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Summary of Contents for Pfeiffer Vacuum TSH 071 E
- Page 1 Operating Instructions TSH 071 E / TSU 071 E Turbomolecular Drag Pumping Stations, Economy Version PT 0067 BE/A (0105)
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Page 2: Table Of Contents
Index Page Page 4. Operations..........8 1. Safety Instructions ........3 4.1. Lubricant Filling ..............8 1.1. For Your Orientation............3 4.2. Before Starting ..............8 1.2. Pictogram Definitions............3 4.3. Starting ................8 2. Understanding The 4.4. Switching OFF..............9 Pumping Station ........ -
Page 3: Safety Instructions
1. Safety Instructions Read and follow all instructions in this manual. 1.1. For Your Orientation Inform yourself regarding: – Hazards which can be caused by the pumping station; In the text ➡ Working instruction: here, you have to do something. –... -
Page 4: Understanding The Pumping Station
Improper Use The following, inter alia, is regarded as improper: – The pumping of corrosive or explosive gases, Turbomolecular Drag Pumping Station TSH 071 E – Operating the pumping stations in areas where there is a danger of explosion, Turbomolecular Drag Pump TMH 071 P –... -
Page 5: Installation
3. Installation 3.1. Preparations For Installation Do not carry out any unauthorized modifications or alterations to the turbo pumping station. – Only remove the blank flange on the high and fore-vacuum side immediately before connecting. – The lubricant reservoir on turbopumps is fitted and filled ready for operation. -
Page 6: Electrical Connections
3.4. Electrical Connection 3.5. Connecting The Vacuum System The electrical connection should be carried out The weight of a vacuum chamber freely flanged in accordance with local regulations. onto the vacuum flange must not exceed 200 N Alternating current is required to operate the (corresponds to 20 kg). -
Page 7: Connections Diagram
3.8. Connections Diagram n.c. TC 600 +24 VDC*/max. 200 mA (supply voltage, DCU) n.c. n.c. DCU 001 RS 485 RS 485+/ (DO/RI) GND* (mass connection, DCU) RS 485- / (DO/RI) n.c. Pressure gauge +24 VDC*/max. 50 mA Venting release Motor, turbopump Contact current max. -
Page 8: Operations
4. Operations Operations with DCU 001 4.1. Lubricant Filling The DCU 001 serves to control and monitor the pumping – The bearing on the turbomolecular Drag Pump has been station. filled with the required amount of lubricant. Changing the ➡ Switch on the ON/OFF switch 29 (see Section 2.). lubricant reservoir should be carried out in accordance ➡... -
Page 9: Switching Off
4.4. Switching OFF Operations With DCU 001 ➡ Switch off the pumping station with key on the DCU 001. Operations without DCU 001 ➡ The complete pumping station is switched off with the Further details can be found in the following operating ON/OFF switch 29 (see Section 2.). -
Page 10: Service
PFEIFFER Service Center. 8. Technical Data Please refer to the relevant operating instructions for Pumping Station Unit TSH 071 E TSH 071 E technical data on the individual components (see Section TSU 071 E 2.3.). Connection, nominal diameter... -
Page 11: Dimensions
8.1. Dimensions Threaded holes (4xM4) for securing the heating relay box... -
Page 12: Accessories
9. Accessories Description Size Number Comments/ Ordering Relevant operating instructions Quantity Mains cable 230 V CEE7/CEE22 P 4564 309 ZA length 2,5 m 208 V NEMAG6-15P/CEE22 P 4564 309 ZF 115 V NEMAG5-15P/CEE22 P 4564 309 ZE Display And Operating Unit DCU 001 with Connecting cable TC 600-DCU 001 (3 m) PM 041 816 AT PM 800 477 BN... -
Page 13: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. -
Page 14: Declaration Of Conformity
Directive 98/37/EEC - Annex II A, EU Electromagentic Compatibility Directive 89/336/EEC and EU Low Voltage Directive 73/23/EEC. Produkt/Product: TSH 071 E TSU 071 E Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen: Guidelines, harmonised standards, national standards which have been applied:... - Page 15 +91 / 40 775 0014, telefax +91 / 40 775 7774 telephone +27 / 11 315 5434, telefax +27 / 11 315 5882 Branch Office, Czech Republic Israel Pfeiffer Vacuum Austria GmbH, Branch Prague Taiwan ODEM Scientific Applications Ltd. Zvonarska 885 HAKUTO Taiwan Ltd.
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