Summary of Contents for Pfeiffer Vacuum TPH 2101 U P
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Betriebsanleitung • Operating Instructions Translation of the Original Operating Instructions Turbomolecular Pumps For Up-side Down Installation TPH 2101 U P TPH 2101 U P C...
Index Page Page Safety Instructions......3 4.8. Operations With The DCU 001/DCU 600 or HPU 001 ............. 18 1.1. For Your Orientation ......... 3 4.9. Operations With The Remote Control Unit..19 1.2. Pictogram Definitions ........3 Venting Release (Optional) ......19 Understanding The Pumps ....
1. Safety Instructions ☞ Read and follow all instructions in this manual. 1.1. For Your Orientation ☞ Inform yourself regarding: – Hazards which can be caused by the pump; Instruction in the text – Hazards which can be caused by your system. ➡...
The turbopumps must not be transported when CAUTION filled with lubricant. Turbopumps TPH 2101 U P/TPH 2101 U P C with the TC 750 When being fitted into or dismantled from a form a complete unit. Voltage is supplied by power supply system, turbopumps may only be positioned as (see Section 11.
The following is regarded, inter alia, as improper: TPH 2101 U P Standard version – The pumping of explosive gases. TPH 2101 U P C Corrosive gas version – Operating the pumps in areas where there is a danger of explosion.
Use a Pfeiffer Vacuum splinter shield or protective mesh The use of a Pfeiffer Vacuum splinter shield or protective – Pumps must be filled with lubricant befor being operated mesh in the high vacuum flange protects the turbopump (see Section 4.1.).
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Otherwise the turbomolecular pump may twist or tear off. The clamps, bolts, nuts and centering rings are special designs from Pfeiffer Vacuum. – The minimum strength of 170 N/mm...
Horizontal installation position of the turbopump 11 Vacuum chamber 8˚ max. 15˚ max Horizontal installation position of the turbopump 3.3. Connecting The Fore-Vacuum Side The fore-vacuum flange of the turbopump must be aligned Backing pump: Fore-vacuum pressure please see vertical downwards, otherwise the turbopump could become ”Technical Data”...
3.4. Connecting The Cooling Unit Cooling with the Recycled Water Cooling Unit TZK (Accessory) The Turbopumps TPH 2101 U P/TPH 2101 U P C have been designed to be water cooled as standard. Connection to the TZK (cooling water connection please refer to Section Dirt traps are impermissible in the lines.
3.5. Connecting The Electronic 3.6. Installing The Power Supply Drive Unit TC 750 Voltage may only be supplied with the Pfeiffer CAUTION Vacuum power supplies (please see Section 11. The turbopump and the Electronic Drive Unit PLEASE NOTE Accessories). TC 750 are connected and together form a The use of other power supplies requires the single unit.
3.7. Installing The Cover Plate For The TC Inserts and Screw fittings Screw Blank PG 16; for fitting disc The turbomolecular pump with integrated Electronic Drive cable Ø6 Unit TC 750 has an IP 30 protection class rating. Insert (scope of delivery When the turbopump is water cooled the enclosed cover 1 piece E 153/8 1 piece E 153/11)
3.8. Connecting The Venting Valve 3.9. Connecting The Sealing Gas Valve For protection pruposes the turbopumpe should be operated The venting valve (see Section 11. Accessories) provides with sealing gas, particularly where corrosive and dusty automatic venting in the event of a power failure and processes are involved.
3.10. Connecting The Remote Control Pin arrangement remote plug Unit Remote control options for various functions are provided with the connection "REMOTE" on the TC 750 via the 15-pole D-Sub- Connector. Shielded cable must be used. Shielding is on the plug side of the TC 750 connected to the TC casing.
3.11. Connecting The Serial Connecting The RS 485 Interface RS 485 Connecting to a fixed bus system: An external operating component (DCU 001, DCU 600 o o r r ➡ Connect all units with D+ (pin 5/RS 485) and HPU 001) or – using a level converter – an external computer D- (pin7/RS 485) to the bus.
4. Operations 4.1. Filling In The Lubricant 4.2. Before Switching ON Pumps must be filled with lubricant before being Sections 4.2 to 4.6. refer only to operating the pump in its CAUTION operated. condition on delivery, without the DCU/HPU display and If possible fill in the lubricant in the fitting operating unit.
4.3. Switching ON – "Gas Mode 0" for gases with molecular mass ≥ 40 as, for example, Argon; ➡ Switch on the turbopump with switch S1 on the power – "Gas Mode 1" for all lighter gases. supply. – Once the self test has been successfully completed on the Works setting: “Gas mode 0”...
(please power supply at the same time with switch S1. get in touch with Pfeiffer Vacuum Service). Where corrosive gas processes are involved, the sealing gas supply should be shut off after approximately 10 minu- tes and both turbo pump and backing pump switched off with switch S1.
4.9. Operations With The Remote Control Standby Unit The pump can be operated optionally at 66% of its nominal rotation speed (standby ON) or at its nominal rotation speed Remote control operations can be performed via the connec- (standby OFF). tion with the designation “REMOTE”...
5. Monitoring Operations 5.2. Turbopump Temperature Monitoring 5.1. Operations Display Via LED Where impermissible motor temperatures are involved or the Certain operations modes of the turbopump and the TC 750 temperature of the casing is too high, the motor current is can be ascertained via the two integrated LEDs located on reduced.
(Parameter 777) (see operating instruction PM 0547 BN “Pumping Operations With DCU”). If there is no DCU/HPU available contact Pfeiffer Vacuum Service . 1) Without a DCU or HPU inform Pfeiffer Vacuum Service to check the cause of trouble.
➡ A copy of the completed declaration must accompany the unit; any additional copies must be sent to your local Pfeif- fer Vacuum Service Center. Please get in touch with your local Pfeiffer Vacuum represen- tatives if there are any questions regarding contamination.
Pfeiffer Vacuum Service Center. You can replace the lubricant, the lubricant pump and the Electronic Drive Unit TC 750 yourself. Filling in the lubricant Please contact your local Pfeiffer Vacuum Service for all Syringe other maintenance and service work. 71 Lubricant filler screw...
For cleaning the lubricant pump please contact your local power supply. Pfeiffer Vacuum Service. Remove the Electronic Drive Unit TC 750 from the turbopump as follows: 8.3. Replacing The Lubricant Pump ➡...
9. Technical Data F F e e a a t t u u r r e e U U n n i i t t T T P P H H 2 2 1 1 0 0 1 1 U U P P T T P P H H 2 2 1 1 0 0 1 1 U U P P C C Connection nominal diameter: Inlet...
10. Spare Parts P P o o s s . . D D e e s s c c r r i i p p t t i i o o n n P P i i e e c c e e s s S S i i z z e e N N u u m m b b e e r r C C o o m m m m e e n n t t s s...
11. Accessories D D e e s s c c r r i i p p t t i i o o n n S S i i z z e e N N u u m m b b e e r r C C o o m m m m e e n n t t s s / / O O r r d d e e r r Q Q u u a a n n t t i i t t y y O O p p e e r r a a t t i i n n g g I I n n s s t t r r u u c c t t i i o o n n s s...
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1.
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"Electromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. TPH 2101 UP / TPH 2101 UPC Guidelines, harmonised standards and national standards and specifications...
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Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net...
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