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Summary of Contents for Pfeiffer Vacuum TMH 262
- Page 1 Operating Instructions TMH 262 / TMU 262 TMH 262 P / TMU 262 P Turbomolecular Drag Pumps With Electronic Drive Unit With TC 100 PT 800 043 BE/B (0101)
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Page 2: Table Of Contents
5.2. Turbopump Temperature Management....... 14 2. Understanding The Pumps 6. What To Do In Case Of Breakdowns ?........15 TMH 262/TMU 262........4 2.1. Main Features..............4 7. Maintenance .......... 16 2.2. Differences Between The Pump Types......4 7.1. Replacing The Lubricant Reservoir....... 16 3. -
Page 3: Safety Instructions
1. Safety Instructions Read and follow all instructions in this manual. Symbols used Inform yourself regarding: The following symbols are used throughout in all illustrations. – Hazards which can be caused by the pump; – Hazards which can be caused by your system. High vacuum flange –... -
Page 4: Understanding The Pumps Tmh 262/Tmu 262
– The turbopump must be connected to a backing pump in accordance with Section 3.3. Turbopumps TMH 262/TMU 262 with the TC 100 form an unit. – Only PFEIFFER power units may be used to operate. The Voltage is supplied by the power unit (see ”Accessories”). -
Page 5: Installation
– On Turbopumps TMH 262/TMU 262 the lubricant reservoir underside of the turbopump must be secured for example via is already fitted and filled. -
Page 6: Fitting The Splinter Shield
Directly flanging the pump Fitting The Splinter Shield (Accessory) Insert the splinter shield in the high vacuum flange in such a way that the corrugation of the strainer points outwards. Permissible installation positions for the turbopump ➡ Bend the clamping lugs 12a slightly outwards so that sub- sequently the splinter shield 12 is seated firmly in the high 11 Vacuum chamber vacuum flange (to avoid noise). -
Page 7: Connecting The Cooling Unit
3.4. Connecting The Cooling Unit 3.6. Connecting The Casing Heating Unit The Turbopumps TMH 262/TMU 262 must be water or air In order to accelerate attainment of final pressures, cooled. turbopumps and vacuum chambers can be heated. Air cooling may only be used where the ambient temperature is <... -
Page 8: Connecting The Electronic Drive Unit Tc 100
3.7. Connecting The Electronic Drive Unit TC 100 3.8. Installing The Power Unit Turbopump and Electronic Drive Unit TC 100 are Only PFEIFFER power units (accessory) may be PLEASE NOTE fixed together and form a single unit. Connecting used for the purpose of supplying voltage. The cable 8a to power unit 105 has to be ordered agreement of the manufacturer is required if separately (please see "Accessories"). -
Page 9: Remote Control Unit
3.11. Remote Control Unit Remote control options for various functions are available via connection plug X3 (Pin 2 – Pin 6) on the TC 100. Shielded cable must be used. The shielding on the plug side of the Electronic Drive Unit TC 100 should be connected to the metal cap on the plug. -
Page 10: Connecting The Serial Interface Rs 485
3.12. Connecting Serial Interface RS 485 Connecting The RS 485 The connection of the Operating And Control Unit Connection to a fixed bus system DCU 001/DCU 100 is possible via the TCS 010 (accessory) ➡ Connect all units with D+ (Pin 13/X3) and D- (Pin 14/X3) on or cable TPS - TC 100/DCU (accessory), please refer to the bus. -
Page 11: Connections Diagram
3.13. Connection Diagram... -
Page 12: Operations
4. Operations 4.3. Operations Via The Remote Control Unit 4.1. Before Switching ON (Please refer to the table in Section 3.11. and connection dia- Sections 4.1. to 4.3. relate only to pump operations in the con- dition on delivery without Operating Unit DCU. gram in Section 3.13.) Remote control options are possible via inputs Turbopump rotors turn at great speed. -
Page 13: Switch Outputs
➡ Set the applicable gas mode on the TC 600 via the DCU Switch Outputs (please refer to Operating Instructions ”Pumping (Pin 8/X3 And Pin 9/X3) operations with The DCU” PM 800 547 BN). The switch outputs 1 and 2 can be loaded with maximum Works setting: Gas mode 0 24V/50 mA per output. -
Page 14: Shutting Down For Longer Periods
➡ Close fore-vacuum and venting connection by blank 4.5. Shutting Down For Longer Periods flanging. If aggressive or hazardous gases are pumped ➡ Place the pump vertically on its rubber feet. there is a danger of personal injury resulting ➡ In rooms with moist or aggressive atmospheres, the turbo- from coming into contact with process gases. -
Page 15: What To Do In Case Of Breakdowns
6. What To Do In Case Of Breakdowns? Problem Possible Causes Remedy Pump doesn't start; • Power supply interrupted • Check fuse in the power unit None of the integrated LEDs • Check plug contacts on the mains glow on the TC 100 power unit •... -
Page 16: Maintenance
7. Maintenance No liability for personal injury nor material Remove locking cover and extract lubricant reservoir PLEASE NOTE damage will be accepted for damages and 90 Locking cover operational interruptions which have been 91 O-ring caused by improper maintenance; in addition, 92 Lubricant reservoir all guarantees become invalid. -
Page 17: Service
8. Service Do make use of our service facilities Decontaminate units before returning or possi- In the event that repairs are necessary a number of options ble disposal. Do not return any units which are are available to you to ensure any system down time is kept to microbiologically, explosively or radioactively a minimum: contaminated. -
Page 18: Technical Data
9. Technical Data Feature Unit TMH 262 TMU 262 TMTMH 262 P TMU 262 P Connection nominal diameter Inlet DN 100 ISO-K DN 100 CF-F DN 100 ISO-K DN 100 CF-F Outlet DN 25 ISO-KF/G 1/4“ DN 25 ISO-KF/G Venting connection G 1/8”... -
Page 19: Dimensions Diagram
9.1. Dimensions Diagram TMH/TMU 262... -
Page 20: Spare Parts
10. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare Parts TMH/TMU 262 Set of seals PM 033 315 -T USIT ring P 3529 133 -A O-ring Vi 38x3 P 4070 621 PV Lubricant reservoir PM 063 265-T Spare Parts... -
Page 21: Accessories
11. Accessories Description Size Number Comments/ Order Quantity Operating Instructions Components for cooling Dirt trap R 3/8” P 4161 300 2R Recycled Water Cooling Unit TZK 400 230 V, 50 Hz PM Z01 245 PM 800 369 BN Air cooling 24 V DC PM Z01 252 PM 800 543 BN... -
Page 22: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. -
Page 23: Manufacturer's Declaration
We certify conformity with EU Electromagnetic Compatibility Directive 89/336/EEC and EU Low Voltage Directive 73/23/EEC. Produkt/Product: TMH 262 / TMU 262 TMH 262 P / TMU 262 P Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen: Guidelines, harmonised standards, national standards in which have been applied: EN 292-1, EN 292-2, EN 294,... - Page 24 18th Floor, Chokchail Intíl Bldg. Korea Assistencia Técnica e Representação S/C Ltda. 690 Sukhumvit Road Rua Bernadino de Compos, 551 Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453, Klongton, Klongtoey Dokok-Dong, Kang Nam-Ku, Seoul, 135-270 CEP 04620-002 São Paulo, SP - Brasil Bangkok 10110...
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