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Summary of Contents for Pfeiffer Vacuum TMH 521 P
- Page 1 Betriebsanleitung • Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Unit TC 600 TMH 521 P TMU 521 P...
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Page 2: Table Of Contents
5.2. Turbopump Temperature Management....... 19 6. What To Do In Case Of 2. Understanding The Pumps Breakdowns ? ........20 TMH 521 P/TMU 521 P ......4 2.1. Main Features..............4 7. Maintenance/Replacement ....21 Proper Use ................4 7.1. Replacing The Lubricant Reservoir....... 21 Improper Use .............. -
Page 3: Safety Instructions
1. Safety Instructions ☞ Read and follow all instructions in this manual. 1.1. For Your Orientation ☞ Inform yourself regarding: – Hazards which can be caused by the pump; Instruction in the text – Hazards which can be caused by your system. ➡... -
Page 4: Understanding The Pumps Tmh 521 P/Tmu 521 P
2.1. Main Features Ambient conditions The turbomolecular pump needs to be installed in compliance Turbopumps TMH 521 P/TMU 521 P with the TC 600 form an with the following ambient conditions: unit. Voltage is supplied by the power supply (see Section 11. -
Page 5: Improper Use
Improper use will cause all claims for liability and guarantees to be forfeited. 2.2. Differences Between The Pump Types Feature TMH 521 P TMU 521 P High vacuum flange ISO-K CF-F... -
Page 6: Installation
The high vacuum side can be flanged onto the vacuum cham- vacuum side immediately before connection. ber either directly or via a bellows or a vibration compensator – On Turbopumps TMH 521 P/TMU 521 P the lubricant (please see Sec. 11. ”Accessories”). reservoir is already fitted and filled. - Page 7 Centering ring (coated) PM 016 218 AU mit Schutzgitter Installation with different flange types is carried out at the user's own risk. Pfeiffer Vacuum shall Hexagon screws N 3024 479 1C (8 8 pieces must be used) assume no liability whatsoever for any damage or injuries resulting from this kind of attachment.
- Page 8 Variant 2 - Stud screw with blind hole Variant 3 - Stud screw and clearance hole (components as for variant 2; 1 1 6 6 pieces of nuts must be used C C o o n n n n e e c c t t i i o o n n n n o o m m i i n n a a l l - - D D e e s s i i g g n n a a t t i i o o n n O O r r d d e e r r - - n n u u m m b b e e r r d d i i a a m m e e t t e e r r Stud screw and clearance hole...
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Page 9: Connecting The Fore-Vacuum Side
The components for installing to an CF-F flange are to be If the pump is being installed horizontally: ordered under the following numbers: The fore-vacuum flange of the turbopump must be aligned vertically downwards (maximum deviation ± 20°), C C o o n n n n e e c c t t i i o o n n n n o o m m i i n n a a l l - - D D e e s s i i g g n n a a t t i i o o n n O O r r d d e e r r - - n n u u m m b b e e r r otherwise the turbopump could become dirty and the lubrica- d d i i a a m m e e t t e e r r... -
Page 10: Connecting The Cooling Unit
3.4. Connecting The Cooling Unit 3.6. Connecting The Casing Heating Unit The Turbopumps TMH 521 P/TMU 521 P must be water or air The attainment of final pressures is accelerated when cooled. turbopumps and vacuum chambers are baked out. Air cooling may only be used where the ambient temperature The heating duration is dependent on the degree of dirt and is <... -
Page 11: Connecting The Electronic Drive Unit Tc 600
TC 600 performs a self test on the supply volta- ge. The supply voltage for Turbomolecular Pumps TMH 521 P/TMU 521 P is 72 V DC ±5% in accordance with EN 60 742. If the turbopump is being operated with the Display And Operating Unit DCU 001, DCU 300 or HPU 001, remote plug 8d should be disconnected. -
Page 12: Connecting The Remote Control Unit
3.10. Connecting The Remote Control Unit Pin arrangement remote plug Remote control options for various functions are provided with the connection "REMOTE" on the TC 600 via the 15-pole D-Sub- Shielding is on the Connector. Shielded cable must be used. plug side of the TC 600 connected to the TC casing. -
Page 13: Connecting The Serial Interface Rs 485
3.11. Connecting The Serial Interface RS 485 Connecting The RS 485 An external operating component (DCU 001, DCU 300 or Connection to a fixed bus system HPU 001) or an external computer can be connected via the ➡ Connect all units with D+ (pin 5 / RS 485) and D- (pin 7 / connection ”RS 485”... -
Page 14: Connections Diagram
3.12. Connections Diagram TC 600 TC 750 n.c. +24 VDC*/max. 200 mA (supply voltage, DCU) n.c. n.c. RS 485 RS 485+/ (DO/RI) GND* (mass connection, DCU) RS 485- / (DO/RI) n.c. +24 VDC*/max. 50 mA Venting release Motor, turbopump Contact current max. Pumping station 6 mA / Contact Heating/Reset... -
Page 15: Operations
The valve cross-section for a venting rate of 15 mbar/s must be compatible with the size of the vacuum chamber. Where small vacuum chambers are involved, the Pfeiffer Vacuum Venting Valve TVF 005 can be used for first stage venting. ➡ Shut off water supply. -
Page 16: Gas Type Dependent Operations
PLEASE NOTE differentiation between the two ”gas modes” bag of dessicant, e.g silicagel. settings. If the pump has been shut down for PLEASE NOTE 3 years, the bearing must be changed (please contact Pfeiffer Vacuum Service). -
Page 17: Operations With The Dcu 001, Dcu 300
4.6. Operations With The Motor, Turbopump DCU 001, DCU 300 or HPU 001 When the pumping station is switched on and once the self test has been successfully completed (duration approximately 15 Operations with the DCU 001, DCU 300 or HPU 001 should be seconds), the turbopump is set in operation. -
Page 18: Rotation Speed Setting Mode Via Input Pwm
Rotation Speed Setting Mode Via Input PWM The supply of pulse width modulated signals (PWM) with a ground frequency of 100 Hz ±20% with an amplitude of maxi- mum 24 V and a key ratio of 25-75% enables the rotation speed to be set in the range 20-100% of the nominal rotation speed. -
Page 19: Monitoring Operations
5. Monitoring Operations 5.2. Turbopump Temperature Management 5.1. Operations Display Via LED Where impermissible motor temperatures are involved or the Certain operations modes of the turbopump and the TC 600 temperature of the TC 600 casing is too high, the motor can be ascertained via the two integrated LEDs located on current is reduced. -
Page 20: What To Do In Case Of Breakdowns
(Parameter 777) (see operating instruction PM 0547 BN “Pumping Operations With DCU”). If there is no DCU/HPU available contact Pfeiffer Vacuum Service . 1) Without a DCU or HPU inform Pfeiffer Vacuum Service to check the cause of trouble. -
Page 21: Maintenance/Replacement
Pfeiffer Vacuum Service Center. You can replace the lubricant reservoir and the Electronic Drive Unit TC 600 yourself. Please contact your local Pfeiffer Vacuum Service for all other maintenance and service work. Ensure no mechanical forces act on the CAUTION Electronic Drive Unit TC 600. -
Page 22: Replacing The Electronic Drive Unit Tc 600
7.2. Replacing The Electronic Drive Unit TC 600 The turbopump and the TC 600 must only be CAUTION disconnected from each other when the turbopump is completely at rest and the TC 600 has been disconnected from the power supply. ➡... -
Page 23: Service
➡ A copy of the completed declaration must accompany the unit; any additional copies must be sent to your local Pfeiffer Vacuum Service Center. Please get in touch with your local Pfeiffer Vacuum represen- tatives if there are any questions regarding contamination. -
Page 24: Technical Data
9. Technical Data Feature Unit TMH 521 P TMU 521 P Connection nominal diameter Inlet DN 100 ISO-K DN 160 ISO-K DN 100 CF-F DN 160 CF-F DN 100 ISO-F DN 160 ISO-F Outlet DN 25 ISO-KF/G 1/4“ DN 25 ISO-KF/G 1/4“... -
Page 25: Dimensions Diagram
9.1. Dimensions Diagram TMH 521 P/TMU 521 P DN 100 ISO-K/DN 160 ISO-K 148.5 DN 100 CF-F/DN 160 CF-F 4xM8 2xM8 147.5 97.1 DN 100 CF-F DN 100 ISO-K DN 160 ISO-K DN 160 CF-F Ø170 Ø208 DN 25 ISO-KF... - Page 26 TMH 521 P DN 100 ISO-F 122.7 DN 100 ISO-F Ø 208 DN 25 ISO-KF/G 1/4"...
- Page 27 TMH 521 P DN 160 ISO-F 122.7 DN 160 ISO-F Ø 208 DN 25 ISO-KF/G 1/4"...
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Page 28: Spare Parts
10. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare Parts TMH 521 P/TMU 521 P Blanking plug P 4098 582 FA Electronic Device Unit PM C01 720 please see Sec. 7.2. Remote plug PM 051 793 -X... -
Page 29: Accessories
11. Accessories Description Size Number Comments/ Order Quantity Operating Instructions Components for cooling Dirt trap R 3/8” P 4161 300 2R Recycled Water Cooling Unit TZK 400 230 V, 50 Hz PM Z01 245 PM 0369 BN Air cooling 24 V DC PM Z01 251 PM 0543 BN Water cooling... -
Page 30: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. -
Page 31: Manufacturer's Declaration
The product specified below is in correspondence to the EU directives Machinery 98/37/EEC, Electro- magnetic Compatibility 89/336/EEC and EU Low Voltage 73/23/EEC. Produkt/Product: TMH 521 P TMU 521 P Angewendete Richtlinien, harmonisierte Normen und angewendete nationale Normen: Guidelines, harmonised standards, national standards in which have been applied:... - Page 32 Roots Pumps Dry Vacuum Pumps Leak Test Units Valves Flanges, Feedthroughs Vacuum Measurement Gas Analysis System Technology Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net...
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