Subscribe to Our Youtube Channel
Related Manuals for Pfeiffer Vacuum TMH 200M
Summary of Contents for Pfeiffer Vacuum TMH 200M
- Page 1 Betriebsanleitung • Operating Instructions Translation of the Original Operating Instructions Turbomolecular Drag Pumps, With Magnetic Bearings TMH 200M TMU 200M...
-
Page 2: Table Of Contents
Index Page Page 1. Safety Instructions ........3 4. Operations ..........13 1.1. For Your Orientation............3 4.1. Before Switching ON............13 1.2. Pictogram Definitions............3 4.2. Switching ON..............13 Switching ON Where Large Backing Pumps 2. Understanding The And Large Vacuum Chambers Are Involved ....13 TMH 200 M/ TMU 200M ...... -
Page 3: Safety Instructions
1. Safety Instructions ☞ Read and follow all instructions in this manual. Abbreviations in the text ☞ Inform yourself regarding: TCM = Magnetic bearing controller – Hazards which can be caused by the pump; TMP = Turbomolecular pump – Hazards which can be caused by your system. Position numbers –... -
Page 4: Understanding The Tmh 200 M/ Tmu 200M
2. Understanding The TMH 200M / TMU 200M 2.1. Main Features Ambient conditions The turbomolecular pump needs to be installed in compliance with the following ambient conditions: Turbomolecularpumpe TMH 200M High vacuum flange I I n n s s t t a a l l l l a a t t i i o o n n l l o o c c a a t t i i o o n n : :... -
Page 5: Proper Use
– The turbopump may only be operated in conjunction with a Suffix ”P“: Purge gas connection for the prevention of Pfeiffer Vacuum Magnetic Bearing And Electronic Drive the ingress of aggressive gases into the motor Unit TCM 1601 with relevant cables. -
Page 6: Installation
1 1 4 4 1 1 0 0 N N m m can occur which need to be Use a Pfeiffer Vacuum splinter shield or protective screen absorbed by the system and the high vacuum The use of a Pfeiffer Vacuum splinter shield or protective flange. screen in the high vacuum flange protects the turbopump... - Page 7 Otherwise the turbomolecular pump may twist or tear off. The clamps, bolts, nuts and centering rings are special designs from Pfeiffer Vacuum The components for installation are enclosed in the – The minimum strength of 170 N/mm of the flange material appropriate set of mounting material (see sec.
- Page 8 CF-F flange Hexagon screw and clearance hole ➡ If used: Insert the splinter shield and protective screen in Applications for installing an CF-F to an CF-F flange are “Stud screw with blind hole” and “Hexagon screw and clearance the high vacuum flange with the clamping lugs downward hole”.
-
Page 9: Connecting The Fore-Vacuum Side
Directly Flanging The Pump 3.3. Connecting The Fore-Vacuum Side Recommended Pfeiffer Vacuum backing pump Permissible installation positions for the turbopump – dry compressing: 11 Vacuum chamber Diaphragm Pump MVP 055-3 – for large vacuum chambers: Rotary Vane Vacuum Pumps DUO 010 M; UNO 030 B... -
Page 10: Connecting The Cooling Unit
3.4. Connecting The Cooling Unit Connection to the cooling water mains ➡ Fit the dirt trap (Accessory) in the supply line. The Turbopumps TMH/TMU 200M are water cooled as stan- ➡ Connect the supply line with hose clips onto one of the two dard. -
Page 11: Air Cooling (Accessory)
Air Cooling (Accessory) Electrical connection, air cooling ➡ The electrical connection of the air cooling unit is made on Air cooling is only permissible where the the control line 57 (please see Section 3.8.) on the connec- CAUTION ambient temperature is 5-40 °C. ting cable TCM-turbopump (see the operating instructions Ensure that the supply and exhaust air ducts for the TCM 1601, PM 0478 BN). -
Page 12: Connecting The Sealing Gas
3.6. Connecting The Sealing Gas 3.8. Connecting The Magnetic Bearing Controller To protect the pump, particularly where corrosive or dust pro- ducing processes are involved, it is necessary to use sealing ➡ Plug in the connecting cable between the magnetic gas. -
Page 13: Operations
4. Operations 4.1. Before Switching ON 4.3. Heating (only for pumps with casing heating unit) Turbopump rotors rotate at high speed. When WARNUNG the high vacuum flange is open there is a danger The heating duration is dependent on the degree of contami- of injury and of damage to the pump caused by nation and on the required final pressure. -
Page 14: Gas Type Dependent Operations
WARNING the incorrect gas mode can cause damage to the pump. Please get in touch with your local Pfeiffer Vacuum Service when a safety bearing replacement is required. For the vertex of the power characteristic line please refer to 4.8. Shutting Down For Longer Periods Section 8. -
Page 15: What To Do In Case Of Breakdowns
• Repair leak Unusual operating noises • Rotor damaged • Inform Pfeiffer Vacuum Service of need for repair • Splinter shield (if fitted) not • Check seat of splinter shield seated firmly (see Section 3.2.) •... -
Page 16: Maintenance
➡ A copy of the completed declaration must accompany the unit; any additional copies must be sent to your local Pfeiffer Vacuum Service Center. Please get in touch with your local Pfeiffer Vacuum represen- tatives if there are any questions regarding contamination. -
Page 17: Technical Data
8. Technical Data F F e e a a t t u u r r e e U U n n i i t t T T M M H H 2 2 0 0 0 0 M M T T M M U U 2 2 0 0 0 0 M M Connection nominal diameter Inlet DN 100 ISO-K... -
Page 18: Dimensions
8.1. Dimensions DN 100 ISO-K DN 100 CF-F Ø138.5 ø143 135.5 DN 25 ISO-KF Values in brackets be for TMU 200M (DN 100 CF-F). -
Page 19: Spare Parts
9. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare parts TMH/U 200M Rubber foot PK 001 111 USIT ring U 10,35x16x2 P 3529 133 -A Venting Valve TVF 005 G 1/8” PM Z01 135 (see Section 2.1.) Spare parts for the air cooling unit 110 V P 5099 251 -R7... -
Page 20: Accessories
10. Accessories Description Size Number Operating Instructions/ Order Quantity Comments Magnetic Bearing Controller TCM 1601 90 - 132 V; 50/60 Hz PM C01 675 PM 0478 BN 110 - 265 V; 50/60 Hz Connecting cable turbopump - TCM PM 051 003 -T other lengths on request Pumping Station Control Unit TCS 180 90-122 V, 50/60 Hz... -
Page 21: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. - Page 22 "Electromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. TMH 200 M / TMU 200 M Guidelines, harmonised standards and national standards and specifications...
- Page 23 Roots Pumps Dry Vacuum Pumps Leak Test Units Valves Flanges, Feedthroughs Vacuum Measurement Gas Analysis System Technology Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net...
Need help?
Do you have a question about the TMH 200M and is the answer not in the manual?
Questions and answers