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Summary of Contents for Pfeiffer Vacuum TMH 260 C
- Page 1 Operating Instructions TMH 260 C/ TMU 260 C TMH 520 C/ TMU 520 C Turbomolecular Drag Pumps For Corrosive Gas Processes TMH/U 260 C TMH/U 520 C PM 800 370 BE/D (9906)
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Page 2: Table Of Contents
INDEX Page Page 5. What To Do In Case 1. Safety Precautions........3 1.1. For Your Orientation............3 Of Breakdowns? ........11 1.2. Pictogram Definitions............3 6. Service............ 12 2. Understanding The Pumps ....4 7. Maintenance .......... 13 2.1. Main Features..............4 7.1. -
Page 3: Safety Precautions
1. Safety Precautions 1.1. For Your Orientation Read and follow all the instructions in this manual. Inform yourself regarding: – Hazards which can be caused by the pump; In the text – Hazards which can arise in your system; Operating instruction: Here, you have to do something. –... -
Page 4: Understanding The Pumps
Water cooling Integrated excess temperature safety feature: Electronic drive unit reduces 2.2. Differences Between The Pump Types rotor rotation speed to zero. Feature TMH 260 C TMU 260 C Bearings High vacuum side: Wear free, coated permanent magnetic HV flange ISO-K CF-F bearing. -
Page 5: Installation
3. Installation 3.1. Preparations For Installation Connecting via a vibration compensator The maximum permissible temperature at the Do not carry out any unauthorised conversions vibration compensator is 100 °C. or modifications on the pump. Where a vibration compensator is in use, a freely suspended turbopump can be flanged onto the vacuum chamber. -
Page 6: Fitting The Splinter Shield
Fitting The Splinter Shield Connecting the backing pump 21 Backing pump High vacuum flange DN 100 and DN 160 22 Vacuum safety valve Insert the splinter shield in the high vacuum flange so that the 23 Suction line curvature of the grill faces outwards. Bend clamping lugs slightly outwards so that the splinter shield will sit firmly in the high vacuum flange (preventing noise). -
Page 7: Cooling With The Water Recycling Unit Tzk (Accessory)
3.5. Connecting The Venting Valves Connecting to the water mains Fit dirt trap (accessory) in the fore-line. The venting valve (Accessory) provides automatic venting in Using circlips, connect fore-line to one of the two cooling the event of a power failure and switching off. water connections. -
Page 8: Connecting The Electronic Drive Unit
3.6. Connecting The Electronic Drive Unit Voltages of > 100 V can be present on the open electrical contacts on a running down pump. There is danger of an electrical shock if the contacts are touched. Disconnect the plug to the electronic drive unit only once the pump is completely at rest and the electronic drive unit has been disconnected from the mains. -
Page 9: Operations
4. Operations 4.3. Switching ON 4.1 Lubricant Filling Turbo pump rotors rotate at high speed. When The pumps are designed to operate with Lubricant "F3" (not the high vacuum flange is open there is a supplied with the pump); "F3" must be ordered separately danger of injury. -
Page 10: Circulatory Lubrication
4.5. Circulatory Lubrication 4.7. Shutting Down For Longer Periods The ball bearing on the fore-vacuum side is supplied by lubri- Vacuum pumps are sometimes used to pump cant via the lubricant pump. Lubricant circulation is aggressive or hazardous gases. There is a monitored by means of a contact which transmits signals to danger of personal injury resulting from coming the electronic drive unit which shuts down the turbopump in... -
Page 11: What To Do In Case Of Breakdowns
5. What To Do In Case Of Breakdowns? Problem Possible Cause Remedy Pump doesn't start • Power supply interrupted • Check fuse in the electronic drive unit • Check plug contacts on the pump and the electronic drive unit • Check feeder lines •... -
Page 12: Service
6. Service Do make use of our service facilities Decontaminate units before returning or possi- In the event that repairs are necessary a number of options ble disposal. Do not return any units which are are available to you to ensure any system down time is kept to microbiologically, explosively or radioactively a minimum: contaminated. -
Page 13: Maintenance
7. Maintenance Important: Changing the lubricant No liability for personal injury nor material damage will be 71 Lubricant filler screw accepted for damages and operational interruptions which 72 Lubricant drain screw have been caused by improper maintenance; in addition, all 73 Sight glass guarantees become invalid. -
Page 14: Cleaning The Lubricant Pump
7.2. Cleaning The Lubricant Pump To remove float 79, press out pin 80. When re-fitting, the head of the float must point to the pin. If the pump does not accelerate to its operational rotation Check free movement of the two radial ball bearings 78. speed after a malfunction, the lubricant pump must be Carry out bearing change if the bearing is defective;... -
Page 15: Technical Data
8. Technical Data Feature Unit TMH 260 C TMH 520 C TMH 520 C TMU 260 C TMU 520 C TMU 520 C Connection nominal diameter Inlet DN 100 ISO-K DN 100 ISO-K DN 160 ISO-K DN 100 CF-F DN 100 CF-F... -
Page 16: Dimensions
8.1. Dimensions TMH/TMU 520 C TMH/TMU 260 C Locking screw Locking screw... -
Page 17: Accessories
9. Accessories Description Size Number Comments/ Order Quantity Operating Instructions Electronic Unit TCP 380 100 - 240 V; 50/60 Hz PM C01 490 PM 800 188 BN TCP 600 100 - 240 V; 50/60 Hz PM C01 320 PM 800 234 BN Connecting cable Turbo pump - TCP 380 PM 031 972 -U... -
Page 18: Lubricant
9.1. Lubricant Type Amount Order Number “F3” 0,05 l PM 006 336 -T “F3” 0,25 l PM 006 313 -T 10. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare Parts TMH/TMU 260 C TMH/TMU 520 C Set of seals TMH/U 260 C PM 043 500 -T TMH/U 520 C... - Page 19 Spare parts...
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Page 20: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. -
Page 21: Manufacturer's Declaration
Pfeiffer Vacuum GmbH Herstellererklärung im Sinne folgender EU-Richtlinien: Emmeliusstr. 33 - Maschinen 89/392/EWG D-35614 Asslar - Elektromagnetische Verträglichkeit 89/336/EWG - Niederspannung 73/23/EWG Hiermit erklären wir, daß das unten aufgeführte Produkt zum Einbau in eine Maschine bestimmt ist und daß deren Inbetriebnahme so lange untersagt ist, bis festgestellt wurde, daß... - Page 22 Abaixo, dá-se indicação das directivas aplicadas, das normas harmonizadas e das normas e especificações aplicades no respectivo país. Produkt/Product/Produit/Prodotto/Producto/Produkt/Produkt/Produto/ TMH 260 C / TMU 260 C TMH 520 C / TMU 520 C Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen in Sprachen und Spezifikationen: Guidelines, harmonised standards, national standards in languages and specifications which have been applied: Les directives appliquées, normes harmonisées et les normes nationales appliquées en langues et spécifications:...
- Page 23 18th Floor, Chokchail Intíl Bldg. Korea Assistencia Técnica e Representação S/C Ltda. 690 Sukhumvit Road Rua Bernadino de Compos, 551 Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453, Klongton, Klongtoey CEP 04620-002 São Paulo, SP - Brasil Dokok-Dong, Kang Nam-Ku, Seoul, 135-270 Bangkok 10110...
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