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Summary of Contents for Pfeiffer Vacuum TMH 1601 P
- Page 1 Betriebsanleitung • Operating Instructions Turbomolecular Drag Pumps With Electronic Drive Units TC 600 TMH 1601 P / TMU 1601 P TMH 1601 P C / TMU 1601 P C...
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Page 2: Table Of Contents
Index Page Page 1. Safety Instructions ........3 4.8. Operations With The DCU 001 / DCU 600 ..... 16 4.9. Operations With The Remote Control Unit....16 1.1. For Your Orientation............3 Venting Release (Optional)..........17 1.2. Pictogramm Definitions............. 3 Motor, Turbopump ............ -
Page 3: Safety Instructions
1. Safety Instructions ☞ Read and follow all instructions in this manual. 1.1. For Your Orientation ☞ Inform yourself regarding: – Hazards which can be caused by the pump; Instruction in the text – Hazards which can be caused by your system. ➡... -
Page 4: Understanding The Pumps Tmh/Tmu 1601 P And Tmh/Tmu 1601 Pc
– The turbopump must be connected to a backing pump in accordance with Section 3.3. – Only Pfeiffer Vacuum power units may be used to operate TC 600. The use of other power units requires the prior agreement of the manufacturer and equalisation with the valid specification. -
Page 5: Improper Use
Improper use will cause all claims for liability and guarantees to be forfeited. 2.2. Differences Between The Pump Types TMH/TMU 1601 P Standard version TMH/TMU 1601 PCCorrosive gas processes version Feature TMH 1601 P TMU 1601 P TMH 1601 PC TMU 1601 PC High vacuum flange ISO-K... -
Page 6: Installation
The high vacuum side can be flanged onto the vacuum 120 °C. If the vacuum chamber or parts in the vacuum chamber either directly or via a Pfeiffer Vacuum bellows or a chamber are heated, the values stated in the technical vibration compensator (please see ”Accessories”). -
Page 7: Fitting The Splinter Shield (Accessory)
Fitting The Splinter Shield (Accessory) Directly flanging the pump The turbopump can be flanged onto the vacuum chamber ➡ Insert the splinter shield in the ISO-K flange in condition on vertically (0°) up to an angle of 90° maximum. delivery. The fore-vacuum flange must always point CAUTION Inserting the splinter shield in ISO-K flage... -
Page 8: Connecting The Fore-Vacuum Side
3.4. Connecting The Cooling Unit The Turbopumps TMH 1601 P/TMU 1601 P have been designed to be water cooled as standard. Air cooling, as an accessory, may only be used where the ambient temperature is 35 °C. -
Page 9: Air Cooling (Accessory)
Air Cooling (Accessory) 3.6. Connecting The Casing Heating Unit (Accessory) Air cooling is only permissible for the CAUTION TMH/TMU 1601 P and where the ambient Heating turbopumps and vacuum chambers accelerates the temperature is 35 °C! attainment of final pressures. Ensure that the supply and exhaust air ducts The heating period is dependent on the level of contamination are not restricted. -
Page 10: Connecting The Electronic Drive Unit Tc 600
3.7. Connecting The Electronic 3.8. Installing The Power Unit Drive Unit TC 600 Voltage may only be supplied with the Pfeiffer CAUTION Vacuum power units (please see The turbopump and the Electronic Drive Unit PLEASE NOTE ”Accessories”). TC 600 are connected and together form a The use of other power units requires the prior single unit. -
Page 11: Connecting The Sealing Gas Valve
3.9. Connecting The Sealing Gas Valve 3.10. Connecting The Remote Control Unit To protect the pump, particularly where corrosive or dust Remote control options for various functions are provided producing processes are involved, it is necessary to use with the connection ”REMOTE” on the TC 600 via the 10 pole sealing gas. -
Page 12: Connecting The Serial Interface Rs 485
3.11.Connecting The Serial Only safety low voltages (SELV) may be WARNING connected to Serial Interface RS 485 . Interface RS 485 An external operating component (DCU 001/DCU 600) or an external computer can be connected via the connection ”RS 485” on the TC 600 with the use of an 8 pole modular connecting cable. -
Page 13: Connections Diagram
3.13. Connections Diagram... -
Page 14: Operations
4. Operations 4.1. Filling In The Lubricant f the turbopump is to be installed horizontally in movable system parts (for example, doors), such parts must be moved Pumps must be filled with lubricant before being gently. CAUTION operated. If possible fill in the lubricant in the fitting Where intense acceleration is involved, the position of the pump. -
Page 15: Switching On
4.3. Switching ON Where high level gas loads and rotation speeds are involved, the resulting friction subjects the rotor to the effect of great ➡ Switch on the turbopump with switch S1 on the power unit. heat. To avoid over-heating, a power rotation speed –... -
Page 16: Circulatory Lubrication
4 - Input, pumping station Where small vacuum chambers are involved, the 5 - Input, heating unit Pfeiffer Vacuum Venting Valve TVF 005 can be used for 6 - Input, Standby 7 - Input, PWM first 8 - Switching output 1: Rotation speed switchpoint stage venting. -
Page 17: Venting Release (Optional)
Venting Release (Optional) Rotation Speed Setting Operations Via Input PWM Automatic venting: The supply of pulse width modulated signals (PWM) with a When the turbopump or pumping station is switched off the ground frequency of 100 Hz ±20% with an amplitude of venting valve opens for the venting time of 3600 seconds maximum 24 V and a touch ratio of 25-75% enables the (1 hour) when the venting frequency falls below 50% of the... -
Page 18: Monitoring Operations
5. Monitoring Operations 5.1. Operations Display Via LED 5.2. Turbopump Temperature Monitoring Certain operations modes of the turbopump and the TC 600 Where impermissible motor temperatures are involved or the can be ascertained via the two integrated LEDs located on temperature of the TC 600 casing is too high, the motor the front panel of the TC 600. -
Page 19: What To Do In Case Of Breakdowns
DCU is possible 1) – Mains power failure • Ckeck power unit voltage • Check the power unit mains connection – Supply voltage short 1) Without a DCU inform Pfeiffer Vacuum Service to check the cause of trouble. -
Page 20: Maintenance
The Electronic Drive Unit TC 600 must only then You can change the lubricant yourself. CAUTION be disconnected from the turbopump when the Please contact your local Pfeiffer Vacuum Service for all pump is at a standstill and the TC 600 is other disconnected from the power supply. - Page 21 Lubricating pump Electronic drive unit 8c Securing screw (2 pieces) 18 Cooling plate 19 Hollow screw 19a Flat sealing 64 Lubricant reservoir 71 Lubricant filler screw 72 Lubricant drain screw 73 Sight glass 74 O-ring 75 O-ring 76 O-ring 77 Lubricating pump 79 Floater 80 Pin 81 Flange...
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Page 22: Service
➡ A copy of the completed declaration must accompany the unit; any additional copies must be sent to your local Pfeif- fer Vacuum Service Center. Please get in touch with your local Pfeiffer Vacuum represen- tatives if there are any questions regarding contamination. -
Page 23: Technical Data
9. Technical Data Feature Unit TMH 1601 P TMH 1601 P TMH 1601 P C H (T) TMH 1601 P C H (T) TMU 1601 P TMU 1601 P TMU 1601 P C H (T) TMU 1601 P C H (T) -
Page 24: Dimensions Diagram
1) Measured with a rotary vane vacuum pump > 5m3/h, 5) In accordance with DIN 28 428 the final pressure of a turbomolecular pump is that pressure higher gas throughputs with reduced rotation speed. which is attained in a measuring dome 48 hours after baking out. 2) In TMS operations the maximum gas throughput is reduced with increasing TMS temperature. -
Page 25: Spare Parts
10. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare parts TMH/TMU 1601 P TMH/TMU 1601 PC S S e e t t o o f f s s e e a a l l s s T T M M H H / / T T M M U U 1 1 6 6 0 0 1 1 P P P P M M 0 0 9 9 3 3 1 1 0 0 4 4 T T T T M M H H / / T T M M U U 1 1 6 6 0 0 1 1 P P C C P P M M 0 0 9 9 3 3 0 0 7 7 9 9 T T... -
Page 26: Accessories
Spare Parts 79 74 71/75 73/76 72/75 11. Accessories D D e e s s s s c c r r i i p p t t i i o o n n S S i i z z e e N N u u m m b b e e r r C C o o m m m m e e n n t t s s / / O O r r d d e e r r Q Q u u a a n n t t i i t t y y... -
Page 27: Lubricant
D D e e s s s s c c r r i i p p t t i i o o n n S S i i z z e e N N u u m m b b e e r r C C o o m m m m e e n n t t s s / / O O r r d d e e r r Q Q u u a a n n t t i i t t y y O O p p e e r r a a t t i i n n g g I I n n s s t t r r u u c c t t i i o o n n s s... -
Page 28: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. -
Page 29: Manufacturer´s Declaration
We certify conformity with EU Electromagnetic Compatibility Directive 89/336/EEC and EU Low Voltage Directive 73/23/EEC. Produkt/Product: TMH 1601 P / TMU 1601 P TMH1601 PCHT / TMU 1601 PCHT Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen: Guidelines, harmonised standards, national standards in which have been applied:... - Page 30 Roots Pumps Dry Vacuum Pumps Leak Test Units Valves Flanges, Feedthroughs Vacuum Measurement Gas Analysis System Technology Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net...
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