit.
3.11. Remote Control Unit Remote control options for various functions are available via connection plug X3 (Pin 2 – Pin 6) on the TC 100. Shielded cable must be used. The shielding on the plug side of the Electronic Drive Unit TC 100 should be connected to the metal cap on the plug.
3.12. Connecting The Serial Interface Connecting The RS 485 RS 485 Connection to a fixed bus system The connection of the Display And Operating Unit ➡ Connect all units with D+ (Pin 13/X3) and D- (Pin 14/X3) on DCU 001, DCU 100 or HPU 001is possible via the Connection the bus.
4. Operations 4.1. Before Switching ON 4.3. Operations Via The Remote Control Unit Sections 4.1. to 4.3. relate only to pump operations in the condition on delivery without display and operating unit. (Please refer to the table in Section 3.11. and connection diagram in Section 3.13.) Turbopump rotors turn at great speed.
Switch Outputs The maximum power is dependent on the type of gas. Two characteristic lines are available for any type of gas in order ( ( P P i i n n 8 8 / / X X 3 3 A A n n d d P P i i n n 9 9 / / X X 3 3 ) ) to fully exploit the power potential of the pump: The switch outputs 1 and 2 can be loaded with maximum 24V/50 mA per output.
➡ The pump must be stored in buildings within a temperature Where small vacuum chambers are involved, the range of -25 °C to +55 °C. Pfeiffer Vacuum Venting Valve TVF 005 can be used for first ➡ In rooms with moist or aggressive atmospheres, the turbo- stage venting.
5. Monitoring Operations 5.1. Operations Display Via LED 5.2. Turbopump Temperature Management Certain operations modes of the turbopump and the TC 100 can be ascertained via the two integrated LEDs located on Where impermissible motor temperatures are involved or the the front panel of the Electronic Drive Unit TC 100.
• Enter 1500 Hz for parameter 777 (Parameter 777) (see operating instruction PM 0547 BN “Pumping Operations With DCU”). If there is no DCU/HPU available contact Pfeiffer Vacuum Service. 1) Without a DCU/HPU inform Pfeiffer Vacuum Service to check the cause of trouble.
Pfeiffer Vacuum Service to change). Where extreme operating conditions or unclean processes are involved, the replacement interval should be checked with your Pfeiffer Vacuum Service Center. You can change the Electronic Drive Unit TC 100 and the lubricant reservoir yourself. Please contact your Pfeiffer Vacuum Service for all other maintenance and service work.
Where extreme operating conditions or unclean processes are involved, the replacement interval should be checked with your Pfeiffer Vacuum Service Center. ➡ Switch off the turbopump, vent to atmospheric pressure (see Section 4.3.) and allow to cool as necessary.
➡ A copy of the completed declaration must accompany the unit; any additional copies must be sent to your local Pfeiffer Vacuum Service Center. Please get in touch with your local Pfeiffer Vacuum represen- tatives if there are any questions regarding contamination.
10. Spare Parts P P o o s s . . D D e e s s c c r r i i p p t t i i o o n n P P i i e e c c e e s s S S i i z z e e N N u u m m b b e e r r C C o o m m m m e e n n t t s s...
11.Accessories D D e e s s c c r r i i p p t t i i o o n n S S i i z z e e N N u u m m b b e e r r C C o o m m m m e e n n t t s s / / O O r r d d e e r r Q Q u u a a n n t t i i t t y y O O p p e e r r a a t t i i n n g g I I n n s s t t r r u u c c t t i i o o n n s s...
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. T T h h i i s s d d e e c c l l a a r r a a t t i i o o n n c c a a n n o o n n l l y y b b e e c c o o m m p p l l e e t t e e d d a a n n d d s s i i g g n n e e d d b b y y a a u u t t h h o o r r i i s s e e d d a a n n d d q q u u a a l l i i f f i i e e d d s s t t a a f f f f : : 1 1 .
The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. TMH 071 Y P / TMU 071 Y P Guidelines, harmonised standards and national standards and specifications which have been applied:...
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